11/29/2011	12:20:33 AM	Helium valve closed
11/29/2011	12:20:33 AM	PH3 valve closed
11/29/2011	12:20:33 AM	Main Vac valve closed
11/29/2011	12:20:33 AM	Bypass valve closed
11/29/2011	12:20:33 AM	H2 valve opened
11/29/2011	12:20:33 AM	BCl3 valve opened
11/29/2011	12:20:33 AM	SiCl4 pre valve opened
11/29/2011	12:20:33 AM	SiCl4 post valve opened
11/29/2011	12:20:33 AM	Bubbler valve opened
11/29/2011	12:20:33 AM	Helium MFC set to  0.000000
11/29/2011	12:20:33 AM	H2 MFC set to  500.000000
11/29/2011	12:20:33 AM	BCl3 MFC set to  3.000000
11/29/2011	12:20:33 AM	PHl3 MFC set to  0.000000
11/29/2011	12:20:33 AM	SiCl4 MFC set to  25.000000
11/29/2011	12:20:33 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:20:33 AM	Tube furnace set to 1000
11/29/2011	12:50:33 AM	Helium valve closed
11/29/2011	12:50:33 AM	BCl3 valve closed
11/29/2011	12:50:33 AM	PH3 valve closed
11/29/2011	12:50:33 AM	SiCl4 pre valve closed
11/29/2011	12:50:33 AM	SiCl4 post valve closed
11/29/2011	12:50:33 AM	Main Vac valve closed
11/29/2011	12:50:33 AM	Bypass valve closed
11/29/2011	12:50:33 AM	H2 valve opened
11/29/2011	12:50:33 AM	Bubbler valve opened
11/29/2011	12:50:33 AM	Helium MFC set to  0.000000
11/29/2011	12:50:33 AM	H2 MFC set to  500.000000
11/29/2011	12:50:33 AM	BCl3 MFC set to  0.000000
11/29/2011	12:50:33 AM	PHl3 MFC set to  0.000000
11/29/2011	12:50:33 AM	SiCl4 MFC set to  0.000000
11/29/2011	12:50:33 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:50:33 AM	Tube furnace set to 750
11/29/2011	1:00:33 AM	H2 valve closed
11/29/2011	1:00:33 AM	BCl3 valve closed
11/29/2011	1:00:33 AM	PH3 valve closed
11/29/2011	1:00:33 AM	SiCl4 pre valve closed
11/29/2011	1:00:33 AM	SiCl4 post valve closed
11/29/2011	1:00:33 AM	Main Vac valve closed
11/29/2011	1:00:33 AM	Bypass valve closed
11/29/2011	1:00:33 AM	Helium valve opened
11/29/2011	1:00:33 AM	Bubbler valve opened
11/29/2011	1:00:33 AM	Helium MFC set to  500.000000
11/29/2011	1:00:33 AM	H2 MFC set to  0.000000
11/29/2011	1:00:33 AM	BCl3 MFC set to  0.000000
11/29/2011	1:00:33 AM	PHl3 MFC set to  0.000000
11/29/2011	1:00:33 AM	SiCl4 MFC set to  0.000000
11/29/2011	1:00:33 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:00:34 AM	Tube furnace set to 0
11/29/2011	1:10:33 AM	Helium valve closed
11/29/2011	1:10:33 AM	H2 valve closed
11/29/2011	1:10:33 AM	BCl3 valve closed
11/29/2011	1:10:33 AM	PH3 valve closed
11/29/2011	1:10:33 AM	SiCl4 pre valve closed
11/29/2011	1:10:33 AM	SiCl4 post valve closed
11/29/2011	1:10:33 AM	Main Vac valve closed
11/29/2011	1:10:33 AM	Bypass valve closed
11/29/2011	1:10:33 AM	Bubbler valve closed
11/29/2011	1:10:33 AM	Helium MFC set to  0.000000
11/29/2011	1:10:33 AM	H2 MFC set to  0.000000
11/29/2011	1:10:33 AM	BCl3 MFC set to  0.000000
11/29/2011	1:10:33 AM	PHl3 MFC set to  0.000000
11/29/2011	1:10:33 AM	SiCl4 MFC set to  0.000000
11/29/2011	1:10:33 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:10:33 AM	Tube furnace set to 0
11/29/2011	1:10:34 AM	Run finished at 1:10 AM
11/29/2011	1:10:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2011	1:10:41 AM	Recipe started at 1:10 AM
11/29/2011	1:10:41 AM	Helium valve closed
11/29/2011	1:10:41 AM	H2 valve closed
11/29/2011	1:10:41 AM	BCl3 valve closed
11/29/2011	1:10:41 AM	PH3 valve closed
11/29/2011	1:10:41 AM	SiCl4 pre valve closed
11/29/2011	1:10:41 AM	SiCl4 post valve closed
11/29/2011	1:10:41 AM	Main Vac valve closed
11/29/2011	1:10:41 AM	Bypass valve closed
11/29/2011	1:10:41 AM	Bubbler valve closed
11/29/2011	1:10:41 AM	Helium MFC set to  0.000000
11/29/2011	1:10:41 AM	H2 MFC set to  0.000000
11/29/2011	1:10:41 AM	BCl3 MFC set to  0.000000
11/29/2011	1:10:41 AM	PHl3 MFC set to  0.000000
11/29/2011	1:10:41 AM	SiCl4 MFC set to  0.000000
11/29/2011	1:10:41 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:10:41 AM	Tube furnace set to 0
11/29/2011	1:10:45 AM	H2 valve closed
11/29/2011	1:10:45 AM	BCl3 valve closed
11/29/2011	1:10:45 AM	PH3 valve closed
11/29/2011	1:10:45 AM	SiCl4 pre valve closed
11/29/2011	1:10:45 AM	SiCl4 post valve closed
11/29/2011	1:10:45 AM	Main Vac valve closed
11/29/2011	1:10:45 AM	Bypass valve closed
11/29/2011	1:10:45 AM	Bubbler valve closed
11/29/2011	1:10:45 AM	Helium valve opened
11/29/2011	1:10:45 AM	Helium MFC set to  500.000000
11/29/2011	1:10:45 AM	H2 MFC set to  0.000000
11/29/2011	1:10:45 AM	BCl3 MFC set to  0.000000
11/29/2011	1:10:45 AM	PHl3 MFC set to  0.000000
11/29/2011	1:10:45 AM	SiCl4 MFC set to  0.000000
11/29/2011	1:10:45 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:10:45 AM	Tube furnace set to 0
11/29/2011	1:10:45 AM	Helium valve closed
11/29/2011	1:10:45 AM	H2 valve closed
11/29/2011	1:10:45 AM	BCl3 valve closed
11/29/2011	1:10:45 AM	PH3 valve closed
11/29/2011	1:10:45 AM	SiCl4 pre valve closed
11/29/2011	1:10:45 AM	SiCl4 post valve closed
11/29/2011	1:10:45 AM	Main Vac valve closed
11/29/2011	1:10:45 AM	Bypass valve closed
11/29/2011	1:10:45 AM	Bubbler valve closed
11/29/2011	1:10:45 AM	Helium MFC set to  0.000000
11/29/2011	1:10:45 AM	H2 MFC set to  0.000000
11/29/2011	1:10:45 AM	BCl3 MFC set to  0.000000
11/29/2011	1:10:45 AM	PHl3 MFC set to  0.000000
11/29/2011	1:10:45 AM	SiCl4 MFC set to  0.000000
11/29/2011	1:10:45 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:10:45 AM	Tube furnace set to 0
11/29/2011	1:10:46 AM	Run finished at 1:10 AM
11/29/2011	1:10:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2011	1:13:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2011	1:13:26 AM	Recipe started at 1:13 AM
11/29/2011	1:13:26 AM	Helium valve closed
11/29/2011	1:13:26 AM	H2 valve closed
11/29/2011	1:13:26 AM	BCl3 valve closed
11/29/2011	1:13:26 AM	PH3 valve closed
11/29/2011	1:13:26 AM	SiCl4 pre valve closed
11/29/2011	1:13:26 AM	SiCl4 post valve closed
11/29/2011	1:13:26 AM	Main Vac valve closed
11/29/2011	1:13:26 AM	Bubbler valve closed
11/29/2011	1:13:26 AM	Bypass valve opened
11/29/2011	1:13:26 AM	Helium MFC set to  0.000000
11/29/2011	1:13:26 AM	H2 MFC set to  0.000000
11/29/2011	1:13:26 AM	BCl3 MFC set to  0.000000
11/29/2011	1:13:26 AM	PHl3 MFC set to  0.000000
11/29/2011	1:13:26 AM	SiCl4 MFC set to  0.000000
11/29/2011	1:13:26 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:13:26 AM	Tube furnace set to 0
11/29/2011	1:15:14 AM	Helium valve closed
11/29/2011	1:15:14 AM	H2 valve closed
11/29/2011	1:15:14 AM	BCl3 valve closed
11/29/2011	1:15:14 AM	PH3 valve closed
11/29/2011	1:15:14 AM	SiCl4 pre valve closed
11/29/2011	1:15:14 AM	SiCl4 post valve closed
11/29/2011	1:15:14 AM	Main Vac valve closed
11/29/2011	1:15:14 AM	Bubbler valve closed
11/29/2011	1:15:14 AM	Bypass valve opened
11/29/2011	1:15:14 AM	Helium MFC set to  0.000000
11/29/2011	1:15:14 AM	H2 MFC set to  0.000000
11/29/2011	1:15:14 AM	BCl3 MFC set to  0.000000
11/29/2011	1:15:14 AM	PHl3 MFC set to  0.000000
11/29/2011	1:15:14 AM	SiCl4 MFC set to  0.000000
11/29/2011	1:15:14 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:15:14 AM	Tube furnace set to 0
11/29/2011	1:16:14 AM	Helium valve closed
11/29/2011	1:16:14 AM	H2 valve closed
11/29/2011	1:16:14 AM	BCl3 valve closed
11/29/2011	1:16:14 AM	PH3 valve closed
11/29/2011	1:16:14 AM	SiCl4 pre valve closed
11/29/2011	1:16:14 AM	SiCl4 post valve closed
11/29/2011	1:16:14 AM	Bypass valve closed
11/29/2011	1:16:14 AM	Bubbler valve closed
11/29/2011	1:16:14 AM	Main Vac valve opened
11/29/2011	1:16:14 AM	Helium MFC set to  0.000000
11/29/2011	1:16:14 AM	H2 MFC set to  0.000000
11/29/2011	1:16:14 AM	BCl3 MFC set to  0.000000
11/29/2011	1:16:14 AM	PHl3 MFC set to  0.000000
11/29/2011	1:16:14 AM	SiCl4 MFC set to  0.000000
11/29/2011	1:16:14 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:16:14 AM	Tube furnace set to 0
11/29/2011	1:16:15 AM	Run finished at 1:16 AM
11/29/2011	1:16:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2011	10:02:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2011	10:03:00 AM	Recipe started at 10:02 AM
11/29/2011	10:03:00 AM	Helium valve closed
11/29/2011	10:03:00 AM	H2 valve closed
11/29/2011	10:03:00 AM	BCl3 valve closed
11/29/2011	10:03:00 AM	PH3 valve closed
11/29/2011	10:03:00 AM	SiCl4 pre valve closed
11/29/2011	10:03:00 AM	SiCl4 post valve closed
11/29/2011	10:03:00 AM	Main Vac valve closed
11/29/2011	10:03:00 AM	Bypass valve closed
11/29/2011	10:03:00 AM	Bubbler valve closed
11/29/2011	10:03:00 AM	Helium MFC set to  0.000000
11/29/2011	10:03:00 AM	H2 MFC set to  0.000000
11/29/2011	10:03:00 AM	BCl3 MFC set to  0.000000
11/29/2011	10:03:00 AM	PHl3 MFC set to  0.000000
11/29/2011	10:03:00 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:03:00 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:03:00 AM	Tube furnace set to 0
11/29/2011	10:03:03 AM	H2 valve closed
11/29/2011	10:03:03 AM	BCl3 valve closed
11/29/2011	10:03:03 AM	PH3 valve closed
11/29/2011	10:03:03 AM	SiCl4 pre valve closed
11/29/2011	10:03:03 AM	SiCl4 post valve closed
11/29/2011	10:03:03 AM	Main Vac valve closed
11/29/2011	10:03:03 AM	Bypass valve closed
11/29/2011	10:03:03 AM	Bubbler valve closed
11/29/2011	10:03:03 AM	Helium valve opened
11/29/2011	10:03:03 AM	Helium MFC set to  500.000000
11/29/2011	10:03:03 AM	H2 MFC set to  0.000000
11/29/2011	10:03:03 AM	BCl3 MFC set to  0.000000
11/29/2011	10:03:03 AM	PHl3 MFC set to  0.000000
11/29/2011	10:03:03 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:03:03 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:03:03 AM	Tube furnace set to 0
11/29/2011	10:04:08 AM	Helium valve closed
11/29/2011	10:04:08 AM	H2 valve closed
11/29/2011	10:04:08 AM	BCl3 valve closed
11/29/2011	10:04:08 AM	PH3 valve closed
11/29/2011	10:04:08 AM	SiCl4 pre valve closed
11/29/2011	10:04:08 AM	SiCl4 post valve closed
11/29/2011	10:04:08 AM	Main Vac valve closed
11/29/2011	10:04:08 AM	Bypass valve closed
11/29/2011	10:04:08 AM	Bubbler valve closed
11/29/2011	10:04:08 AM	Helium MFC set to  0.000000
11/29/2011	10:04:08 AM	H2 MFC set to  0.000000
11/29/2011	10:04:08 AM	BCl3 MFC set to  0.000000
11/29/2011	10:04:08 AM	PHl3 MFC set to  0.000000
11/29/2011	10:04:08 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:04:08 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:04:08 AM	Tube furnace set to 0
11/29/2011	10:04:09 AM	Run finished at 10:04 AM
11/29/2011	10:04:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2011	10:08:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2011	10:08:16 AM	Recipe started at 10:08 AM
11/29/2011	10:08:16 AM	Helium valve closed
11/29/2011	10:08:16 AM	H2 valve closed
11/29/2011	10:08:16 AM	BCl3 valve closed
11/29/2011	10:08:16 AM	PH3 valve closed
11/29/2011	10:08:16 AM	SiCl4 pre valve closed
11/29/2011	10:08:16 AM	SiCl4 post valve closed
11/29/2011	10:08:16 AM	Main Vac valve closed
11/29/2011	10:08:16 AM	Bubbler valve closed
11/29/2011	10:08:16 AM	Bypass valve opened
11/29/2011	10:08:16 AM	Helium MFC set to  0.000000
11/29/2011	10:08:16 AM	H2 MFC set to  0.000000
11/29/2011	10:08:16 AM	BCl3 MFC set to  0.000000
11/29/2011	10:08:16 AM	PHl3 MFC set to  0.000000
11/29/2011	10:08:16 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:08:16 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:08:16 AM	Tube furnace set to 0
11/29/2011	10:09:22 AM	Helium valve closed
11/29/2011	10:09:22 AM	H2 valve closed
11/29/2011	10:09:22 AM	BCl3 valve closed
11/29/2011	10:09:22 AM	PH3 valve closed
11/29/2011	10:09:22 AM	SiCl4 pre valve closed
11/29/2011	10:09:22 AM	SiCl4 post valve closed
11/29/2011	10:09:22 AM	Main Vac valve closed
11/29/2011	10:09:22 AM	Bubbler valve closed
11/29/2011	10:09:22 AM	Bypass valve opened
11/29/2011	10:09:22 AM	Helium MFC set to  0.000000
11/29/2011	10:09:22 AM	H2 MFC set to  0.000000
11/29/2011	10:09:22 AM	BCl3 MFC set to  0.000000
11/29/2011	10:09:22 AM	PHl3 MFC set to  0.000000
11/29/2011	10:09:22 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:09:22 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:09:22 AM	Tube furnace set to 0
11/29/2011	10:10:22 AM	Helium valve closed
11/29/2011	10:10:22 AM	H2 valve closed
11/29/2011	10:10:22 AM	BCl3 valve closed
11/29/2011	10:10:22 AM	PH3 valve closed
11/29/2011	10:10:22 AM	SiCl4 pre valve closed
11/29/2011	10:10:22 AM	SiCl4 post valve closed
11/29/2011	10:10:22 AM	Bypass valve closed
11/29/2011	10:10:22 AM	Bubbler valve closed
11/29/2011	10:10:22 AM	Main Vac valve opened
11/29/2011	10:10:22 AM	Helium MFC set to  0.000000
11/29/2011	10:10:22 AM	H2 MFC set to  0.000000
11/29/2011	10:10:22 AM	BCl3 MFC set to  0.000000
11/29/2011	10:10:22 AM	PHl3 MFC set to  0.000000
11/29/2011	10:10:22 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:10:22 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:10:22 AM	Tube furnace set to 0
11/29/2011	10:10:23 AM	Run finished at 10:10 AM
11/29/2011	10:10:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2011	10:15:51 AM	Tube furnace set to 150
11/29/2011	10:18:38 AM	Recipe started at 10:18 AM
11/29/2011	10:18:39 AM	Helium valve closed
11/29/2011	10:18:39 AM	H2 valve closed
11/29/2011	10:18:39 AM	BCl3 valve closed
11/29/2011	10:18:39 AM	PH3 valve closed
11/29/2011	10:18:39 AM	SiCl4 pre valve closed
11/29/2011	10:18:39 AM	SiCl4 post valve closed
11/29/2011	10:18:39 AM	Bypass valve closed
11/29/2011	10:18:39 AM	Bubbler valve closed
11/29/2011	10:18:39 AM	Main Vac valve opened
11/29/2011	10:18:39 AM	Helium MFC set to  0.000000
11/29/2011	10:18:39 AM	H2 MFC set to  0.000000
11/29/2011	10:18:39 AM	BCl3 MFC set to  0.000000
11/29/2011	10:18:39 AM	PHl3 MFC set to  0.000000
11/29/2011	10:18:39 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:18:39 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:18:39 AM	Tube furnace set to 150
11/29/2011	10:19:09 AM	H2 valve closed
11/29/2011	10:19:09 AM	BCl3 valve closed
11/29/2011	10:19:09 AM	PH3 valve closed
11/29/2011	10:19:09 AM	SiCl4 pre valve closed
11/29/2011	10:19:09 AM	SiCl4 post valve closed
11/29/2011	10:19:09 AM	Bypass valve closed
11/29/2011	10:19:09 AM	Bubbler valve closed
11/29/2011	10:19:09 AM	Helium valve opened
11/29/2011	10:19:09 AM	Main Vac valve opened
11/29/2011	10:19:09 AM	Helium MFC set to  20.000000
11/29/2011	10:19:09 AM	H2 MFC set to  0.000000
11/29/2011	10:19:09 AM	BCl3 MFC set to  0.000000
11/29/2011	10:19:09 AM	PHl3 MFC set to  0.000000
11/29/2011	10:19:09 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:19:09 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:19:09 AM	Tube furnace set to 150
11/29/2011	10:19:39 AM	Helium valve closed
11/29/2011	10:19:39 AM	H2 valve closed
11/29/2011	10:19:39 AM	BCl3 valve closed
11/29/2011	10:19:39 AM	PH3 valve closed
11/29/2011	10:19:39 AM	SiCl4 pre valve closed
11/29/2011	10:19:39 AM	SiCl4 post valve closed
11/29/2011	10:19:39 AM	Bypass valve closed
11/29/2011	10:19:39 AM	Bubbler valve closed
11/29/2011	10:19:39 AM	Main Vac valve opened
11/29/2011	10:19:39 AM	Helium MFC set to  0.000000
11/29/2011	10:19:39 AM	H2 MFC set to  0.000000
11/29/2011	10:19:39 AM	BCl3 MFC set to  0.000000
11/29/2011	10:19:39 AM	PHl3 MFC set to  0.000000
11/29/2011	10:19:39 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:19:39 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:19:39 AM	Tube furnace set to 150
11/29/2011	10:20:09 AM	H2 valve closed
11/29/2011	10:20:09 AM	BCl3 valve closed
11/29/2011	10:20:09 AM	PH3 valve closed
11/29/2011	10:20:09 AM	SiCl4 pre valve closed
11/29/2011	10:20:09 AM	SiCl4 post valve closed
11/29/2011	10:20:09 AM	Bypass valve closed
11/29/2011	10:20:09 AM	Bubbler valve closed
11/29/2011	10:20:09 AM	Helium valve opened
11/29/2011	10:20:09 AM	Main Vac valve opened
11/29/2011	10:20:09 AM	Helium MFC set to  20.000000
11/29/2011	10:20:09 AM	H2 MFC set to  0.000000
11/29/2011	10:20:09 AM	BCl3 MFC set to  0.000000
11/29/2011	10:20:09 AM	PHl3 MFC set to  0.000000
11/29/2011	10:20:09 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:20:09 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:20:09 AM	Tube furnace set to 150
11/29/2011	10:20:39 AM	Helium valve closed
11/29/2011	10:20:39 AM	H2 valve closed
11/29/2011	10:20:39 AM	BCl3 valve closed
11/29/2011	10:20:39 AM	PH3 valve closed
11/29/2011	10:20:39 AM	SiCl4 pre valve closed
11/29/2011	10:20:39 AM	SiCl4 post valve closed
11/29/2011	10:20:39 AM	Bypass valve closed
11/29/2011	10:20:39 AM	Bubbler valve closed
11/29/2011	10:20:39 AM	Main Vac valve opened
11/29/2011	10:20:39 AM	Helium MFC set to  0.000000
11/29/2011	10:20:39 AM	H2 MFC set to  0.000000
11/29/2011	10:20:39 AM	BCl3 MFC set to  0.000000
11/29/2011	10:20:39 AM	PHl3 MFC set to  0.000000
11/29/2011	10:20:39 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:20:39 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:20:40 AM	Tube furnace set to 150
11/29/2011	10:21:10 AM	H2 valve closed
11/29/2011	10:21:10 AM	BCl3 valve closed
11/29/2011	10:21:10 AM	PH3 valve closed
11/29/2011	10:21:10 AM	SiCl4 pre valve closed
11/29/2011	10:21:10 AM	SiCl4 post valve closed
11/29/2011	10:21:10 AM	Bypass valve closed
11/29/2011	10:21:10 AM	Bubbler valve closed
11/29/2011	10:21:10 AM	Helium valve opened
11/29/2011	10:21:10 AM	Main Vac valve opened
11/29/2011	10:21:10 AM	Helium MFC set to  20.000000
11/29/2011	10:21:10 AM	H2 MFC set to  0.000000
11/29/2011	10:21:10 AM	BCl3 MFC set to  0.000000
11/29/2011	10:21:10 AM	PHl3 MFC set to  0.000000
11/29/2011	10:21:10 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:21:10 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:21:10 AM	Tube furnace set to 150
11/29/2011	10:21:40 AM	Helium valve closed
11/29/2011	10:21:40 AM	H2 valve closed
11/29/2011	10:21:40 AM	BCl3 valve closed
11/29/2011	10:21:40 AM	PH3 valve closed
11/29/2011	10:21:40 AM	SiCl4 pre valve closed
11/29/2011	10:21:40 AM	SiCl4 post valve closed
11/29/2011	10:21:40 AM	Bypass valve closed
11/29/2011	10:21:40 AM	Bubbler valve closed
11/29/2011	10:21:40 AM	Main Vac valve opened
11/29/2011	10:21:40 AM	Helium MFC set to  0.000000
11/29/2011	10:21:40 AM	H2 MFC set to  0.000000
11/29/2011	10:21:40 AM	BCl3 MFC set to  0.000000
11/29/2011	10:21:40 AM	PHl3 MFC set to  0.000000
11/29/2011	10:21:40 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:21:40 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:21:40 AM	Tube furnace set to 150
11/29/2011	10:22:10 AM	H2 valve closed
11/29/2011	10:22:10 AM	BCl3 valve closed
11/29/2011	10:22:10 AM	PH3 valve closed
11/29/2011	10:22:10 AM	SiCl4 pre valve closed
11/29/2011	10:22:10 AM	SiCl4 post valve closed
11/29/2011	10:22:10 AM	Bypass valve closed
11/29/2011	10:22:10 AM	Bubbler valve closed
11/29/2011	10:22:10 AM	Helium valve opened
11/29/2011	10:22:10 AM	Main Vac valve opened
11/29/2011	10:22:10 AM	Helium MFC set to  20.000000
11/29/2011	10:22:10 AM	H2 MFC set to  0.000000
11/29/2011	10:22:10 AM	BCl3 MFC set to  0.000000
11/29/2011	10:22:10 AM	PHl3 MFC set to  0.000000
11/29/2011	10:22:10 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:22:10 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:22:10 AM	Tube furnace set to 150
11/29/2011	10:22:40 AM	Helium valve closed
11/29/2011	10:22:40 AM	H2 valve closed
11/29/2011	10:22:40 AM	BCl3 valve closed
11/29/2011	10:22:40 AM	PH3 valve closed
11/29/2011	10:22:40 AM	SiCl4 pre valve closed
11/29/2011	10:22:40 AM	SiCl4 post valve closed
11/29/2011	10:22:40 AM	Bypass valve closed
11/29/2011	10:22:40 AM	Bubbler valve closed
11/29/2011	10:22:40 AM	Main Vac valve opened
11/29/2011	10:22:40 AM	Helium MFC set to  0.000000
11/29/2011	10:22:40 AM	H2 MFC set to  0.000000
11/29/2011	10:22:40 AM	BCl3 MFC set to  0.000000
11/29/2011	10:22:40 AM	PHl3 MFC set to  0.000000
11/29/2011	10:22:40 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:22:40 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:22:40 AM	Tube furnace set to 150
11/29/2011	10:23:10 AM	H2 valve closed
11/29/2011	10:23:10 AM	BCl3 valve closed
11/29/2011	10:23:10 AM	PH3 valve closed
11/29/2011	10:23:10 AM	SiCl4 pre valve closed
11/29/2011	10:23:10 AM	SiCl4 post valve closed
11/29/2011	10:23:10 AM	Bypass valve closed
11/29/2011	10:23:10 AM	Bubbler valve closed
11/29/2011	10:23:10 AM	Helium valve opened
11/29/2011	10:23:10 AM	Main Vac valve opened
11/29/2011	10:23:10 AM	Helium MFC set to  20.000000
11/29/2011	10:23:10 AM	H2 MFC set to  0.000000
11/29/2011	10:23:10 AM	BCl3 MFC set to  0.000000
11/29/2011	10:23:10 AM	PHl3 MFC set to  0.000000
11/29/2011	10:23:10 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:23:10 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:23:11 AM	Tube furnace set to 150
11/29/2011	10:23:41 AM	Helium valve closed
11/29/2011	10:23:41 AM	H2 valve closed
11/29/2011	10:23:41 AM	BCl3 valve closed
11/29/2011	10:23:41 AM	PH3 valve closed
11/29/2011	10:23:41 AM	SiCl4 pre valve closed
11/29/2011	10:23:41 AM	SiCl4 post valve closed
11/29/2011	10:23:41 AM	Bypass valve closed
11/29/2011	10:23:41 AM	Bubbler valve closed
11/29/2011	10:23:41 AM	Main Vac valve opened
11/29/2011	10:23:41 AM	Helium MFC set to  0.000000
11/29/2011	10:23:41 AM	H2 MFC set to  0.000000
11/29/2011	10:23:41 AM	BCl3 MFC set to  0.000000
11/29/2011	10:23:41 AM	PHl3 MFC set to  0.000000
11/29/2011	10:23:41 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:23:41 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:23:41 AM	Tube furnace set to 150
11/29/2011	10:24:11 AM	H2 valve closed
11/29/2011	10:24:11 AM	BCl3 valve closed
11/29/2011	10:24:11 AM	PH3 valve closed
11/29/2011	10:24:11 AM	SiCl4 pre valve closed
11/29/2011	10:24:11 AM	SiCl4 post valve closed
11/29/2011	10:24:11 AM	Bypass valve closed
11/29/2011	10:24:11 AM	Bubbler valve closed
11/29/2011	10:24:11 AM	Helium valve opened
11/29/2011	10:24:11 AM	Main Vac valve opened
11/29/2011	10:24:11 AM	Helium MFC set to  20.000000
11/29/2011	10:24:11 AM	H2 MFC set to  0.000000
11/29/2011	10:24:11 AM	BCl3 MFC set to  0.000000
11/29/2011	10:24:11 AM	PHl3 MFC set to  0.000000
11/29/2011	10:24:11 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:24:11 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:24:11 AM	Tube furnace set to 150
11/29/2011	10:24:41 AM	Helium valve closed
11/29/2011	10:24:41 AM	H2 valve closed
11/29/2011	10:24:41 AM	BCl3 valve closed
11/29/2011	10:24:41 AM	PH3 valve closed
11/29/2011	10:24:41 AM	SiCl4 pre valve closed
11/29/2011	10:24:41 AM	SiCl4 post valve closed
11/29/2011	10:24:41 AM	Bypass valve closed
11/29/2011	10:24:41 AM	Bubbler valve closed
11/29/2011	10:24:41 AM	Main Vac valve opened
11/29/2011	10:24:41 AM	Helium MFC set to  0.000000
11/29/2011	10:24:41 AM	H2 MFC set to  0.000000
11/29/2011	10:24:41 AM	BCl3 MFC set to  0.000000
11/29/2011	10:24:41 AM	PHl3 MFC set to  0.000000
11/29/2011	10:24:41 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:24:41 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:24:41 AM	Tube furnace set to 150
11/29/2011	10:25:11 AM	H2 valve closed
11/29/2011	10:25:11 AM	BCl3 valve closed
11/29/2011	10:25:11 AM	PH3 valve closed
11/29/2011	10:25:11 AM	SiCl4 pre valve closed
11/29/2011	10:25:11 AM	SiCl4 post valve closed
11/29/2011	10:25:11 AM	Bypass valve closed
11/29/2011	10:25:11 AM	Bubbler valve closed
11/29/2011	10:25:11 AM	Helium valve opened
11/29/2011	10:25:11 AM	Main Vac valve opened
11/29/2011	10:25:11 AM	Helium MFC set to  20.000000
11/29/2011	10:25:11 AM	H2 MFC set to  0.000000
11/29/2011	10:25:11 AM	BCl3 MFC set to  0.000000
11/29/2011	10:25:11 AM	PHl3 MFC set to  0.000000
11/29/2011	10:25:11 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:25:11 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:25:11 AM	Tube furnace set to 150
11/29/2011	10:25:41 AM	Helium valve closed
11/29/2011	10:25:41 AM	H2 valve closed
11/29/2011	10:25:41 AM	BCl3 valve closed
11/29/2011	10:25:41 AM	PH3 valve closed
11/29/2011	10:25:41 AM	SiCl4 pre valve closed
11/29/2011	10:25:41 AM	SiCl4 post valve closed
11/29/2011	10:25:41 AM	Bypass valve closed
11/29/2011	10:25:41 AM	Bubbler valve closed
11/29/2011	10:25:41 AM	Main Vac valve opened
11/29/2011	10:25:41 AM	Helium MFC set to  0.000000
11/29/2011	10:25:41 AM	H2 MFC set to  0.000000
11/29/2011	10:25:41 AM	BCl3 MFC set to  0.000000
11/29/2011	10:25:41 AM	PHl3 MFC set to  0.000000
11/29/2011	10:25:41 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:25:41 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:25:42 AM	Tube furnace set to 150
11/29/2011	10:26:12 AM	H2 valve closed
11/29/2011	10:26:12 AM	BCl3 valve closed
11/29/2011	10:26:12 AM	PH3 valve closed
11/29/2011	10:26:12 AM	SiCl4 pre valve closed
11/29/2011	10:26:12 AM	SiCl4 post valve closed
11/29/2011	10:26:12 AM	Bypass valve closed
11/29/2011	10:26:12 AM	Bubbler valve closed
11/29/2011	10:26:12 AM	Helium valve opened
11/29/2011	10:26:12 AM	Main Vac valve opened
11/29/2011	10:26:12 AM	Helium MFC set to  20.000000
11/29/2011	10:26:12 AM	H2 MFC set to  0.000000
11/29/2011	10:26:12 AM	BCl3 MFC set to  0.000000
11/29/2011	10:26:12 AM	PHl3 MFC set to  0.000000
11/29/2011	10:26:12 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:26:12 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:26:12 AM	Tube furnace set to 150
11/29/2011	10:26:42 AM	Helium valve closed
11/29/2011	10:26:42 AM	H2 valve closed
11/29/2011	10:26:42 AM	BCl3 valve closed
11/29/2011	10:26:42 AM	PH3 valve closed
11/29/2011	10:26:42 AM	SiCl4 pre valve closed
11/29/2011	10:26:42 AM	SiCl4 post valve closed
11/29/2011	10:26:42 AM	Bypass valve closed
11/29/2011	10:26:42 AM	Bubbler valve closed
11/29/2011	10:26:42 AM	Main Vac valve opened
11/29/2011	10:26:42 AM	Helium MFC set to  0.000000
11/29/2011	10:26:42 AM	H2 MFC set to  0.000000
11/29/2011	10:26:42 AM	BCl3 MFC set to  0.000000
11/29/2011	10:26:42 AM	PHl3 MFC set to  0.000000
11/29/2011	10:26:42 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:26:42 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:26:42 AM	Tube furnace set to 150
11/29/2011	10:27:12 AM	H2 valve closed
11/29/2011	10:27:12 AM	BCl3 valve closed
11/29/2011	10:27:12 AM	PH3 valve closed
11/29/2011	10:27:12 AM	SiCl4 pre valve closed
11/29/2011	10:27:12 AM	SiCl4 post valve closed
11/29/2011	10:27:12 AM	Bypass valve closed
11/29/2011	10:27:12 AM	Bubbler valve closed
11/29/2011	10:27:12 AM	Helium valve opened
11/29/2011	10:27:12 AM	Main Vac valve opened
11/29/2011	10:27:12 AM	Helium MFC set to  20.000000
11/29/2011	10:27:12 AM	H2 MFC set to  0.000000
11/29/2011	10:27:12 AM	BCl3 MFC set to  0.000000
11/29/2011	10:27:12 AM	PHl3 MFC set to  0.000000
11/29/2011	10:27:12 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:27:12 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:27:12 AM	Tube furnace set to 150
11/29/2011	10:27:42 AM	Helium valve closed
11/29/2011	10:27:42 AM	H2 valve closed
11/29/2011	10:27:42 AM	BCl3 valve closed
11/29/2011	10:27:42 AM	PH3 valve closed
11/29/2011	10:27:42 AM	SiCl4 pre valve closed
11/29/2011	10:27:42 AM	SiCl4 post valve closed
11/29/2011	10:27:42 AM	Bypass valve closed
11/29/2011	10:27:42 AM	Bubbler valve closed
11/29/2011	10:27:42 AM	Main Vac valve opened
11/29/2011	10:27:42 AM	Helium MFC set to  0.000000
11/29/2011	10:27:42 AM	H2 MFC set to  0.000000
11/29/2011	10:27:42 AM	BCl3 MFC set to  0.000000
11/29/2011	10:27:42 AM	PHl3 MFC set to  0.000000
11/29/2011	10:27:42 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:27:42 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:27:42 AM	Tube furnace set to 150
11/29/2011	10:28:12 AM	H2 valve closed
11/29/2011	10:28:12 AM	BCl3 valve closed
11/29/2011	10:28:12 AM	PH3 valve closed
11/29/2011	10:28:12 AM	SiCl4 pre valve closed
11/29/2011	10:28:12 AM	SiCl4 post valve closed
11/29/2011	10:28:12 AM	Bypass valve closed
11/29/2011	10:28:12 AM	Bubbler valve closed
11/29/2011	10:28:12 AM	Helium valve opened
11/29/2011	10:28:12 AM	Main Vac valve opened
11/29/2011	10:28:12 AM	Helium MFC set to  20.000000
11/29/2011	10:28:12 AM	H2 MFC set to  0.000000
11/29/2011	10:28:12 AM	BCl3 MFC set to  0.000000
11/29/2011	10:28:12 AM	PHl3 MFC set to  0.000000
11/29/2011	10:28:12 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:28:12 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:28:13 AM	Tube furnace set to 150
11/29/2011	10:28:43 AM	Helium valve closed
11/29/2011	10:28:43 AM	H2 valve closed
11/29/2011	10:28:43 AM	BCl3 valve closed
11/29/2011	10:28:43 AM	PH3 valve closed
11/29/2011	10:28:43 AM	SiCl4 pre valve closed
11/29/2011	10:28:43 AM	SiCl4 post valve closed
11/29/2011	10:28:43 AM	Bypass valve closed
11/29/2011	10:28:43 AM	Bubbler valve closed
11/29/2011	10:28:43 AM	Main Vac valve opened
11/29/2011	10:28:43 AM	Helium MFC set to  0.000000
11/29/2011	10:28:43 AM	H2 MFC set to  0.000000
11/29/2011	10:28:43 AM	BCl3 MFC set to  0.000000
11/29/2011	10:28:43 AM	PHl3 MFC set to  0.000000
11/29/2011	10:28:43 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:28:43 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:28:43 AM	Tube furnace set to 150
11/29/2011	10:28:44 AM	Run finished at 10:28 AM
11/29/2011	10:33:04 AM	Recipe started at 10:32 AM
11/29/2011	10:33:04 AM	Helium valve closed
11/29/2011	10:33:04 AM	H2 valve closed
11/29/2011	10:33:04 AM	BCl3 valve closed
11/29/2011	10:33:04 AM	PH3 valve closed
11/29/2011	10:33:04 AM	SiCl4 pre valve closed
11/29/2011	10:33:04 AM	SiCl4 post valve closed
11/29/2011	10:33:04 AM	Bypass valve closed
11/29/2011	10:33:04 AM	Bubbler valve closed
11/29/2011	10:33:04 AM	Main Vac valve opened
11/29/2011	10:33:04 AM	Helium MFC set to  0.000000
11/29/2011	10:33:04 AM	H2 MFC set to  0.000000
11/29/2011	10:33:04 AM	BCl3 MFC set to  0.000000
11/29/2011	10:33:04 AM	PHl3 MFC set to  0.000000
11/29/2011	10:33:04 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:33:04 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:33:04 AM	Tube furnace set to 150
11/29/2011	10:33:34 AM	H2 valve closed
11/29/2011	10:33:34 AM	BCl3 valve closed
11/29/2011	10:33:34 AM	PH3 valve closed
11/29/2011	10:33:34 AM	SiCl4 pre valve closed
11/29/2011	10:33:34 AM	SiCl4 post valve closed
11/29/2011	10:33:34 AM	Bypass valve closed
11/29/2011	10:33:34 AM	Bubbler valve closed
11/29/2011	10:33:34 AM	Helium valve opened
11/29/2011	10:33:34 AM	Main Vac valve opened
11/29/2011	10:33:34 AM	Helium MFC set to  20.000000
11/29/2011	10:33:34 AM	H2 MFC set to  0.000000
11/29/2011	10:33:34 AM	BCl3 MFC set to  0.000000
11/29/2011	10:33:34 AM	PHl3 MFC set to  0.000000
11/29/2011	10:33:34 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:33:34 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:33:34 AM	Tube furnace set to 150
11/29/2011	10:34:04 AM	Helium valve closed
11/29/2011	10:34:04 AM	H2 valve closed
11/29/2011	10:34:04 AM	BCl3 valve closed
11/29/2011	10:34:04 AM	PH3 valve closed
11/29/2011	10:34:04 AM	SiCl4 pre valve closed
11/29/2011	10:34:04 AM	SiCl4 post valve closed
11/29/2011	10:34:04 AM	Bypass valve closed
11/29/2011	10:34:04 AM	Bubbler valve closed
11/29/2011	10:34:04 AM	Main Vac valve opened
11/29/2011	10:34:04 AM	Helium MFC set to  0.000000
11/29/2011	10:34:04 AM	H2 MFC set to  0.000000
11/29/2011	10:34:05 AM	BCl3 MFC set to  0.000000
11/29/2011	10:34:05 AM	PHl3 MFC set to  0.000000
11/29/2011	10:34:05 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:34:05 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:34:05 AM	Tube furnace set to 150
11/29/2011	10:34:35 AM	H2 valve closed
11/29/2011	10:34:35 AM	BCl3 valve closed
11/29/2011	10:34:35 AM	PH3 valve closed
11/29/2011	10:34:35 AM	SiCl4 pre valve closed
11/29/2011	10:34:35 AM	SiCl4 post valve closed
11/29/2011	10:34:35 AM	Bypass valve closed
11/29/2011	10:34:35 AM	Bubbler valve closed
11/29/2011	10:34:35 AM	Helium valve opened
11/29/2011	10:34:35 AM	Main Vac valve opened
11/29/2011	10:34:35 AM	Helium MFC set to  20.000000
11/29/2011	10:34:35 AM	H2 MFC set to  0.000000
11/29/2011	10:34:35 AM	BCl3 MFC set to  0.000000
11/29/2011	10:34:35 AM	PHl3 MFC set to  0.000000
11/29/2011	10:34:35 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:34:35 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:34:35 AM	Tube furnace set to 150
11/29/2011	10:35:05 AM	Helium valve closed
11/29/2011	10:35:05 AM	H2 valve closed
11/29/2011	10:35:05 AM	BCl3 valve closed
11/29/2011	10:35:05 AM	PH3 valve closed
11/29/2011	10:35:05 AM	SiCl4 pre valve closed
11/29/2011	10:35:05 AM	SiCl4 post valve closed
11/29/2011	10:35:05 AM	Bypass valve closed
11/29/2011	10:35:05 AM	Bubbler valve closed
11/29/2011	10:35:05 AM	Main Vac valve opened
11/29/2011	10:35:05 AM	Helium MFC set to  0.000000
11/29/2011	10:35:05 AM	H2 MFC set to  0.000000
11/29/2011	10:35:05 AM	BCl3 MFC set to  0.000000
11/29/2011	10:35:05 AM	PHl3 MFC set to  0.000000
11/29/2011	10:35:05 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:35:05 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:35:05 AM	Tube furnace set to 150
11/29/2011	10:35:35 AM	H2 valve closed
11/29/2011	10:35:35 AM	BCl3 valve closed
11/29/2011	10:35:35 AM	PH3 valve closed
11/29/2011	10:35:35 AM	SiCl4 pre valve closed
11/29/2011	10:35:35 AM	SiCl4 post valve closed
11/29/2011	10:35:35 AM	Bypass valve closed
11/29/2011	10:35:35 AM	Bubbler valve closed
11/29/2011	10:35:35 AM	Helium valve opened
11/29/2011	10:35:35 AM	Main Vac valve opened
11/29/2011	10:35:35 AM	Helium MFC set to  20.000000
11/29/2011	10:35:35 AM	H2 MFC set to  0.000000
11/29/2011	10:35:35 AM	BCl3 MFC set to  0.000000
11/29/2011	10:35:35 AM	PHl3 MFC set to  0.000000
11/29/2011	10:35:35 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:35:35 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:35:35 AM	Tube furnace set to 150
11/29/2011	10:36:05 AM	Helium valve closed
11/29/2011	10:36:05 AM	H2 valve closed
11/29/2011	10:36:05 AM	BCl3 valve closed
11/29/2011	10:36:05 AM	PH3 valve closed
11/29/2011	10:36:05 AM	SiCl4 pre valve closed
11/29/2011	10:36:05 AM	SiCl4 post valve closed
11/29/2011	10:36:05 AM	Bypass valve closed
11/29/2011	10:36:05 AM	Bubbler valve closed
11/29/2011	10:36:05 AM	Main Vac valve opened
11/29/2011	10:36:05 AM	Helium MFC set to  0.000000
11/29/2011	10:36:05 AM	H2 MFC set to  0.000000
11/29/2011	10:36:05 AM	BCl3 MFC set to  0.000000
11/29/2011	10:36:05 AM	PHl3 MFC set to  0.000000
11/29/2011	10:36:05 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:36:05 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:36:06 AM	Tube furnace set to 150
11/29/2011	10:36:36 AM	H2 valve closed
11/29/2011	10:36:36 AM	BCl3 valve closed
11/29/2011	10:36:36 AM	PH3 valve closed
11/29/2011	10:36:36 AM	SiCl4 pre valve closed
11/29/2011	10:36:36 AM	SiCl4 post valve closed
11/29/2011	10:36:36 AM	Bypass valve closed
11/29/2011	10:36:36 AM	Bubbler valve closed
11/29/2011	10:36:36 AM	Helium valve opened
11/29/2011	10:36:36 AM	Main Vac valve opened
11/29/2011	10:36:36 AM	Helium MFC set to  20.000000
11/29/2011	10:36:36 AM	H2 MFC set to  0.000000
11/29/2011	10:36:36 AM	BCl3 MFC set to  0.000000
11/29/2011	10:36:36 AM	PHl3 MFC set to  0.000000
11/29/2011	10:36:36 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:36:36 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:36:36 AM	Tube furnace set to 150
11/29/2011	10:37:06 AM	Helium valve closed
11/29/2011	10:37:06 AM	H2 valve closed
11/29/2011	10:37:06 AM	BCl3 valve closed
11/29/2011	10:37:06 AM	PH3 valve closed
11/29/2011	10:37:06 AM	SiCl4 pre valve closed
11/29/2011	10:37:06 AM	SiCl4 post valve closed
11/29/2011	10:37:06 AM	Bypass valve closed
11/29/2011	10:37:06 AM	Bubbler valve closed
11/29/2011	10:37:06 AM	Main Vac valve opened
11/29/2011	10:37:06 AM	Helium MFC set to  0.000000
11/29/2011	10:37:06 AM	H2 MFC set to  0.000000
11/29/2011	10:37:06 AM	BCl3 MFC set to  0.000000
11/29/2011	10:37:06 AM	PHl3 MFC set to  0.000000
11/29/2011	10:37:06 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:37:06 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:37:06 AM	Tube furnace set to 150
11/29/2011	10:37:36 AM	H2 valve closed
11/29/2011	10:37:36 AM	BCl3 valve closed
11/29/2011	10:37:36 AM	PH3 valve closed
11/29/2011	10:37:36 AM	SiCl4 pre valve closed
11/29/2011	10:37:36 AM	SiCl4 post valve closed
11/29/2011	10:37:36 AM	Bypass valve closed
11/29/2011	10:37:36 AM	Bubbler valve closed
11/29/2011	10:37:36 AM	Helium valve opened
11/29/2011	10:37:36 AM	Main Vac valve opened
11/29/2011	10:37:36 AM	Helium MFC set to  20.000000
11/29/2011	10:37:36 AM	H2 MFC set to  0.000000
11/29/2011	10:37:36 AM	BCl3 MFC set to  0.000000
11/29/2011	10:37:36 AM	PHl3 MFC set to  0.000000
11/29/2011	10:37:36 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:37:36 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:37:36 AM	Tube furnace set to 150
11/29/2011	10:38:06 AM	Helium valve closed
11/29/2011	10:38:06 AM	H2 valve closed
11/29/2011	10:38:06 AM	BCl3 valve closed
11/29/2011	10:38:06 AM	PH3 valve closed
11/29/2011	10:38:06 AM	SiCl4 pre valve closed
11/29/2011	10:38:06 AM	SiCl4 post valve closed
11/29/2011	10:38:06 AM	Bypass valve closed
11/29/2011	10:38:06 AM	Bubbler valve closed
11/29/2011	10:38:06 AM	Main Vac valve opened
11/29/2011	10:38:06 AM	Helium MFC set to  0.000000
11/29/2011	10:38:06 AM	H2 MFC set to  0.000000
11/29/2011	10:38:06 AM	BCl3 MFC set to  0.000000
11/29/2011	10:38:06 AM	PHl3 MFC set to  0.000000
11/29/2011	10:38:06 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:38:06 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:38:06 AM	Tube furnace set to 150
11/29/2011	10:38:36 AM	H2 valve closed
11/29/2011	10:38:36 AM	BCl3 valve closed
11/29/2011	10:38:36 AM	PH3 valve closed
11/29/2011	10:38:36 AM	SiCl4 pre valve closed
11/29/2011	10:38:36 AM	SiCl4 post valve closed
11/29/2011	10:38:36 AM	Bypass valve closed
11/29/2011	10:38:36 AM	Bubbler valve closed
11/29/2011	10:38:36 AM	Helium valve opened
11/29/2011	10:38:36 AM	Main Vac valve opened
11/29/2011	10:38:36 AM	Helium MFC set to  20.000000
11/29/2011	10:38:36 AM	H2 MFC set to  0.000000
11/29/2011	10:38:36 AM	BCl3 MFC set to  0.000000
11/29/2011	10:38:36 AM	PHl3 MFC set to  0.000000
11/29/2011	10:38:36 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:38:36 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:38:37 AM	Tube furnace set to 150
11/29/2011	10:39:07 AM	Helium valve closed
11/29/2011	10:39:07 AM	H2 valve closed
11/29/2011	10:39:07 AM	BCl3 valve closed
11/29/2011	10:39:07 AM	PH3 valve closed
11/29/2011	10:39:07 AM	SiCl4 pre valve closed
11/29/2011	10:39:07 AM	SiCl4 post valve closed
11/29/2011	10:39:07 AM	Bypass valve closed
11/29/2011	10:39:07 AM	Bubbler valve closed
11/29/2011	10:39:07 AM	Main Vac valve opened
11/29/2011	10:39:07 AM	Helium MFC set to  0.000000
11/29/2011	10:39:07 AM	H2 MFC set to  0.000000
11/29/2011	10:39:07 AM	BCl3 MFC set to  0.000000
11/29/2011	10:39:07 AM	PHl3 MFC set to  0.000000
11/29/2011	10:39:07 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:39:07 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:39:07 AM	Tube furnace set to 150
11/29/2011	10:39:37 AM	H2 valve closed
11/29/2011	10:39:37 AM	BCl3 valve closed
11/29/2011	10:39:37 AM	PH3 valve closed
11/29/2011	10:39:37 AM	SiCl4 pre valve closed
11/29/2011	10:39:37 AM	SiCl4 post valve closed
11/29/2011	10:39:37 AM	Bypass valve closed
11/29/2011	10:39:37 AM	Bubbler valve closed
11/29/2011	10:39:37 AM	Helium valve opened
11/29/2011	10:39:37 AM	Main Vac valve opened
11/29/2011	10:39:37 AM	Helium MFC set to  20.000000
11/29/2011	10:39:37 AM	H2 MFC set to  0.000000
11/29/2011	10:39:37 AM	BCl3 MFC set to  0.000000
11/29/2011	10:39:37 AM	PHl3 MFC set to  0.000000
11/29/2011	10:39:37 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:39:37 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:39:37 AM	Tube furnace set to 150
11/29/2011	10:40:07 AM	Helium valve closed
11/29/2011	10:40:07 AM	H2 valve closed
11/29/2011	10:40:07 AM	BCl3 valve closed
11/29/2011	10:40:07 AM	PH3 valve closed
11/29/2011	10:40:07 AM	SiCl4 pre valve closed
11/29/2011	10:40:07 AM	SiCl4 post valve closed
11/29/2011	10:40:07 AM	Bypass valve closed
11/29/2011	10:40:07 AM	Bubbler valve closed
11/29/2011	10:40:07 AM	Main Vac valve opened
11/29/2011	10:40:07 AM	Helium MFC set to  0.000000
11/29/2011	10:40:07 AM	H2 MFC set to  0.000000
11/29/2011	10:40:07 AM	BCl3 MFC set to  0.000000
11/29/2011	10:40:07 AM	PHl3 MFC set to  0.000000
11/29/2011	10:40:07 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:40:07 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:40:07 AM	Tube furnace set to 150
11/29/2011	10:40:37 AM	H2 valve closed
11/29/2011	10:40:37 AM	BCl3 valve closed
11/29/2011	10:40:37 AM	PH3 valve closed
11/29/2011	10:40:37 AM	SiCl4 pre valve closed
11/29/2011	10:40:37 AM	SiCl4 post valve closed
11/29/2011	10:40:37 AM	Bypass valve closed
11/29/2011	10:40:37 AM	Bubbler valve closed
11/29/2011	10:40:37 AM	Helium valve opened
11/29/2011	10:40:37 AM	Main Vac valve opened
11/29/2011	10:40:37 AM	Helium MFC set to  20.000000
11/29/2011	10:40:37 AM	H2 MFC set to  0.000000
11/29/2011	10:40:37 AM	BCl3 MFC set to  0.000000
11/29/2011	10:40:37 AM	PHl3 MFC set to  0.000000
11/29/2011	10:40:37 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:40:37 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:40:37 AM	Tube furnace set to 150
11/29/2011	10:41:07 AM	Helium valve closed
11/29/2011	10:41:07 AM	H2 valve closed
11/29/2011	10:41:07 AM	BCl3 valve closed
11/29/2011	10:41:07 AM	PH3 valve closed
11/29/2011	10:41:07 AM	SiCl4 pre valve closed
11/29/2011	10:41:07 AM	SiCl4 post valve closed
11/29/2011	10:41:07 AM	Bypass valve closed
11/29/2011	10:41:07 AM	Bubbler valve closed
11/29/2011	10:41:07 AM	Main Vac valve opened
11/29/2011	10:41:07 AM	Helium MFC set to  0.000000
11/29/2011	10:41:07 AM	H2 MFC set to  0.000000
11/29/2011	10:41:07 AM	BCl3 MFC set to  0.000000
11/29/2011	10:41:07 AM	PHl3 MFC set to  0.000000
11/29/2011	10:41:08 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:41:08 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:41:08 AM	Tube furnace set to 150
11/29/2011	10:41:38 AM	H2 valve closed
11/29/2011	10:41:38 AM	BCl3 valve closed
11/29/2011	10:41:38 AM	PH3 valve closed
11/29/2011	10:41:38 AM	SiCl4 pre valve closed
11/29/2011	10:41:38 AM	SiCl4 post valve closed
11/29/2011	10:41:38 AM	Bypass valve closed
11/29/2011	10:41:38 AM	Bubbler valve closed
11/29/2011	10:41:38 AM	Helium valve opened
11/29/2011	10:41:38 AM	Main Vac valve opened
11/29/2011	10:41:38 AM	Helium MFC set to  20.000000
11/29/2011	10:41:38 AM	H2 MFC set to  0.000000
11/29/2011	10:41:38 AM	BCl3 MFC set to  0.000000
11/29/2011	10:41:38 AM	PHl3 MFC set to  0.000000
11/29/2011	10:41:38 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:41:38 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:41:38 AM	Tube furnace set to 150
11/29/2011	10:42:08 AM	Helium valve closed
11/29/2011	10:42:08 AM	H2 valve closed
11/29/2011	10:42:08 AM	BCl3 valve closed
11/29/2011	10:42:08 AM	PH3 valve closed
11/29/2011	10:42:08 AM	SiCl4 pre valve closed
11/29/2011	10:42:08 AM	SiCl4 post valve closed
11/29/2011	10:42:08 AM	Bypass valve closed
11/29/2011	10:42:08 AM	Bubbler valve closed
11/29/2011	10:42:08 AM	Main Vac valve opened
11/29/2011	10:42:08 AM	Helium MFC set to  0.000000
11/29/2011	10:42:08 AM	H2 MFC set to  0.000000
11/29/2011	10:42:08 AM	BCl3 MFC set to  0.000000
11/29/2011	10:42:08 AM	PHl3 MFC set to  0.000000
11/29/2011	10:42:08 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:42:08 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:42:08 AM	Tube furnace set to 150
11/29/2011	10:42:38 AM	H2 valve closed
11/29/2011	10:42:38 AM	BCl3 valve closed
11/29/2011	10:42:38 AM	PH3 valve closed
11/29/2011	10:42:38 AM	SiCl4 pre valve closed
11/29/2011	10:42:38 AM	SiCl4 post valve closed
11/29/2011	10:42:38 AM	Bypass valve closed
11/29/2011	10:42:38 AM	Bubbler valve closed
11/29/2011	10:42:38 AM	Helium valve opened
11/29/2011	10:42:38 AM	Main Vac valve opened
11/29/2011	10:42:38 AM	Helium MFC set to  20.000000
11/29/2011	10:42:38 AM	H2 MFC set to  0.000000
11/29/2011	10:42:38 AM	BCl3 MFC set to  0.000000
11/29/2011	10:42:38 AM	PHl3 MFC set to  0.000000
11/29/2011	10:42:38 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:42:38 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:42:38 AM	Tube furnace set to 150
11/29/2011	10:43:08 AM	Helium valve closed
11/29/2011	10:43:08 AM	H2 valve closed
11/29/2011	10:43:08 AM	BCl3 valve closed
11/29/2011	10:43:08 AM	PH3 valve closed
11/29/2011	10:43:08 AM	SiCl4 pre valve closed
11/29/2011	10:43:08 AM	SiCl4 post valve closed
11/29/2011	10:43:08 AM	Bypass valve closed
11/29/2011	10:43:08 AM	Bubbler valve closed
11/29/2011	10:43:08 AM	Main Vac valve opened
11/29/2011	10:43:08 AM	Helium MFC set to  0.000000
11/29/2011	10:43:08 AM	H2 MFC set to  0.000000
11/29/2011	10:43:08 AM	BCl3 MFC set to  0.000000
11/29/2011	10:43:08 AM	PHl3 MFC set to  0.000000
11/29/2011	10:43:08 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:43:08 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:43:09 AM	Tube furnace set to 150
11/29/2011	10:43:10 AM	Run finished at 10:43 AM
11/29/2011	10:45:24 AM	Recipe started at 10:45 AM
11/29/2011	10:45:24 AM	Helium valve closed
11/29/2011	10:45:24 AM	H2 valve closed
11/29/2011	10:45:24 AM	BCl3 valve closed
11/29/2011	10:45:24 AM	PH3 valve closed
11/29/2011	10:45:24 AM	SiCl4 pre valve closed
11/29/2011	10:45:24 AM	SiCl4 post valve closed
11/29/2011	10:45:24 AM	Bypass valve closed
11/29/2011	10:45:24 AM	Bubbler valve closed
11/29/2011	10:45:24 AM	Main Vac valve opened
11/29/2011	10:45:24 AM	Helium MFC set to  0.000000
11/29/2011	10:45:24 AM	H2 MFC set to  0.000000
11/29/2011	10:45:24 AM	BCl3 MFC set to  0.000000
11/29/2011	10:45:24 AM	PHl3 MFC set to  0.000000
11/29/2011	10:45:24 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:45:24 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:45:25 AM	Tube furnace set to 150
11/29/2011	10:45:55 AM	H2 valve closed
11/29/2011	10:45:55 AM	BCl3 valve closed
11/29/2011	10:45:55 AM	PH3 valve closed
11/29/2011	10:45:55 AM	SiCl4 pre valve closed
11/29/2011	10:45:55 AM	SiCl4 post valve closed
11/29/2011	10:45:55 AM	Bypass valve closed
11/29/2011	10:45:55 AM	Bubbler valve closed
11/29/2011	10:45:55 AM	Helium valve opened
11/29/2011	10:45:55 AM	Main Vac valve opened
11/29/2011	10:45:55 AM	Helium MFC set to  20.000000
11/29/2011	10:45:55 AM	H2 MFC set to  0.000000
11/29/2011	10:45:55 AM	BCl3 MFC set to  0.000000
11/29/2011	10:45:55 AM	PHl3 MFC set to  0.000000
11/29/2011	10:45:55 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:45:55 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:45:55 AM	Tube furnace set to 150
11/29/2011	10:46:25 AM	Helium valve closed
11/29/2011	10:46:25 AM	H2 valve closed
11/29/2011	10:46:25 AM	BCl3 valve closed
11/29/2011	10:46:25 AM	PH3 valve closed
11/29/2011	10:46:25 AM	SiCl4 pre valve closed
11/29/2011	10:46:25 AM	SiCl4 post valve closed
11/29/2011	10:46:25 AM	Bypass valve closed
11/29/2011	10:46:25 AM	Bubbler valve closed
11/29/2011	10:46:25 AM	Main Vac valve opened
11/29/2011	10:46:25 AM	Helium MFC set to  0.000000
11/29/2011	10:46:25 AM	H2 MFC set to  0.000000
11/29/2011	10:46:25 AM	BCl3 MFC set to  0.000000
11/29/2011	10:46:25 AM	PHl3 MFC set to  0.000000
11/29/2011	10:46:25 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:46:25 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:46:25 AM	Tube furnace set to 150
11/29/2011	10:46:55 AM	H2 valve closed
11/29/2011	10:46:55 AM	BCl3 valve closed
11/29/2011	10:46:55 AM	PH3 valve closed
11/29/2011	10:46:55 AM	SiCl4 pre valve closed
11/29/2011	10:46:55 AM	SiCl4 post valve closed
11/29/2011	10:46:55 AM	Bypass valve closed
11/29/2011	10:46:55 AM	Bubbler valve closed
11/29/2011	10:46:55 AM	Helium valve opened
11/29/2011	10:46:55 AM	Main Vac valve opened
11/29/2011	10:46:55 AM	Helium MFC set to  20.000000
11/29/2011	10:46:55 AM	H2 MFC set to  0.000000
11/29/2011	10:46:55 AM	BCl3 MFC set to  0.000000
11/29/2011	10:46:55 AM	PHl3 MFC set to  0.000000
11/29/2011	10:46:55 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:46:55 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:46:55 AM	Tube furnace set to 150
11/29/2011	10:47:25 AM	Helium valve closed
11/29/2011	10:47:25 AM	H2 valve closed
11/29/2011	10:47:25 AM	BCl3 valve closed
11/29/2011	10:47:25 AM	PH3 valve closed
11/29/2011	10:47:25 AM	SiCl4 pre valve closed
11/29/2011	10:47:25 AM	SiCl4 post valve closed
11/29/2011	10:47:25 AM	Bypass valve closed
11/29/2011	10:47:25 AM	Bubbler valve closed
11/29/2011	10:47:25 AM	Main Vac valve opened
11/29/2011	10:47:25 AM	Helium MFC set to  0.000000
11/29/2011	10:47:25 AM	H2 MFC set to  0.000000
11/29/2011	10:47:25 AM	BCl3 MFC set to  0.000000
11/29/2011	10:47:25 AM	PHl3 MFC set to  0.000000
11/29/2011	10:47:25 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:47:25 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:47:25 AM	Tube furnace set to 150
11/29/2011	10:47:55 AM	H2 valve closed
11/29/2011	10:47:55 AM	BCl3 valve closed
11/29/2011	10:47:55 AM	PH3 valve closed
11/29/2011	10:47:55 AM	SiCl4 pre valve closed
11/29/2011	10:47:55 AM	SiCl4 post valve closed
11/29/2011	10:47:55 AM	Bypass valve closed
11/29/2011	10:47:55 AM	Bubbler valve closed
11/29/2011	10:47:55 AM	Helium valve opened
11/29/2011	10:47:55 AM	Main Vac valve opened
11/29/2011	10:47:55 AM	Helium MFC set to  20.000000
11/29/2011	10:47:55 AM	H2 MFC set to  0.000000
11/29/2011	10:47:55 AM	BCl3 MFC set to  0.000000
11/29/2011	10:47:55 AM	PHl3 MFC set to  0.000000
11/29/2011	10:47:55 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:47:55 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:47:56 AM	Tube furnace set to 150
11/29/2011	10:48:26 AM	Helium valve closed
11/29/2011	10:48:26 AM	H2 valve closed
11/29/2011	10:48:26 AM	BCl3 valve closed
11/29/2011	10:48:26 AM	PH3 valve closed
11/29/2011	10:48:26 AM	SiCl4 pre valve closed
11/29/2011	10:48:26 AM	SiCl4 post valve closed
11/29/2011	10:48:26 AM	Bypass valve closed
11/29/2011	10:48:26 AM	Bubbler valve closed
11/29/2011	10:48:26 AM	Main Vac valve opened
11/29/2011	10:48:26 AM	Helium MFC set to  0.000000
11/29/2011	10:48:26 AM	H2 MFC set to  0.000000
11/29/2011	10:48:26 AM	BCl3 MFC set to  0.000000
11/29/2011	10:48:26 AM	PHl3 MFC set to  0.000000
11/29/2011	10:48:26 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:48:26 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:48:26 AM	Tube furnace set to 150
11/29/2011	10:48:56 AM	H2 valve closed
11/29/2011	10:48:56 AM	BCl3 valve closed
11/29/2011	10:48:56 AM	PH3 valve closed
11/29/2011	10:48:56 AM	SiCl4 pre valve closed
11/29/2011	10:48:56 AM	SiCl4 post valve closed
11/29/2011	10:48:56 AM	Bypass valve closed
11/29/2011	10:48:56 AM	Bubbler valve closed
11/29/2011	10:48:56 AM	Helium valve opened
11/29/2011	10:48:56 AM	Main Vac valve opened
11/29/2011	10:48:56 AM	Helium MFC set to  20.000000
11/29/2011	10:48:56 AM	H2 MFC set to  0.000000
11/29/2011	10:48:56 AM	BCl3 MFC set to  0.000000
11/29/2011	10:48:56 AM	PHl3 MFC set to  0.000000
11/29/2011	10:48:56 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:48:56 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:48:56 AM	Tube furnace set to 150
11/29/2011	10:49:26 AM	Helium valve closed
11/29/2011	10:49:26 AM	H2 valve closed
11/29/2011	10:49:26 AM	BCl3 valve closed
11/29/2011	10:49:26 AM	PH3 valve closed
11/29/2011	10:49:26 AM	SiCl4 pre valve closed
11/29/2011	10:49:26 AM	SiCl4 post valve closed
11/29/2011	10:49:26 AM	Bypass valve closed
11/29/2011	10:49:26 AM	Bubbler valve closed
11/29/2011	10:49:26 AM	Main Vac valve opened
11/29/2011	10:49:26 AM	Helium MFC set to  0.000000
11/29/2011	10:49:26 AM	H2 MFC set to  0.000000
11/29/2011	10:49:26 AM	BCl3 MFC set to  0.000000
11/29/2011	10:49:26 AM	PHl3 MFC set to  0.000000
11/29/2011	10:49:26 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:49:26 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:49:26 AM	Tube furnace set to 150
11/29/2011	10:49:56 AM	H2 valve closed
11/29/2011	10:49:56 AM	BCl3 valve closed
11/29/2011	10:49:56 AM	PH3 valve closed
11/29/2011	10:49:56 AM	SiCl4 pre valve closed
11/29/2011	10:49:56 AM	SiCl4 post valve closed
11/29/2011	10:49:56 AM	Bypass valve closed
11/29/2011	10:49:56 AM	Bubbler valve closed
11/29/2011	10:49:56 AM	Helium valve opened
11/29/2011	10:49:56 AM	Main Vac valve opened
11/29/2011	10:49:56 AM	Helium MFC set to  20.000000
11/29/2011	10:49:56 AM	H2 MFC set to  0.000000
11/29/2011	10:49:56 AM	BCl3 MFC set to  0.000000
11/29/2011	10:49:56 AM	PHl3 MFC set to  0.000000
11/29/2011	10:49:56 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:49:56 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:49:56 AM	Tube furnace set to 150
11/29/2011	10:50:26 AM	Helium valve closed
11/29/2011	10:50:26 AM	H2 valve closed
11/29/2011	10:50:26 AM	BCl3 valve closed
11/29/2011	10:50:26 AM	PH3 valve closed
11/29/2011	10:50:26 AM	SiCl4 pre valve closed
11/29/2011	10:50:26 AM	SiCl4 post valve closed
11/29/2011	10:50:26 AM	Bypass valve closed
11/29/2011	10:50:26 AM	Bubbler valve closed
11/29/2011	10:50:26 AM	Main Vac valve opened
11/29/2011	10:50:26 AM	Helium MFC set to  0.000000
11/29/2011	10:50:26 AM	H2 MFC set to  0.000000
11/29/2011	10:50:26 AM	BCl3 MFC set to  0.000000
11/29/2011	10:50:26 AM	PHl3 MFC set to  0.000000
11/29/2011	10:50:26 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:50:26 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:50:27 AM	Tube furnace set to 150
11/29/2011	10:50:57 AM	H2 valve closed
11/29/2011	10:50:57 AM	BCl3 valve closed
11/29/2011	10:50:57 AM	PH3 valve closed
11/29/2011	10:50:57 AM	SiCl4 pre valve closed
11/29/2011	10:50:57 AM	SiCl4 post valve closed
11/29/2011	10:50:57 AM	Bypass valve closed
11/29/2011	10:50:57 AM	Bubbler valve closed
11/29/2011	10:50:57 AM	Helium valve opened
11/29/2011	10:50:57 AM	Main Vac valve opened
11/29/2011	10:50:57 AM	Helium MFC set to  20.000000
11/29/2011	10:50:57 AM	H2 MFC set to  0.000000
11/29/2011	10:50:57 AM	BCl3 MFC set to  0.000000
11/29/2011	10:50:57 AM	PHl3 MFC set to  0.000000
11/29/2011	10:50:57 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:50:57 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:50:57 AM	Tube furnace set to 150
11/29/2011	10:51:27 AM	Helium valve closed
11/29/2011	10:51:27 AM	H2 valve closed
11/29/2011	10:51:27 AM	BCl3 valve closed
11/29/2011	10:51:27 AM	PH3 valve closed
11/29/2011	10:51:27 AM	SiCl4 pre valve closed
11/29/2011	10:51:27 AM	SiCl4 post valve closed
11/29/2011	10:51:27 AM	Bypass valve closed
11/29/2011	10:51:27 AM	Bubbler valve closed
11/29/2011	10:51:27 AM	Main Vac valve opened
11/29/2011	10:51:27 AM	Helium MFC set to  0.000000
11/29/2011	10:51:27 AM	H2 MFC set to  0.000000
11/29/2011	10:51:27 AM	BCl3 MFC set to  0.000000
11/29/2011	10:51:27 AM	PHl3 MFC set to  0.000000
11/29/2011	10:51:27 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:51:27 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:51:27 AM	Tube furnace set to 150
11/29/2011	10:51:57 AM	H2 valve closed
11/29/2011	10:51:57 AM	BCl3 valve closed
11/29/2011	10:51:57 AM	PH3 valve closed
11/29/2011	10:51:57 AM	SiCl4 pre valve closed
11/29/2011	10:51:57 AM	SiCl4 post valve closed
11/29/2011	10:51:57 AM	Bypass valve closed
11/29/2011	10:51:57 AM	Bubbler valve closed
11/29/2011	10:51:57 AM	Helium valve opened
11/29/2011	10:51:57 AM	Main Vac valve opened
11/29/2011	10:51:57 AM	Helium MFC set to  20.000000
11/29/2011	10:51:57 AM	H2 MFC set to  0.000000
11/29/2011	10:51:57 AM	BCl3 MFC set to  0.000000
11/29/2011	10:51:57 AM	PHl3 MFC set to  0.000000
11/29/2011	10:51:57 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:51:57 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:51:57 AM	Tube furnace set to 150
11/29/2011	10:52:27 AM	Helium valve closed
11/29/2011	10:52:27 AM	H2 valve closed
11/29/2011	10:52:27 AM	BCl3 valve closed
11/29/2011	10:52:27 AM	PH3 valve closed
11/29/2011	10:52:27 AM	SiCl4 pre valve closed
11/29/2011	10:52:27 AM	SiCl4 post valve closed
11/29/2011	10:52:27 AM	Bypass valve closed
11/29/2011	10:52:27 AM	Bubbler valve closed
11/29/2011	10:52:27 AM	Main Vac valve opened
11/29/2011	10:52:27 AM	Helium MFC set to  0.000000
11/29/2011	10:52:27 AM	H2 MFC set to  0.000000
11/29/2011	10:52:27 AM	BCl3 MFC set to  0.000000
11/29/2011	10:52:27 AM	PHl3 MFC set to  0.000000
11/29/2011	10:52:27 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:52:27 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:52:27 AM	Tube furnace set to 150
11/29/2011	10:52:57 AM	H2 valve closed
11/29/2011	10:52:57 AM	BCl3 valve closed
11/29/2011	10:52:57 AM	PH3 valve closed
11/29/2011	10:52:57 AM	SiCl4 pre valve closed
11/29/2011	10:52:57 AM	SiCl4 post valve closed
11/29/2011	10:52:57 AM	Bypass valve closed
11/29/2011	10:52:57 AM	Bubbler valve closed
11/29/2011	10:52:57 AM	Helium valve opened
11/29/2011	10:52:57 AM	Main Vac valve opened
11/29/2011	10:52:57 AM	Helium MFC set to  20.000000
11/29/2011	10:52:57 AM	H2 MFC set to  0.000000
11/29/2011	10:52:57 AM	BCl3 MFC set to  0.000000
11/29/2011	10:52:57 AM	PHl3 MFC set to  0.000000
11/29/2011	10:52:57 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:52:57 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:52:58 AM	Tube furnace set to 150
11/29/2011	10:53:28 AM	Helium valve closed
11/29/2011	10:53:28 AM	H2 valve closed
11/29/2011	10:53:28 AM	BCl3 valve closed
11/29/2011	10:53:28 AM	PH3 valve closed
11/29/2011	10:53:28 AM	SiCl4 pre valve closed
11/29/2011	10:53:28 AM	SiCl4 post valve closed
11/29/2011	10:53:28 AM	Bypass valve closed
11/29/2011	10:53:28 AM	Bubbler valve closed
11/29/2011	10:53:28 AM	Main Vac valve opened
11/29/2011	10:53:28 AM	Helium MFC set to  0.000000
11/29/2011	10:53:28 AM	H2 MFC set to  0.000000
11/29/2011	10:53:28 AM	BCl3 MFC set to  0.000000
11/29/2011	10:53:28 AM	PHl3 MFC set to  0.000000
11/29/2011	10:53:28 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:53:28 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:53:28 AM	Tube furnace set to 150
11/29/2011	10:53:58 AM	H2 valve closed
11/29/2011	10:53:58 AM	BCl3 valve closed
11/29/2011	10:53:58 AM	PH3 valve closed
11/29/2011	10:53:58 AM	SiCl4 pre valve closed
11/29/2011	10:53:58 AM	SiCl4 post valve closed
11/29/2011	10:53:58 AM	Bypass valve closed
11/29/2011	10:53:58 AM	Bubbler valve closed
11/29/2011	10:53:58 AM	Helium valve opened
11/29/2011	10:53:58 AM	Main Vac valve opened
11/29/2011	10:53:58 AM	Helium MFC set to  20.000000
11/29/2011	10:53:58 AM	H2 MFC set to  0.000000
11/29/2011	10:53:58 AM	BCl3 MFC set to  0.000000
11/29/2011	10:53:58 AM	PHl3 MFC set to  0.000000
11/29/2011	10:53:58 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:53:58 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:53:58 AM	Tube furnace set to 150
11/29/2011	10:54:28 AM	Helium valve closed
11/29/2011	10:54:28 AM	H2 valve closed
11/29/2011	10:54:28 AM	BCl3 valve closed
11/29/2011	10:54:28 AM	PH3 valve closed
11/29/2011	10:54:28 AM	SiCl4 pre valve closed
11/29/2011	10:54:28 AM	SiCl4 post valve closed
11/29/2011	10:54:28 AM	Bypass valve closed
11/29/2011	10:54:28 AM	Bubbler valve closed
11/29/2011	10:54:28 AM	Main Vac valve opened
11/29/2011	10:54:28 AM	Helium MFC set to  0.000000
11/29/2011	10:54:28 AM	H2 MFC set to  0.000000
11/29/2011	10:54:28 AM	BCl3 MFC set to  0.000000
11/29/2011	10:54:28 AM	PHl3 MFC set to  0.000000
11/29/2011	10:54:28 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:54:28 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:54:28 AM	Tube furnace set to 150
11/29/2011	10:54:58 AM	H2 valve closed
11/29/2011	10:54:58 AM	BCl3 valve closed
11/29/2011	10:54:58 AM	PH3 valve closed
11/29/2011	10:54:58 AM	SiCl4 pre valve closed
11/29/2011	10:54:58 AM	SiCl4 post valve closed
11/29/2011	10:54:58 AM	Bypass valve closed
11/29/2011	10:54:58 AM	Bubbler valve closed
11/29/2011	10:54:58 AM	Helium valve opened
11/29/2011	10:54:58 AM	Main Vac valve opened
11/29/2011	10:54:58 AM	Helium MFC set to  20.000000
11/29/2011	10:54:58 AM	H2 MFC set to  0.000000
11/29/2011	10:54:58 AM	BCl3 MFC set to  0.000000
11/29/2011	10:54:58 AM	PHl3 MFC set to  0.000000
11/29/2011	10:54:58 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:54:58 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:54:58 AM	Tube furnace set to 150
11/29/2011	10:55:28 AM	Helium valve closed
11/29/2011	10:55:28 AM	H2 valve closed
11/29/2011	10:55:28 AM	BCl3 valve closed
11/29/2011	10:55:29 AM	PH3 valve closed
11/29/2011	10:55:29 AM	SiCl4 pre valve closed
11/29/2011	10:55:29 AM	SiCl4 post valve closed
11/29/2011	10:55:29 AM	Bypass valve closed
11/29/2011	10:55:29 AM	Bubbler valve closed
11/29/2011	10:55:29 AM	Main Vac valve opened
11/29/2011	10:55:29 AM	Helium MFC set to  0.000000
11/29/2011	10:55:29 AM	H2 MFC set to  0.000000
11/29/2011	10:55:29 AM	BCl3 MFC set to  0.000000
11/29/2011	10:55:29 AM	PHl3 MFC set to  0.000000
11/29/2011	10:55:29 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:55:29 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:55:29 AM	Tube furnace set to 150
11/29/2011	10:55:30 AM	Run finished at 10:55 AM
11/29/2011	10:56:25 AM	Recipe started at 10:56 AM
11/29/2011	10:56:25 AM	Helium valve closed
11/29/2011	10:56:25 AM	H2 valve closed
11/29/2011	10:56:25 AM	BCl3 valve closed
11/29/2011	10:56:25 AM	PH3 valve closed
11/29/2011	10:56:25 AM	SiCl4 pre valve closed
11/29/2011	10:56:25 AM	SiCl4 post valve closed
11/29/2011	10:56:25 AM	Bypass valve closed
11/29/2011	10:56:25 AM	Bubbler valve closed
11/29/2011	10:56:25 AM	Main Vac valve opened
11/29/2011	10:56:25 AM	Helium MFC set to  0.000000
11/29/2011	10:56:25 AM	H2 MFC set to  0.000000
11/29/2011	10:56:25 AM	BCl3 MFC set to  0.000000
11/29/2011	10:56:25 AM	PHl3 MFC set to  0.000000
11/29/2011	10:56:25 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:56:25 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:56:25 AM	Tube furnace set to 150
11/29/2011	10:56:55 AM	H2 valve closed
11/29/2011	10:56:55 AM	BCl3 valve closed
11/29/2011	10:56:55 AM	PH3 valve closed
11/29/2011	10:56:55 AM	SiCl4 pre valve closed
11/29/2011	10:56:55 AM	SiCl4 post valve closed
11/29/2011	10:56:55 AM	Bypass valve closed
11/29/2011	10:56:55 AM	Bubbler valve closed
11/29/2011	10:56:55 AM	Helium valve opened
11/29/2011	10:56:55 AM	Main Vac valve opened
11/29/2011	10:56:55 AM	Helium MFC set to  20.000000
11/29/2011	10:56:55 AM	H2 MFC set to  0.000000
11/29/2011	10:56:55 AM	BCl3 MFC set to  0.000000
11/29/2011	10:56:55 AM	PHl3 MFC set to  0.000000
11/29/2011	10:56:55 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:56:55 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:56:55 AM	Tube furnace set to 150
11/29/2011	10:57:25 AM	Helium valve closed
11/29/2011	10:57:25 AM	H2 valve closed
11/29/2011	10:57:25 AM	BCl3 valve closed
11/29/2011	10:57:25 AM	PH3 valve closed
11/29/2011	10:57:25 AM	SiCl4 pre valve closed
11/29/2011	10:57:25 AM	SiCl4 post valve closed
11/29/2011	10:57:25 AM	Bypass valve closed
11/29/2011	10:57:25 AM	Bubbler valve closed
11/29/2011	10:57:25 AM	Main Vac valve opened
11/29/2011	10:57:25 AM	Helium MFC set to  0.000000
11/29/2011	10:57:25 AM	H2 MFC set to  0.000000
11/29/2011	10:57:25 AM	BCl3 MFC set to  0.000000
11/29/2011	10:57:25 AM	PHl3 MFC set to  0.000000
11/29/2011	10:57:25 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:57:25 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:57:25 AM	Tube furnace set to 150
11/29/2011	10:57:55 AM	H2 valve closed
11/29/2011	10:57:55 AM	BCl3 valve closed
11/29/2011	10:57:55 AM	PH3 valve closed
11/29/2011	10:57:55 AM	SiCl4 pre valve closed
11/29/2011	10:57:55 AM	SiCl4 post valve closed
11/29/2011	10:57:55 AM	Bypass valve closed
11/29/2011	10:57:55 AM	Bubbler valve closed
11/29/2011	10:57:55 AM	Helium valve opened
11/29/2011	10:57:55 AM	Main Vac valve opened
11/29/2011	10:57:55 AM	Helium MFC set to  20.000000
11/29/2011	10:57:55 AM	H2 MFC set to  0.000000
11/29/2011	10:57:55 AM	BCl3 MFC set to  0.000000
11/29/2011	10:57:55 AM	PHl3 MFC set to  0.000000
11/29/2011	10:57:55 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:57:55 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:57:56 AM	Tube furnace set to 150
11/29/2011	10:58:26 AM	Helium valve closed
11/29/2011	10:58:26 AM	H2 valve closed
11/29/2011	10:58:26 AM	BCl3 valve closed
11/29/2011	10:58:26 AM	PH3 valve closed
11/29/2011	10:58:26 AM	SiCl4 pre valve closed
11/29/2011	10:58:26 AM	SiCl4 post valve closed
11/29/2011	10:58:26 AM	Bypass valve closed
11/29/2011	10:58:26 AM	Bubbler valve closed
11/29/2011	10:58:26 AM	Main Vac valve opened
11/29/2011	10:58:26 AM	Helium MFC set to  0.000000
11/29/2011	10:58:26 AM	H2 MFC set to  0.000000
11/29/2011	10:58:26 AM	BCl3 MFC set to  0.000000
11/29/2011	10:58:26 AM	PHl3 MFC set to  0.000000
11/29/2011	10:58:26 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:58:26 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:58:26 AM	Tube furnace set to 150
11/29/2011	10:58:56 AM	H2 valve closed
11/29/2011	10:58:56 AM	BCl3 valve closed
11/29/2011	10:58:56 AM	PH3 valve closed
11/29/2011	10:58:56 AM	SiCl4 pre valve closed
11/29/2011	10:58:56 AM	SiCl4 post valve closed
11/29/2011	10:58:56 AM	Bypass valve closed
11/29/2011	10:58:56 AM	Bubbler valve closed
11/29/2011	10:58:56 AM	Helium valve opened
11/29/2011	10:58:56 AM	Main Vac valve opened
11/29/2011	10:58:56 AM	Helium MFC set to  20.000000
11/29/2011	10:58:56 AM	H2 MFC set to  0.000000
11/29/2011	10:58:56 AM	BCl3 MFC set to  0.000000
11/29/2011	10:58:56 AM	PHl3 MFC set to  0.000000
11/29/2011	10:58:56 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:58:56 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:58:56 AM	Tube furnace set to 150
11/29/2011	10:59:26 AM	Helium valve closed
11/29/2011	10:59:26 AM	H2 valve closed
11/29/2011	10:59:26 AM	BCl3 valve closed
11/29/2011	10:59:26 AM	PH3 valve closed
11/29/2011	10:59:26 AM	SiCl4 pre valve closed
11/29/2011	10:59:26 AM	SiCl4 post valve closed
11/29/2011	10:59:26 AM	Bypass valve closed
11/29/2011	10:59:26 AM	Bubbler valve closed
11/29/2011	10:59:26 AM	Main Vac valve opened
11/29/2011	10:59:26 AM	Helium MFC set to  0.000000
11/29/2011	10:59:26 AM	H2 MFC set to  0.000000
11/29/2011	10:59:26 AM	BCl3 MFC set to  0.000000
11/29/2011	10:59:26 AM	PHl3 MFC set to  0.000000
11/29/2011	10:59:26 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:59:26 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:59:26 AM	Tube furnace set to 150
11/29/2011	10:59:56 AM	H2 valve closed
11/29/2011	10:59:56 AM	BCl3 valve closed
11/29/2011	10:59:56 AM	PH3 valve closed
11/29/2011	10:59:56 AM	SiCl4 pre valve closed
11/29/2011	10:59:56 AM	SiCl4 post valve closed
11/29/2011	10:59:56 AM	Bypass valve closed
11/29/2011	10:59:56 AM	Bubbler valve closed
11/29/2011	10:59:56 AM	Helium valve opened
11/29/2011	10:59:56 AM	Main Vac valve opened
11/29/2011	10:59:56 AM	Helium MFC set to  20.000000
11/29/2011	10:59:56 AM	H2 MFC set to  0.000000
11/29/2011	10:59:56 AM	BCl3 MFC set to  0.000000
11/29/2011	10:59:56 AM	PHl3 MFC set to  0.000000
11/29/2011	10:59:56 AM	SiCl4 MFC set to  0.000000
11/29/2011	10:59:56 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	10:59:56 AM	Tube furnace set to 150
11/29/2011	11:00:27 AM	Helium valve closed
11/29/2011	11:00:27 AM	H2 valve closed
11/29/2011	11:00:27 AM	BCl3 valve closed
11/29/2011	11:00:27 AM	PH3 valve closed
11/29/2011	11:00:27 AM	SiCl4 pre valve closed
11/29/2011	11:00:27 AM	SiCl4 post valve closed
11/29/2011	11:00:27 AM	Bypass valve closed
11/29/2011	11:00:27 AM	Bubbler valve closed
11/29/2011	11:00:27 AM	Main Vac valve opened
11/29/2011	11:00:27 AM	Helium MFC set to  0.000000
11/29/2011	11:00:27 AM	H2 MFC set to  0.000000
11/29/2011	11:00:27 AM	BCl3 MFC set to  0.000000
11/29/2011	11:00:27 AM	PHl3 MFC set to  0.000000
11/29/2011	11:00:27 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:00:27 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:00:27 AM	Tube furnace set to 150
11/29/2011	11:00:57 AM	H2 valve closed
11/29/2011	11:00:57 AM	BCl3 valve closed
11/29/2011	11:00:57 AM	PH3 valve closed
11/29/2011	11:00:57 AM	SiCl4 pre valve closed
11/29/2011	11:00:57 AM	SiCl4 post valve closed
11/29/2011	11:00:57 AM	Bypass valve closed
11/29/2011	11:00:57 AM	Bubbler valve closed
11/29/2011	11:00:57 AM	Helium valve opened
11/29/2011	11:00:57 AM	Main Vac valve opened
11/29/2011	11:00:57 AM	Helium MFC set to  20.000000
11/29/2011	11:00:57 AM	H2 MFC set to  0.000000
11/29/2011	11:00:57 AM	BCl3 MFC set to  0.000000
11/29/2011	11:00:57 AM	PHl3 MFC set to  0.000000
11/29/2011	11:00:57 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:00:57 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:00:57 AM	Tube furnace set to 150
11/29/2011	11:01:27 AM	Helium valve closed
11/29/2011	11:01:27 AM	H2 valve closed
11/29/2011	11:01:27 AM	BCl3 valve closed
11/29/2011	11:01:27 AM	PH3 valve closed
11/29/2011	11:01:27 AM	SiCl4 pre valve closed
11/29/2011	11:01:27 AM	SiCl4 post valve closed
11/29/2011	11:01:27 AM	Bypass valve closed
11/29/2011	11:01:27 AM	Bubbler valve closed
11/29/2011	11:01:27 AM	Main Vac valve opened
11/29/2011	11:01:27 AM	Helium MFC set to  0.000000
11/29/2011	11:01:27 AM	H2 MFC set to  0.000000
11/29/2011	11:01:27 AM	BCl3 MFC set to  0.000000
11/29/2011	11:01:27 AM	PHl3 MFC set to  0.000000
11/29/2011	11:01:27 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:01:27 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:01:27 AM	Tube furnace set to 150
11/29/2011	11:01:57 AM	H2 valve closed
11/29/2011	11:01:57 AM	BCl3 valve closed
11/29/2011	11:01:57 AM	PH3 valve closed
11/29/2011	11:01:57 AM	SiCl4 pre valve closed
11/29/2011	11:01:57 AM	SiCl4 post valve closed
11/29/2011	11:01:57 AM	Bypass valve closed
11/29/2011	11:01:57 AM	Bubbler valve closed
11/29/2011	11:01:57 AM	Helium valve opened
11/29/2011	11:01:57 AM	Main Vac valve opened
11/29/2011	11:01:57 AM	Helium MFC set to  20.000000
11/29/2011	11:01:57 AM	H2 MFC set to  0.000000
11/29/2011	11:01:57 AM	BCl3 MFC set to  0.000000
11/29/2011	11:01:57 AM	PHl3 MFC set to  0.000000
11/29/2011	11:01:57 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:01:57 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:01:57 AM	Tube furnace set to 150
11/29/2011	11:02:27 AM	Helium valve closed
11/29/2011	11:02:27 AM	H2 valve closed
11/29/2011	11:02:27 AM	BCl3 valve closed
11/29/2011	11:02:27 AM	PH3 valve closed
11/29/2011	11:02:27 AM	SiCl4 pre valve closed
11/29/2011	11:02:27 AM	SiCl4 post valve closed
11/29/2011	11:02:27 AM	Bypass valve closed
11/29/2011	11:02:27 AM	Bubbler valve closed
11/29/2011	11:02:27 AM	Main Vac valve opened
11/29/2011	11:02:27 AM	Helium MFC set to  0.000000
11/29/2011	11:02:27 AM	H2 MFC set to  0.000000
11/29/2011	11:02:27 AM	BCl3 MFC set to  0.000000
11/29/2011	11:02:27 AM	PHl3 MFC set to  0.000000
11/29/2011	11:02:27 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:02:27 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:02:28 AM	Tube furnace set to 150
11/29/2011	11:02:58 AM	H2 valve closed
11/29/2011	11:02:58 AM	BCl3 valve closed
11/29/2011	11:02:58 AM	PH3 valve closed
11/29/2011	11:02:58 AM	SiCl4 pre valve closed
11/29/2011	11:02:58 AM	SiCl4 post valve closed
11/29/2011	11:02:58 AM	Bypass valve closed
11/29/2011	11:02:58 AM	Bubbler valve closed
11/29/2011	11:02:58 AM	Helium valve opened
11/29/2011	11:02:58 AM	Main Vac valve opened
11/29/2011	11:02:58 AM	Helium MFC set to  20.000000
11/29/2011	11:02:58 AM	H2 MFC set to  0.000000
11/29/2011	11:02:58 AM	BCl3 MFC set to  0.000000
11/29/2011	11:02:58 AM	PHl3 MFC set to  0.000000
11/29/2011	11:02:58 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:02:58 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:02:58 AM	Tube furnace set to 150
11/29/2011	11:03:28 AM	Helium valve closed
11/29/2011	11:03:28 AM	H2 valve closed
11/29/2011	11:03:28 AM	BCl3 valve closed
11/29/2011	11:03:28 AM	PH3 valve closed
11/29/2011	11:03:28 AM	SiCl4 pre valve closed
11/29/2011	11:03:28 AM	SiCl4 post valve closed
11/29/2011	11:03:28 AM	Bypass valve closed
11/29/2011	11:03:28 AM	Bubbler valve closed
11/29/2011	11:03:28 AM	Main Vac valve opened
11/29/2011	11:03:28 AM	Helium MFC set to  0.000000
11/29/2011	11:03:28 AM	H2 MFC set to  0.000000
11/29/2011	11:03:28 AM	BCl3 MFC set to  0.000000
11/29/2011	11:03:28 AM	PHl3 MFC set to  0.000000
11/29/2011	11:03:28 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:03:28 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:03:28 AM	Tube furnace set to 150
11/29/2011	11:03:58 AM	H2 valve closed
11/29/2011	11:03:58 AM	BCl3 valve closed
11/29/2011	11:03:58 AM	PH3 valve closed
11/29/2011	11:03:58 AM	SiCl4 pre valve closed
11/29/2011	11:03:58 AM	SiCl4 post valve closed
11/29/2011	11:03:58 AM	Bypass valve closed
11/29/2011	11:03:58 AM	Bubbler valve closed
11/29/2011	11:03:58 AM	Helium valve opened
11/29/2011	11:03:58 AM	Main Vac valve opened
11/29/2011	11:03:58 AM	Helium MFC set to  20.000000
11/29/2011	11:03:58 AM	H2 MFC set to  0.000000
11/29/2011	11:03:58 AM	BCl3 MFC set to  0.000000
11/29/2011	11:03:58 AM	PHl3 MFC set to  0.000000
11/29/2011	11:03:58 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:03:58 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:03:58 AM	Tube furnace set to 150
11/29/2011	11:04:28 AM	Helium valve closed
11/29/2011	11:04:28 AM	H2 valve closed
11/29/2011	11:04:28 AM	BCl3 valve closed
11/29/2011	11:04:28 AM	PH3 valve closed
11/29/2011	11:04:28 AM	SiCl4 pre valve closed
11/29/2011	11:04:28 AM	SiCl4 post valve closed
11/29/2011	11:04:28 AM	Bypass valve closed
11/29/2011	11:04:28 AM	Bubbler valve closed
11/29/2011	11:04:28 AM	Main Vac valve opened
11/29/2011	11:04:28 AM	Helium MFC set to  0.000000
11/29/2011	11:04:28 AM	H2 MFC set to  0.000000
11/29/2011	11:04:28 AM	BCl3 MFC set to  0.000000
11/29/2011	11:04:28 AM	PHl3 MFC set to  0.000000
11/29/2011	11:04:28 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:04:28 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:04:28 AM	Tube furnace set to 150
11/29/2011	11:04:58 AM	H2 valve closed
11/29/2011	11:04:58 AM	BCl3 valve closed
11/29/2011	11:04:58 AM	PH3 valve closed
11/29/2011	11:04:58 AM	SiCl4 pre valve closed
11/29/2011	11:04:58 AM	SiCl4 post valve closed
11/29/2011	11:04:58 AM	Bypass valve closed
11/29/2011	11:04:58 AM	Bubbler valve closed
11/29/2011	11:04:58 AM	Helium valve opened
11/29/2011	11:04:58 AM	Main Vac valve opened
11/29/2011	11:04:58 AM	Helium MFC set to  20.000000
11/29/2011	11:04:58 AM	H2 MFC set to  0.000000
11/29/2011	11:04:58 AM	BCl3 MFC set to  0.000000
11/29/2011	11:04:58 AM	PHl3 MFC set to  0.000000
11/29/2011	11:04:58 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:04:58 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:04:59 AM	Tube furnace set to 150
11/29/2011	11:05:29 AM	Helium valve closed
11/29/2011	11:05:29 AM	H2 valve closed
11/29/2011	11:05:29 AM	BCl3 valve closed
11/29/2011	11:05:29 AM	PH3 valve closed
11/29/2011	11:05:29 AM	SiCl4 pre valve closed
11/29/2011	11:05:29 AM	SiCl4 post valve closed
11/29/2011	11:05:29 AM	Bypass valve closed
11/29/2011	11:05:29 AM	Bubbler valve closed
11/29/2011	11:05:29 AM	Main Vac valve opened
11/29/2011	11:05:29 AM	Helium MFC set to  0.000000
11/29/2011	11:05:29 AM	H2 MFC set to  0.000000
11/29/2011	11:05:29 AM	BCl3 MFC set to  0.000000
11/29/2011	11:05:29 AM	PHl3 MFC set to  0.000000
11/29/2011	11:05:29 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:05:29 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:05:29 AM	Tube furnace set to 150
11/29/2011	11:05:59 AM	H2 valve closed
11/29/2011	11:05:59 AM	BCl3 valve closed
11/29/2011	11:05:59 AM	PH3 valve closed
11/29/2011	11:05:59 AM	SiCl4 pre valve closed
11/29/2011	11:05:59 AM	SiCl4 post valve closed
11/29/2011	11:05:59 AM	Bypass valve closed
11/29/2011	11:05:59 AM	Bubbler valve closed
11/29/2011	11:05:59 AM	Helium valve opened
11/29/2011	11:05:59 AM	Main Vac valve opened
11/29/2011	11:05:59 AM	Helium MFC set to  20.000000
11/29/2011	11:05:59 AM	H2 MFC set to  0.000000
11/29/2011	11:05:59 AM	BCl3 MFC set to  0.000000
11/29/2011	11:05:59 AM	PHl3 MFC set to  0.000000
11/29/2011	11:05:59 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:05:59 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:05:59 AM	Tube furnace set to 150
11/29/2011	11:06:29 AM	Helium valve closed
11/29/2011	11:06:29 AM	H2 valve closed
11/29/2011	11:06:29 AM	BCl3 valve closed
11/29/2011	11:06:29 AM	PH3 valve closed
11/29/2011	11:06:29 AM	SiCl4 pre valve closed
11/29/2011	11:06:29 AM	SiCl4 post valve closed
11/29/2011	11:06:29 AM	Bypass valve closed
11/29/2011	11:06:29 AM	Bubbler valve closed
11/29/2011	11:06:29 AM	Main Vac valve opened
11/29/2011	11:06:29 AM	Helium MFC set to  0.000000
11/29/2011	11:06:29 AM	H2 MFC set to  0.000000
11/29/2011	11:06:29 AM	BCl3 MFC set to  0.000000
11/29/2011	11:06:29 AM	PHl3 MFC set to  0.000000
11/29/2011	11:06:29 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:06:29 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:06:29 AM	Tube furnace set to 150
11/29/2011	11:06:30 AM	Run finished at 11:06 AM
11/29/2011	11:07:00 AM	Main Vac valve closed
11/29/2011	11:07:19 AM	Main Vac valve opened
11/29/2011	11:08:22 AM	Recipe started at 11:08 AM
11/29/2011	11:08:22 AM	Helium valve closed
11/29/2011	11:08:22 AM	H2 valve closed
11/29/2011	11:08:22 AM	BCl3 valve closed
11/29/2011	11:08:22 AM	PH3 valve closed
11/29/2011	11:08:22 AM	SiCl4 pre valve closed
11/29/2011	11:08:22 AM	SiCl4 post valve closed
11/29/2011	11:08:22 AM	Main Vac valve closed
11/29/2011	11:08:22 AM	Bypass valve closed
11/29/2011	11:08:22 AM	Bubbler valve closed
11/29/2011	11:08:22 AM	Helium MFC set to  0.000000
11/29/2011	11:08:22 AM	H2 MFC set to  0.000000
11/29/2011	11:08:22 AM	BCl3 MFC set to  0.000000
11/29/2011	11:08:22 AM	PHl3 MFC set to  0.000000
11/29/2011	11:08:22 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:08:22 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:08:22 AM	Tube furnace set to 0
11/29/2011	11:08:25 AM	Helium valve closed
11/29/2011	11:08:25 AM	BCl3 valve closed
11/29/2011	11:08:25 AM	PH3 valve closed
11/29/2011	11:08:25 AM	SiCl4 pre valve closed
11/29/2011	11:08:25 AM	SiCl4 post valve closed
11/29/2011	11:08:25 AM	Main Vac valve closed
11/29/2011	11:08:25 AM	Bypass valve closed
11/29/2011	11:08:25 AM	Bubbler valve closed
11/29/2011	11:08:25 AM	H2 valve opened
11/29/2011	11:08:25 AM	Helium MFC set to  0.000000
11/29/2011	11:08:25 AM	H2 MFC set to  500.000000
11/29/2011	11:08:25 AM	BCl3 MFC set to  0.000000
11/29/2011	11:08:25 AM	PHl3 MFC set to  0.000000
11/29/2011	11:08:25 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:08:25 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:08:26 AM	Tube furnace set to 0
11/29/2011	11:09:29 AM	Helium valve closed
11/29/2011	11:09:29 AM	BCl3 valve closed
11/29/2011	11:09:29 AM	PH3 valve closed
11/29/2011	11:09:29 AM	SiCl4 pre valve closed
11/29/2011	11:09:29 AM	SiCl4 post valve closed
11/29/2011	11:09:29 AM	Main Vac valve closed
11/29/2011	11:09:29 AM	Bypass valve closed
11/29/2011	11:09:29 AM	H2 valve opened
11/29/2011	11:09:29 AM	Bubbler valve opened
11/29/2011	11:09:29 AM	Helium MFC set to  0.000000
11/29/2011	11:09:29 AM	H2 MFC set to  500.000000
11/29/2011	11:09:29 AM	BCl3 MFC set to  0.000000
11/29/2011	11:09:29 AM	PHl3 MFC set to  0.000000
11/29/2011	11:09:29 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:09:29 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:09:29 AM	Tube furnace set to 0
11/29/2011	11:09:30 AM	Helium valve closed
11/29/2011	11:09:30 AM	BCl3 valve closed
11/29/2011	11:09:30 AM	PH3 valve closed
11/29/2011	11:09:30 AM	SiCl4 pre valve closed
11/29/2011	11:09:30 AM	SiCl4 post valve closed
11/29/2011	11:09:30 AM	Main Vac valve closed
11/29/2011	11:09:30 AM	Bypass valve closed
11/29/2011	11:09:30 AM	H2 valve opened
11/29/2011	11:09:30 AM	Bubbler valve opened
11/29/2011	11:09:30 AM	Helium MFC set to  0.000000
11/29/2011	11:09:30 AM	H2 MFC set to  500.000000
11/29/2011	11:09:30 AM	BCl3 MFC set to  0.000000
11/29/2011	11:09:30 AM	PHl3 MFC set to  0.000000
11/29/2011	11:09:30 AM	SiCl4 MFC set to  0.000000
11/29/2011	11:09:30 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:09:31 AM	Tube furnace set to 1000
11/29/2011	11:34:30 AM	Helium valve closed
11/29/2011	11:34:30 AM	PH3 valve closed
11/29/2011	11:34:30 AM	Main Vac valve closed
11/29/2011	11:34:30 AM	Bypass valve closed
11/29/2011	11:34:30 AM	H2 valve opened
11/29/2011	11:34:30 AM	BCl3 valve opened
11/29/2011	11:34:30 AM	SiCl4 pre valve opened
11/29/2011	11:34:31 AM	SiCl4 post valve opened
11/29/2011	11:34:31 AM	Bubbler valve opened
11/29/2011	11:34:31 AM	Helium MFC set to  0.000000
11/29/2011	11:34:31 AM	H2 MFC set to  500.000000
11/29/2011	11:34:31 AM	BCl3 MFC set to  3.000000
11/29/2011	11:34:31 AM	PHl3 MFC set to  0.000000
11/29/2011	11:34:31 AM	SiCl4 MFC set to  25.000000
11/29/2011	11:34:31 AM	Bypass solenoid MFC set to  0.000000
11/29/2011	11:34:31 AM	Tube furnace set to 1000
11/29/2011	12:04:31 PM	Helium valve closed
11/29/2011	12:04:31 PM	BCl3 valve closed
11/29/2011	12:04:31 PM	PH3 valve closed
11/29/2011	12:04:31 PM	SiCl4 pre valve closed
11/29/2011	12:04:31 PM	SiCl4 post valve closed
11/29/2011	12:04:31 PM	Main Vac valve closed
11/29/2011	12:04:31 PM	Bypass valve closed
11/29/2011	12:04:31 PM	H2 valve opened
11/29/2011	12:04:31 PM	Bubbler valve opened
11/29/2011	12:04:31 PM	Helium MFC set to  0.000000
11/29/2011	12:04:31 PM	H2 MFC set to  500.000000
11/29/2011	12:04:31 PM	BCl3 MFC set to  0.000000
11/29/2011	12:04:31 PM	PHl3 MFC set to  0.000000
11/29/2011	12:04:31 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:04:31 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:04:31 PM	Tube furnace set to 750
11/29/2011	12:14:31 PM	H2 valve closed
11/29/2011	12:14:31 PM	BCl3 valve closed
11/29/2011	12:14:31 PM	PH3 valve closed
11/29/2011	12:14:31 PM	SiCl4 pre valve closed
11/29/2011	12:14:31 PM	SiCl4 post valve closed
11/29/2011	12:14:31 PM	Main Vac valve closed
11/29/2011	12:14:31 PM	Bypass valve closed
11/29/2011	12:14:31 PM	Helium valve opened
11/29/2011	12:14:31 PM	Bubbler valve opened
11/29/2011	12:14:31 PM	Helium MFC set to  500.000000
11/29/2011	12:14:31 PM	H2 MFC set to  0.000000
11/29/2011	12:14:31 PM	BCl3 MFC set to  0.000000
11/29/2011	12:14:31 PM	PHl3 MFC set to  0.000000
11/29/2011	12:14:31 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:14:31 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:14:31 PM	Tube furnace set to 0
11/29/2011	12:29:13 PM	Helium valve closed
11/29/2011	12:29:13 PM	H2 valve closed
11/29/2011	12:29:13 PM	BCl3 valve closed
11/29/2011	12:29:13 PM	PH3 valve closed
11/29/2011	12:29:13 PM	SiCl4 pre valve closed
11/29/2011	12:29:13 PM	SiCl4 post valve closed
11/29/2011	12:29:13 PM	Main Vac valve closed
11/29/2011	12:29:13 PM	Bypass valve closed
11/29/2011	12:29:13 PM	Bubbler valve closed
11/29/2011	12:29:13 PM	Helium MFC set to  0.000000
11/29/2011	12:29:13 PM	H2 MFC set to  0.000000
11/29/2011	12:29:13 PM	BCl3 MFC set to  0.000000
11/29/2011	12:29:13 PM	PHl3 MFC set to  0.000000
11/29/2011	12:29:13 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:29:13 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:29:13 PM	Tube furnace set to 0
11/29/2011	12:29:14 PM	Run finished at 12:29 PM
11/29/2011	12:29:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2011	12:29:19 PM	Recipe started at 12:29 PM
11/29/2011	12:29:19 PM	Helium valve closed
11/29/2011	12:29:19 PM	H2 valve closed
11/29/2011	12:29:19 PM	BCl3 valve closed
11/29/2011	12:29:19 PM	PH3 valve closed
11/29/2011	12:29:19 PM	SiCl4 pre valve closed
11/29/2011	12:29:19 PM	SiCl4 post valve closed
11/29/2011	12:29:19 PM	Main Vac valve closed
11/29/2011	12:29:19 PM	Bypass valve closed
11/29/2011	12:29:19 PM	Bubbler valve closed
11/29/2011	12:29:19 PM	Helium MFC set to  0.000000
11/29/2011	12:29:19 PM	H2 MFC set to  0.000000
11/29/2011	12:29:19 PM	BCl3 MFC set to  0.000000
11/29/2011	12:29:19 PM	PHl3 MFC set to  0.000000
11/29/2011	12:29:19 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:29:19 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:29:19 PM	Tube furnace set to 0
11/29/2011	12:29:22 PM	H2 valve closed
11/29/2011	12:29:22 PM	BCl3 valve closed
11/29/2011	12:29:22 PM	PH3 valve closed
11/29/2011	12:29:22 PM	SiCl4 pre valve closed
11/29/2011	12:29:22 PM	SiCl4 post valve closed
11/29/2011	12:29:22 PM	Main Vac valve closed
11/29/2011	12:29:22 PM	Bypass valve closed
11/29/2011	12:29:22 PM	Bubbler valve closed
11/29/2011	12:29:22 PM	Helium valve opened
11/29/2011	12:29:22 PM	Helium MFC set to  500.000000
11/29/2011	12:29:23 PM	H2 MFC set to  0.000000
11/29/2011	12:29:23 PM	BCl3 MFC set to  0.000000
11/29/2011	12:29:23 PM	PHl3 MFC set to  0.000000
11/29/2011	12:29:23 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:29:23 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:29:23 PM	Tube furnace set to 0
11/29/2011	12:29:23 PM	Helium valve closed
11/29/2011	12:29:23 PM	H2 valve closed
11/29/2011	12:29:23 PM	BCl3 valve closed
11/29/2011	12:29:23 PM	PH3 valve closed
11/29/2011	12:29:23 PM	SiCl4 pre valve closed
11/29/2011	12:29:23 PM	SiCl4 post valve closed
11/29/2011	12:29:23 PM	Main Vac valve closed
11/29/2011	12:29:23 PM	Bypass valve closed
11/29/2011	12:29:23 PM	Bubbler valve closed
11/29/2011	12:29:23 PM	Helium MFC set to  0.000000
11/29/2011	12:29:23 PM	H2 MFC set to  0.000000
11/29/2011	12:29:23 PM	BCl3 MFC set to  0.000000
11/29/2011	12:29:23 PM	PHl3 MFC set to  0.000000
11/29/2011	12:29:23 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:29:23 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:29:23 PM	Tube furnace set to 0
11/29/2011	12:29:24 PM	Run finished at 12:29 PM
11/29/2011	12:29:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2011	12:35:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2011	12:35:25 PM	Recipe started at 12:35 PM
11/29/2011	12:35:25 PM	Helium valve closed
11/29/2011	12:35:25 PM	H2 valve closed
11/29/2011	12:35:25 PM	BCl3 valve closed
11/29/2011	12:35:25 PM	PH3 valve closed
11/29/2011	12:35:25 PM	SiCl4 pre valve closed
11/29/2011	12:35:25 PM	SiCl4 post valve closed
11/29/2011	12:35:25 PM	Main Vac valve closed
11/29/2011	12:35:25 PM	Bubbler valve closed
11/29/2011	12:35:25 PM	Bypass valve opened
11/29/2011	12:35:25 PM	Helium MFC set to  0.000000
11/29/2011	12:35:25 PM	H2 MFC set to  0.000000
11/29/2011	12:35:25 PM	BCl3 MFC set to  0.000000
11/29/2011	12:35:25 PM	PHl3 MFC set to  0.000000
11/29/2011	12:35:25 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:35:25 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:35:25 PM	Tube furnace set to 0
11/29/2011	12:37:15 PM	Helium valve closed
11/29/2011	12:37:15 PM	H2 valve closed
11/29/2011	12:37:15 PM	BCl3 valve closed
11/29/2011	12:37:15 PM	PH3 valve closed
11/29/2011	12:37:15 PM	SiCl4 pre valve closed
11/29/2011	12:37:15 PM	SiCl4 post valve closed
11/29/2011	12:37:15 PM	Main Vac valve closed
11/29/2011	12:37:15 PM	Bubbler valve closed
11/29/2011	12:37:15 PM	Bypass valve opened
11/29/2011	12:37:15 PM	Helium MFC set to  0.000000
11/29/2011	12:37:15 PM	H2 MFC set to  0.000000
11/29/2011	12:37:15 PM	BCl3 MFC set to  0.000000
11/29/2011	12:37:15 PM	PHl3 MFC set to  0.000000
11/29/2011	12:37:15 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:37:15 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:37:16 PM	Tube furnace set to 0
11/29/2011	12:38:16 PM	Helium valve closed
11/29/2011	12:38:16 PM	H2 valve closed
11/29/2011	12:38:16 PM	BCl3 valve closed
11/29/2011	12:38:16 PM	PH3 valve closed
11/29/2011	12:38:16 PM	SiCl4 pre valve closed
11/29/2011	12:38:16 PM	SiCl4 post valve closed
11/29/2011	12:38:16 PM	Bypass valve closed
11/29/2011	12:38:16 PM	Bubbler valve closed
11/29/2011	12:38:16 PM	Main Vac valve opened
11/29/2011	12:38:16 PM	Helium MFC set to  0.000000
11/29/2011	12:38:16 PM	H2 MFC set to  0.000000
11/29/2011	12:38:16 PM	BCl3 MFC set to  0.000000
11/29/2011	12:38:16 PM	PHl3 MFC set to  0.000000
11/29/2011	12:38:16 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:38:16 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:38:16 PM	Tube furnace set to 0
11/29/2011	12:38:17 PM	Run finished at 12:38 PM
11/29/2011	12:38:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2011	12:46:31 PM	Recipe started at 12:46 PM
11/29/2011	12:46:31 PM	Helium valve closed
11/29/2011	12:46:31 PM	H2 valve closed
11/29/2011	12:46:31 PM	BCl3 valve closed
11/29/2011	12:46:31 PM	PH3 valve closed
11/29/2011	12:46:31 PM	SiCl4 pre valve closed
11/29/2011	12:46:31 PM	SiCl4 post valve closed
11/29/2011	12:46:31 PM	Bypass valve closed
11/29/2011	12:46:31 PM	Bubbler valve closed
11/29/2011	12:46:31 PM	Main Vac valve opened
11/29/2011	12:46:31 PM	Helium MFC set to  0.000000
11/29/2011	12:46:31 PM	H2 MFC set to  0.000000
11/29/2011	12:46:31 PM	BCl3 MFC set to  0.000000
11/29/2011	12:46:31 PM	PHl3 MFC set to  0.000000
11/29/2011	12:46:31 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:46:31 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:46:31 PM	Tube furnace set to 150
11/29/2011	12:47:01 PM	H2 valve closed
11/29/2011	12:47:01 PM	BCl3 valve closed
11/29/2011	12:47:01 PM	PH3 valve closed
11/29/2011	12:47:01 PM	SiCl4 pre valve closed
11/29/2011	12:47:01 PM	SiCl4 post valve closed
11/29/2011	12:47:01 PM	Bypass valve closed
11/29/2011	12:47:01 PM	Bubbler valve closed
11/29/2011	12:47:01 PM	Helium valve opened
11/29/2011	12:47:01 PM	Main Vac valve opened
11/29/2011	12:47:01 PM	Helium MFC set to  20.000000
11/29/2011	12:47:01 PM	H2 MFC set to  0.000000
11/29/2011	12:47:01 PM	BCl3 MFC set to  0.000000
11/29/2011	12:47:01 PM	PHl3 MFC set to  0.000000
11/29/2011	12:47:01 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:47:01 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:47:01 PM	Tube furnace set to 150
11/29/2011	12:47:31 PM	Helium valve closed
11/29/2011	12:47:31 PM	H2 valve closed
11/29/2011	12:47:31 PM	BCl3 valve closed
11/29/2011	12:47:31 PM	PH3 valve closed
11/29/2011	12:47:31 PM	SiCl4 pre valve closed
11/29/2011	12:47:31 PM	SiCl4 post valve closed
11/29/2011	12:47:31 PM	Bypass valve closed
11/29/2011	12:47:31 PM	Bubbler valve closed
11/29/2011	12:47:31 PM	Main Vac valve opened
11/29/2011	12:47:31 PM	Helium MFC set to  0.000000
11/29/2011	12:47:31 PM	H2 MFC set to  0.000000
11/29/2011	12:47:31 PM	BCl3 MFC set to  0.000000
11/29/2011	12:47:31 PM	PHl3 MFC set to  0.000000
11/29/2011	12:47:31 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:47:31 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:47:31 PM	Tube furnace set to 150
11/29/2011	12:48:01 PM	H2 valve closed
11/29/2011	12:48:01 PM	BCl3 valve closed
11/29/2011	12:48:01 PM	PH3 valve closed
11/29/2011	12:48:01 PM	SiCl4 pre valve closed
11/29/2011	12:48:01 PM	SiCl4 post valve closed
11/29/2011	12:48:01 PM	Bypass valve closed
11/29/2011	12:48:01 PM	Bubbler valve closed
11/29/2011	12:48:01 PM	Helium valve opened
11/29/2011	12:48:01 PM	Main Vac valve opened
11/29/2011	12:48:01 PM	Helium MFC set to  20.000000
11/29/2011	12:48:01 PM	H2 MFC set to  0.000000
11/29/2011	12:48:01 PM	BCl3 MFC set to  0.000000
11/29/2011	12:48:01 PM	PHl3 MFC set to  0.000000
11/29/2011	12:48:01 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:48:01 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:48:02 PM	Tube furnace set to 150
11/29/2011	12:48:32 PM	Helium valve closed
11/29/2011	12:48:32 PM	H2 valve closed
11/29/2011	12:48:32 PM	BCl3 valve closed
11/29/2011	12:48:32 PM	PH3 valve closed
11/29/2011	12:48:32 PM	SiCl4 pre valve closed
11/29/2011	12:48:32 PM	SiCl4 post valve closed
11/29/2011	12:48:32 PM	Bypass valve closed
11/29/2011	12:48:32 PM	Bubbler valve closed
11/29/2011	12:48:32 PM	Main Vac valve opened
11/29/2011	12:48:32 PM	Helium MFC set to  0.000000
11/29/2011	12:48:32 PM	H2 MFC set to  0.000000
11/29/2011	12:48:32 PM	BCl3 MFC set to  0.000000
11/29/2011	12:48:32 PM	PHl3 MFC set to  0.000000
11/29/2011	12:48:32 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:48:32 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:48:32 PM	Tube furnace set to 150
11/29/2011	12:49:02 PM	H2 valve closed
11/29/2011	12:49:02 PM	BCl3 valve closed
11/29/2011	12:49:02 PM	PH3 valve closed
11/29/2011	12:49:02 PM	SiCl4 pre valve closed
11/29/2011	12:49:02 PM	SiCl4 post valve closed
11/29/2011	12:49:02 PM	Bypass valve closed
11/29/2011	12:49:02 PM	Bubbler valve closed
11/29/2011	12:49:02 PM	Helium valve opened
11/29/2011	12:49:02 PM	Main Vac valve opened
11/29/2011	12:49:02 PM	Helium MFC set to  20.000000
11/29/2011	12:49:02 PM	H2 MFC set to  0.000000
11/29/2011	12:49:02 PM	BCl3 MFC set to  0.000000
11/29/2011	12:49:02 PM	PHl3 MFC set to  0.000000
11/29/2011	12:49:02 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:49:02 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:49:02 PM	Tube furnace set to 150
11/29/2011	12:49:32 PM	Helium valve closed
11/29/2011	12:49:32 PM	H2 valve closed
11/29/2011	12:49:32 PM	BCl3 valve closed
11/29/2011	12:49:32 PM	PH3 valve closed
11/29/2011	12:49:32 PM	SiCl4 pre valve closed
11/29/2011	12:49:32 PM	SiCl4 post valve closed
11/29/2011	12:49:32 PM	Bypass valve closed
11/29/2011	12:49:32 PM	Bubbler valve closed
11/29/2011	12:49:32 PM	Main Vac valve opened
11/29/2011	12:49:32 PM	Helium MFC set to  0.000000
11/29/2011	12:49:32 PM	H2 MFC set to  0.000000
11/29/2011	12:49:32 PM	BCl3 MFC set to  0.000000
11/29/2011	12:49:32 PM	PHl3 MFC set to  0.000000
11/29/2011	12:49:32 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:49:32 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:49:32 PM	Tube furnace set to 150
11/29/2011	12:50:02 PM	H2 valve closed
11/29/2011	12:50:02 PM	BCl3 valve closed
11/29/2011	12:50:02 PM	PH3 valve closed
11/29/2011	12:50:02 PM	SiCl4 pre valve closed
11/29/2011	12:50:02 PM	SiCl4 post valve closed
11/29/2011	12:50:02 PM	Bypass valve closed
11/29/2011	12:50:02 PM	Bubbler valve closed
11/29/2011	12:50:02 PM	Helium valve opened
11/29/2011	12:50:02 PM	Main Vac valve opened
11/29/2011	12:50:02 PM	Helium MFC set to  20.000000
11/29/2011	12:50:02 PM	H2 MFC set to  0.000000
11/29/2011	12:50:02 PM	BCl3 MFC set to  0.000000
11/29/2011	12:50:02 PM	PHl3 MFC set to  0.000000
11/29/2011	12:50:02 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:50:02 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:50:02 PM	Tube furnace set to 150
11/29/2011	12:50:32 PM	Helium valve closed
11/29/2011	12:50:32 PM	H2 valve closed
11/29/2011	12:50:32 PM	BCl3 valve closed
11/29/2011	12:50:32 PM	PH3 valve closed
11/29/2011	12:50:32 PM	SiCl4 pre valve closed
11/29/2011	12:50:32 PM	SiCl4 post valve closed
11/29/2011	12:50:32 PM	Bypass valve closed
11/29/2011	12:50:32 PM	Bubbler valve closed
11/29/2011	12:50:32 PM	Main Vac valve opened
11/29/2011	12:50:32 PM	Helium MFC set to  0.000000
11/29/2011	12:50:32 PM	H2 MFC set to  0.000000
11/29/2011	12:50:32 PM	BCl3 MFC set to  0.000000
11/29/2011	12:50:32 PM	PHl3 MFC set to  0.000000
11/29/2011	12:50:32 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:50:32 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:50:33 PM	Tube furnace set to 150
11/29/2011	12:51:03 PM	H2 valve closed
11/29/2011	12:51:03 PM	BCl3 valve closed
11/29/2011	12:51:03 PM	PH3 valve closed
11/29/2011	12:51:03 PM	SiCl4 pre valve closed
11/29/2011	12:51:03 PM	SiCl4 post valve closed
11/29/2011	12:51:03 PM	Bypass valve closed
11/29/2011	12:51:03 PM	Bubbler valve closed
11/29/2011	12:51:03 PM	Helium valve opened
11/29/2011	12:51:03 PM	Main Vac valve opened
11/29/2011	12:51:03 PM	Helium MFC set to  20.000000
11/29/2011	12:51:03 PM	H2 MFC set to  0.000000
11/29/2011	12:51:03 PM	BCl3 MFC set to  0.000000
11/29/2011	12:51:03 PM	PHl3 MFC set to  0.000000
11/29/2011	12:51:03 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:51:03 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:51:03 PM	Tube furnace set to 150
11/29/2011	12:51:33 PM	Helium valve closed
11/29/2011	12:51:33 PM	H2 valve closed
11/29/2011	12:51:33 PM	BCl3 valve closed
11/29/2011	12:51:33 PM	PH3 valve closed
11/29/2011	12:51:33 PM	SiCl4 pre valve closed
11/29/2011	12:51:33 PM	SiCl4 post valve closed
11/29/2011	12:51:33 PM	Bypass valve closed
11/29/2011	12:51:33 PM	Bubbler valve closed
11/29/2011	12:51:33 PM	Main Vac valve opened
11/29/2011	12:51:33 PM	Helium MFC set to  0.000000
11/29/2011	12:51:33 PM	H2 MFC set to  0.000000
11/29/2011	12:51:33 PM	BCl3 MFC set to  0.000000
11/29/2011	12:51:33 PM	PHl3 MFC set to  0.000000
11/29/2011	12:51:33 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:51:33 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:51:33 PM	Tube furnace set to 150
11/29/2011	12:52:03 PM	H2 valve closed
11/29/2011	12:52:03 PM	BCl3 valve closed
11/29/2011	12:52:03 PM	PH3 valve closed
11/29/2011	12:52:03 PM	SiCl4 pre valve closed
11/29/2011	12:52:03 PM	SiCl4 post valve closed
11/29/2011	12:52:03 PM	Bypass valve closed
11/29/2011	12:52:03 PM	Bubbler valve closed
11/29/2011	12:52:03 PM	Helium valve opened
11/29/2011	12:52:03 PM	Main Vac valve opened
11/29/2011	12:52:03 PM	Helium MFC set to  20.000000
11/29/2011	12:52:03 PM	H2 MFC set to  0.000000
11/29/2011	12:52:03 PM	BCl3 MFC set to  0.000000
11/29/2011	12:52:03 PM	PHl3 MFC set to  0.000000
11/29/2011	12:52:03 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:52:03 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:52:03 PM	Tube furnace set to 150
11/29/2011	12:52:33 PM	Helium valve closed
11/29/2011	12:52:33 PM	H2 valve closed
11/29/2011	12:52:33 PM	BCl3 valve closed
11/29/2011	12:52:33 PM	PH3 valve closed
11/29/2011	12:52:33 PM	SiCl4 pre valve closed
11/29/2011	12:52:33 PM	SiCl4 post valve closed
11/29/2011	12:52:33 PM	Bypass valve closed
11/29/2011	12:52:33 PM	Bubbler valve closed
11/29/2011	12:52:33 PM	Main Vac valve opened
11/29/2011	12:52:33 PM	Helium MFC set to  0.000000
11/29/2011	12:52:33 PM	H2 MFC set to  0.000000
11/29/2011	12:52:33 PM	BCl3 MFC set to  0.000000
11/29/2011	12:52:33 PM	PHl3 MFC set to  0.000000
11/29/2011	12:52:33 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:52:33 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:52:33 PM	Tube furnace set to 150
11/29/2011	12:53:03 PM	H2 valve closed
11/29/2011	12:53:03 PM	BCl3 valve closed
11/29/2011	12:53:03 PM	PH3 valve closed
11/29/2011	12:53:03 PM	SiCl4 pre valve closed
11/29/2011	12:53:03 PM	SiCl4 post valve closed
11/29/2011	12:53:03 PM	Bypass valve closed
11/29/2011	12:53:03 PM	Bubbler valve closed
11/29/2011	12:53:03 PM	Helium valve opened
11/29/2011	12:53:03 PM	Main Vac valve opened
11/29/2011	12:53:03 PM	Helium MFC set to  20.000000
11/29/2011	12:53:03 PM	H2 MFC set to  0.000000
11/29/2011	12:53:03 PM	BCl3 MFC set to  0.000000
11/29/2011	12:53:03 PM	PHl3 MFC set to  0.000000
11/29/2011	12:53:03 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:53:03 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:53:04 PM	Tube furnace set to 150
11/29/2011	12:53:34 PM	Helium valve closed
11/29/2011	12:53:34 PM	H2 valve closed
11/29/2011	12:53:34 PM	BCl3 valve closed
11/29/2011	12:53:34 PM	PH3 valve closed
11/29/2011	12:53:34 PM	SiCl4 pre valve closed
11/29/2011	12:53:34 PM	SiCl4 post valve closed
11/29/2011	12:53:34 PM	Bypass valve closed
11/29/2011	12:53:34 PM	Bubbler valve closed
11/29/2011	12:53:34 PM	Main Vac valve opened
11/29/2011	12:53:34 PM	Helium MFC set to  0.000000
11/29/2011	12:53:34 PM	H2 MFC set to  0.000000
11/29/2011	12:53:34 PM	BCl3 MFC set to  0.000000
11/29/2011	12:53:34 PM	PHl3 MFC set to  0.000000
11/29/2011	12:53:34 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:53:34 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:53:34 PM	Tube furnace set to 150
11/29/2011	12:54:04 PM	H2 valve closed
11/29/2011	12:54:04 PM	BCl3 valve closed
11/29/2011	12:54:04 PM	PH3 valve closed
11/29/2011	12:54:04 PM	SiCl4 pre valve closed
11/29/2011	12:54:04 PM	SiCl4 post valve closed
11/29/2011	12:54:04 PM	Bypass valve closed
11/29/2011	12:54:04 PM	Bubbler valve closed
11/29/2011	12:54:04 PM	Helium valve opened
11/29/2011	12:54:04 PM	Main Vac valve opened
11/29/2011	12:54:04 PM	Helium MFC set to  20.000000
11/29/2011	12:54:04 PM	H2 MFC set to  0.000000
11/29/2011	12:54:04 PM	BCl3 MFC set to  0.000000
11/29/2011	12:54:04 PM	PHl3 MFC set to  0.000000
11/29/2011	12:54:04 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:54:04 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:54:04 PM	Tube furnace set to 150
11/29/2011	12:54:34 PM	Helium valve closed
11/29/2011	12:54:34 PM	H2 valve closed
11/29/2011	12:54:34 PM	BCl3 valve closed
11/29/2011	12:54:34 PM	PH3 valve closed
11/29/2011	12:54:34 PM	SiCl4 pre valve closed
11/29/2011	12:54:34 PM	SiCl4 post valve closed
11/29/2011	12:54:34 PM	Bypass valve closed
11/29/2011	12:54:34 PM	Bubbler valve closed
11/29/2011	12:54:34 PM	Main Vac valve opened
11/29/2011	12:54:34 PM	Helium MFC set to  0.000000
11/29/2011	12:54:34 PM	H2 MFC set to  0.000000
11/29/2011	12:54:34 PM	BCl3 MFC set to  0.000000
11/29/2011	12:54:34 PM	PHl3 MFC set to  0.000000
11/29/2011	12:54:34 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:54:34 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:54:34 PM	Tube furnace set to 150
11/29/2011	12:55:04 PM	H2 valve closed
11/29/2011	12:55:04 PM	BCl3 valve closed
11/29/2011	12:55:04 PM	PH3 valve closed
11/29/2011	12:55:04 PM	SiCl4 pre valve closed
11/29/2011	12:55:04 PM	SiCl4 post valve closed
11/29/2011	12:55:04 PM	Bypass valve closed
11/29/2011	12:55:04 PM	Bubbler valve closed
11/29/2011	12:55:04 PM	Helium valve opened
11/29/2011	12:55:04 PM	Main Vac valve opened
11/29/2011	12:55:04 PM	Helium MFC set to  20.000000
11/29/2011	12:55:04 PM	H2 MFC set to  0.000000
11/29/2011	12:55:04 PM	BCl3 MFC set to  0.000000
11/29/2011	12:55:04 PM	PHl3 MFC set to  0.000000
11/29/2011	12:55:04 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:55:04 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:55:04 PM	Tube furnace set to 150
11/29/2011	12:55:34 PM	Helium valve closed
11/29/2011	12:55:34 PM	H2 valve closed
11/29/2011	12:55:34 PM	BCl3 valve closed
11/29/2011	12:55:34 PM	PH3 valve closed
11/29/2011	12:55:34 PM	SiCl4 pre valve closed
11/29/2011	12:55:34 PM	SiCl4 post valve closed
11/29/2011	12:55:34 PM	Bypass valve closed
11/29/2011	12:55:34 PM	Bubbler valve closed
11/29/2011	12:55:34 PM	Main Vac valve opened
11/29/2011	12:55:34 PM	Helium MFC set to  0.000000
11/29/2011	12:55:34 PM	H2 MFC set to  0.000000
11/29/2011	12:55:34 PM	BCl3 MFC set to  0.000000
11/29/2011	12:55:34 PM	PHl3 MFC set to  0.000000
11/29/2011	12:55:34 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:55:34 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:55:35 PM	Tube furnace set to 150
11/29/2011	12:56:05 PM	H2 valve closed
11/29/2011	12:56:05 PM	BCl3 valve closed
11/29/2011	12:56:05 PM	PH3 valve closed
11/29/2011	12:56:05 PM	SiCl4 pre valve closed
11/29/2011	12:56:05 PM	SiCl4 post valve closed
11/29/2011	12:56:05 PM	Bypass valve closed
11/29/2011	12:56:05 PM	Bubbler valve closed
11/29/2011	12:56:05 PM	Helium valve opened
11/29/2011	12:56:05 PM	Main Vac valve opened
11/29/2011	12:56:05 PM	Helium MFC set to  20.000000
11/29/2011	12:56:05 PM	H2 MFC set to  0.000000
11/29/2011	12:56:05 PM	BCl3 MFC set to  0.000000
11/29/2011	12:56:05 PM	PHl3 MFC set to  0.000000
11/29/2011	12:56:05 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:56:05 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:56:05 PM	Tube furnace set to 150
11/29/2011	12:56:35 PM	Helium valve closed
11/29/2011	12:56:35 PM	H2 valve closed
11/29/2011	12:56:35 PM	BCl3 valve closed
11/29/2011	12:56:35 PM	PH3 valve closed
11/29/2011	12:56:35 PM	SiCl4 pre valve closed
11/29/2011	12:56:35 PM	SiCl4 post valve closed
11/29/2011	12:56:35 PM	Bypass valve closed
11/29/2011	12:56:35 PM	Bubbler valve closed
11/29/2011	12:56:35 PM	Main Vac valve opened
11/29/2011	12:56:35 PM	Helium MFC set to  0.000000
11/29/2011	12:56:35 PM	H2 MFC set to  0.000000
11/29/2011	12:56:35 PM	BCl3 MFC set to  0.000000
11/29/2011	12:56:35 PM	PHl3 MFC set to  0.000000
11/29/2011	12:56:35 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:56:35 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:56:35 PM	Tube furnace set to 150
11/29/2011	12:56:36 PM	Run finished at 12:56 PM
11/29/2011	12:57:21 PM	Recipe started at 12:57 PM
11/29/2011	12:57:21 PM	Helium valve closed
11/29/2011	12:57:21 PM	H2 valve closed
11/29/2011	12:57:21 PM	BCl3 valve closed
11/29/2011	12:57:21 PM	PH3 valve closed
11/29/2011	12:57:21 PM	SiCl4 pre valve closed
11/29/2011	12:57:21 PM	SiCl4 post valve closed
11/29/2011	12:57:21 PM	Bypass valve closed
11/29/2011	12:57:21 PM	Bubbler valve closed
11/29/2011	12:57:21 PM	Main Vac valve opened
11/29/2011	12:57:21 PM	Helium MFC set to  0.000000
11/29/2011	12:57:21 PM	H2 MFC set to  0.000000
11/29/2011	12:57:21 PM	BCl3 MFC set to  0.000000
11/29/2011	12:57:21 PM	PHl3 MFC set to  0.000000
11/29/2011	12:57:21 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:57:21 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:57:21 PM	Tube furnace set to 150
11/29/2011	12:57:51 PM	H2 valve closed
11/29/2011	12:57:51 PM	BCl3 valve closed
11/29/2011	12:57:51 PM	PH3 valve closed
11/29/2011	12:57:51 PM	SiCl4 pre valve closed
11/29/2011	12:57:51 PM	SiCl4 post valve closed
11/29/2011	12:57:51 PM	Bypass valve closed
11/29/2011	12:57:51 PM	Bubbler valve closed
11/29/2011	12:57:51 PM	Helium valve opened
11/29/2011	12:57:51 PM	Main Vac valve opened
11/29/2011	12:57:51 PM	Helium MFC set to  20.000000
11/29/2011	12:57:51 PM	H2 MFC set to  0.000000
11/29/2011	12:57:51 PM	BCl3 MFC set to  0.000000
11/29/2011	12:57:51 PM	PHl3 MFC set to  0.000000
11/29/2011	12:57:51 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:57:51 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:57:51 PM	Tube furnace set to 150
11/29/2011	12:58:21 PM	Helium valve closed
11/29/2011	12:58:21 PM	H2 valve closed
11/29/2011	12:58:21 PM	BCl3 valve closed
11/29/2011	12:58:21 PM	PH3 valve closed
11/29/2011	12:58:21 PM	SiCl4 pre valve closed
11/29/2011	12:58:21 PM	SiCl4 post valve closed
11/29/2011	12:58:21 PM	Bypass valve closed
11/29/2011	12:58:22 PM	Bubbler valve closed
11/29/2011	12:58:22 PM	Main Vac valve opened
11/29/2011	12:58:22 PM	Helium MFC set to  0.000000
11/29/2011	12:58:22 PM	H2 MFC set to  0.000000
11/29/2011	12:58:22 PM	BCl3 MFC set to  0.000000
11/29/2011	12:58:22 PM	PHl3 MFC set to  0.000000
11/29/2011	12:58:22 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:58:22 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:58:22 PM	Tube furnace set to 150
11/29/2011	12:58:52 PM	H2 valve closed
11/29/2011	12:58:52 PM	BCl3 valve closed
11/29/2011	12:58:52 PM	PH3 valve closed
11/29/2011	12:58:52 PM	SiCl4 pre valve closed
11/29/2011	12:58:52 PM	SiCl4 post valve closed
11/29/2011	12:58:52 PM	Bypass valve closed
11/29/2011	12:58:52 PM	Bubbler valve closed
11/29/2011	12:58:52 PM	Helium valve opened
11/29/2011	12:58:52 PM	Main Vac valve opened
11/29/2011	12:58:52 PM	Helium MFC set to  20.000000
11/29/2011	12:58:52 PM	H2 MFC set to  0.000000
11/29/2011	12:58:52 PM	BCl3 MFC set to  0.000000
11/29/2011	12:58:52 PM	PHl3 MFC set to  0.000000
11/29/2011	12:58:52 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:58:52 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:58:52 PM	Tube furnace set to 150
11/29/2011	12:59:22 PM	Helium valve closed
11/29/2011	12:59:22 PM	H2 valve closed
11/29/2011	12:59:22 PM	BCl3 valve closed
11/29/2011	12:59:22 PM	PH3 valve closed
11/29/2011	12:59:22 PM	SiCl4 pre valve closed
11/29/2011	12:59:22 PM	SiCl4 post valve closed
11/29/2011	12:59:22 PM	Bypass valve closed
11/29/2011	12:59:22 PM	Bubbler valve closed
11/29/2011	12:59:22 PM	Main Vac valve opened
11/29/2011	12:59:22 PM	Helium MFC set to  0.000000
11/29/2011	12:59:22 PM	H2 MFC set to  0.000000
11/29/2011	12:59:22 PM	BCl3 MFC set to  0.000000
11/29/2011	12:59:22 PM	PHl3 MFC set to  0.000000
11/29/2011	12:59:22 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:59:22 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:59:22 PM	Tube furnace set to 150
11/29/2011	12:59:52 PM	H2 valve closed
11/29/2011	12:59:52 PM	BCl3 valve closed
11/29/2011	12:59:52 PM	PH3 valve closed
11/29/2011	12:59:52 PM	SiCl4 pre valve closed
11/29/2011	12:59:52 PM	SiCl4 post valve closed
11/29/2011	12:59:52 PM	Bypass valve closed
11/29/2011	12:59:52 PM	Bubbler valve closed
11/29/2011	12:59:52 PM	Helium valve opened
11/29/2011	12:59:52 PM	Main Vac valve opened
11/29/2011	12:59:52 PM	Helium MFC set to  20.000000
11/29/2011	12:59:52 PM	H2 MFC set to  0.000000
11/29/2011	12:59:52 PM	BCl3 MFC set to  0.000000
11/29/2011	12:59:52 PM	PHl3 MFC set to  0.000000
11/29/2011	12:59:52 PM	SiCl4 MFC set to  0.000000
11/29/2011	12:59:52 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	12:59:52 PM	Tube furnace set to 150
11/29/2011	1:00:22 PM	Helium valve closed
11/29/2011	1:00:22 PM	H2 valve closed
11/29/2011	1:00:22 PM	BCl3 valve closed
11/29/2011	1:00:22 PM	PH3 valve closed
11/29/2011	1:00:22 PM	SiCl4 pre valve closed
11/29/2011	1:00:22 PM	SiCl4 post valve closed
11/29/2011	1:00:22 PM	Bypass valve closed
11/29/2011	1:00:22 PM	Bubbler valve closed
11/29/2011	1:00:22 PM	Main Vac valve opened
11/29/2011	1:00:22 PM	Helium MFC set to  0.000000
11/29/2011	1:00:22 PM	H2 MFC set to  0.000000
11/29/2011	1:00:22 PM	BCl3 MFC set to  0.000000
11/29/2011	1:00:22 PM	PHl3 MFC set to  0.000000
11/29/2011	1:00:22 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:00:22 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:00:22 PM	Tube furnace set to 150
11/29/2011	1:00:53 PM	H2 valve closed
11/29/2011	1:00:53 PM	BCl3 valve closed
11/29/2011	1:00:53 PM	PH3 valve closed
11/29/2011	1:00:53 PM	SiCl4 pre valve closed
11/29/2011	1:00:53 PM	SiCl4 post valve closed
11/29/2011	1:00:53 PM	Bypass valve closed
11/29/2011	1:00:53 PM	Bubbler valve closed
11/29/2011	1:00:53 PM	Helium valve opened
11/29/2011	1:00:53 PM	Main Vac valve opened
11/29/2011	1:00:53 PM	Helium MFC set to  20.000000
11/29/2011	1:00:53 PM	H2 MFC set to  0.000000
11/29/2011	1:00:53 PM	BCl3 MFC set to  0.000000
11/29/2011	1:00:53 PM	PHl3 MFC set to  0.000000
11/29/2011	1:00:53 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:00:53 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:00:53 PM	Tube furnace set to 150
11/29/2011	1:01:23 PM	Helium valve closed
11/29/2011	1:01:23 PM	H2 valve closed
11/29/2011	1:01:23 PM	BCl3 valve closed
11/29/2011	1:01:23 PM	PH3 valve closed
11/29/2011	1:01:23 PM	SiCl4 pre valve closed
11/29/2011	1:01:23 PM	SiCl4 post valve closed
11/29/2011	1:01:23 PM	Bypass valve closed
11/29/2011	1:01:23 PM	Bubbler valve closed
11/29/2011	1:01:23 PM	Main Vac valve opened
11/29/2011	1:01:23 PM	Helium MFC set to  0.000000
11/29/2011	1:01:23 PM	H2 MFC set to  0.000000
11/29/2011	1:01:23 PM	BCl3 MFC set to  0.000000
11/29/2011	1:01:23 PM	PHl3 MFC set to  0.000000
11/29/2011	1:01:23 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:01:23 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:01:23 PM	Tube furnace set to 150
11/29/2011	1:01:53 PM	H2 valve closed
11/29/2011	1:01:53 PM	BCl3 valve closed
11/29/2011	1:01:53 PM	PH3 valve closed
11/29/2011	1:01:53 PM	SiCl4 pre valve closed
11/29/2011	1:01:53 PM	SiCl4 post valve closed
11/29/2011	1:01:53 PM	Bypass valve closed
11/29/2011	1:01:53 PM	Bubbler valve closed
11/29/2011	1:01:53 PM	Helium valve opened
11/29/2011	1:01:53 PM	Main Vac valve opened
11/29/2011	1:01:53 PM	Helium MFC set to  20.000000
11/29/2011	1:01:53 PM	H2 MFC set to  0.000000
11/29/2011	1:01:53 PM	BCl3 MFC set to  0.000000
11/29/2011	1:01:53 PM	PHl3 MFC set to  0.000000
11/29/2011	1:01:53 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:01:53 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:01:53 PM	Tube furnace set to 150
11/29/2011	1:02:23 PM	Helium valve closed
11/29/2011	1:02:23 PM	H2 valve closed
11/29/2011	1:02:23 PM	BCl3 valve closed
11/29/2011	1:02:23 PM	PH3 valve closed
11/29/2011	1:02:23 PM	SiCl4 pre valve closed
11/29/2011	1:02:23 PM	SiCl4 post valve closed
11/29/2011	1:02:23 PM	Bypass valve closed
11/29/2011	1:02:23 PM	Bubbler valve closed
11/29/2011	1:02:23 PM	Main Vac valve opened
11/29/2011	1:02:23 PM	Helium MFC set to  0.000000
11/29/2011	1:02:23 PM	H2 MFC set to  0.000000
11/29/2011	1:02:23 PM	BCl3 MFC set to  0.000000
11/29/2011	1:02:23 PM	PHl3 MFC set to  0.000000
11/29/2011	1:02:23 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:02:23 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:02:23 PM	Tube furnace set to 150
11/29/2011	1:02:53 PM	H2 valve closed
11/29/2011	1:02:53 PM	BCl3 valve closed
11/29/2011	1:02:53 PM	PH3 valve closed
11/29/2011	1:02:53 PM	SiCl4 pre valve closed
11/29/2011	1:02:53 PM	SiCl4 post valve closed
11/29/2011	1:02:53 PM	Bypass valve closed
11/29/2011	1:02:53 PM	Bubbler valve closed
11/29/2011	1:02:53 PM	Helium valve opened
11/29/2011	1:02:53 PM	Main Vac valve opened
11/29/2011	1:02:53 PM	Helium MFC set to  20.000000
11/29/2011	1:02:53 PM	H2 MFC set to  0.000000
11/29/2011	1:02:53 PM	BCl3 MFC set to  0.000000
11/29/2011	1:02:53 PM	PHl3 MFC set to  0.000000
11/29/2011	1:02:53 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:02:53 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:02:54 PM	Tube furnace set to 150
11/29/2011	1:03:24 PM	Helium valve closed
11/29/2011	1:03:24 PM	H2 valve closed
11/29/2011	1:03:24 PM	BCl3 valve closed
11/29/2011	1:03:24 PM	PH3 valve closed
11/29/2011	1:03:24 PM	SiCl4 pre valve closed
11/29/2011	1:03:24 PM	SiCl4 post valve closed
11/29/2011	1:03:24 PM	Bypass valve closed
11/29/2011	1:03:24 PM	Bubbler valve closed
11/29/2011	1:03:24 PM	Main Vac valve opened
11/29/2011	1:03:24 PM	Helium MFC set to  0.000000
11/29/2011	1:03:24 PM	H2 MFC set to  0.000000
11/29/2011	1:03:24 PM	BCl3 MFC set to  0.000000
11/29/2011	1:03:24 PM	PHl3 MFC set to  0.000000
11/29/2011	1:03:24 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:03:24 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:03:24 PM	Tube furnace set to 150
11/29/2011	1:03:54 PM	H2 valve closed
11/29/2011	1:03:54 PM	BCl3 valve closed
11/29/2011	1:03:54 PM	PH3 valve closed
11/29/2011	1:03:54 PM	SiCl4 pre valve closed
11/29/2011	1:03:54 PM	SiCl4 post valve closed
11/29/2011	1:03:54 PM	Bypass valve closed
11/29/2011	1:03:54 PM	Bubbler valve closed
11/29/2011	1:03:54 PM	Helium valve opened
11/29/2011	1:03:54 PM	Main Vac valve opened
11/29/2011	1:03:54 PM	Helium MFC set to  20.000000
11/29/2011	1:03:54 PM	H2 MFC set to  0.000000
11/29/2011	1:03:54 PM	BCl3 MFC set to  0.000000
11/29/2011	1:03:54 PM	PHl3 MFC set to  0.000000
11/29/2011	1:03:54 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:03:54 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:03:54 PM	Tube furnace set to 150
11/29/2011	1:04:24 PM	Helium valve closed
11/29/2011	1:04:24 PM	H2 valve closed
11/29/2011	1:04:24 PM	BCl3 valve closed
11/29/2011	1:04:24 PM	PH3 valve closed
11/29/2011	1:04:24 PM	SiCl4 pre valve closed
11/29/2011	1:04:24 PM	SiCl4 post valve closed
11/29/2011	1:04:24 PM	Bypass valve closed
11/29/2011	1:04:24 PM	Bubbler valve closed
11/29/2011	1:04:24 PM	Main Vac valve opened
11/29/2011	1:04:24 PM	Helium MFC set to  0.000000
11/29/2011	1:04:24 PM	H2 MFC set to  0.000000
11/29/2011	1:04:24 PM	BCl3 MFC set to  0.000000
11/29/2011	1:04:24 PM	PHl3 MFC set to  0.000000
11/29/2011	1:04:24 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:04:24 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:04:24 PM	Tube furnace set to 150
11/29/2011	1:04:54 PM	H2 valve closed
11/29/2011	1:04:54 PM	BCl3 valve closed
11/29/2011	1:04:54 PM	PH3 valve closed
11/29/2011	1:04:54 PM	SiCl4 pre valve closed
11/29/2011	1:04:54 PM	SiCl4 post valve closed
11/29/2011	1:04:54 PM	Bypass valve closed
11/29/2011	1:04:54 PM	Bubbler valve closed
11/29/2011	1:04:54 PM	Helium valve opened
11/29/2011	1:04:54 PM	Main Vac valve opened
11/29/2011	1:04:54 PM	Helium MFC set to  20.000000
11/29/2011	1:04:54 PM	H2 MFC set to  0.000000
11/29/2011	1:04:54 PM	BCl3 MFC set to  0.000000
11/29/2011	1:04:54 PM	PHl3 MFC set to  0.000000
11/29/2011	1:04:54 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:04:54 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:04:54 PM	Tube furnace set to 150
11/29/2011	1:05:24 PM	Helium valve closed
11/29/2011	1:05:24 PM	H2 valve closed
11/29/2011	1:05:24 PM	BCl3 valve closed
11/29/2011	1:05:24 PM	PH3 valve closed
11/29/2011	1:05:24 PM	SiCl4 pre valve closed
11/29/2011	1:05:24 PM	SiCl4 post valve closed
11/29/2011	1:05:24 PM	Bypass valve closed
11/29/2011	1:05:24 PM	Bubbler valve closed
11/29/2011	1:05:24 PM	Main Vac valve opened
11/29/2011	1:05:24 PM	Helium MFC set to  0.000000
11/29/2011	1:05:24 PM	H2 MFC set to  0.000000
11/29/2011	1:05:24 PM	BCl3 MFC set to  0.000000
11/29/2011	1:05:24 PM	PHl3 MFC set to  0.000000
11/29/2011	1:05:24 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:05:24 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:05:25 PM	Tube furnace set to 150
11/29/2011	1:05:55 PM	H2 valve closed
11/29/2011	1:05:55 PM	BCl3 valve closed
11/29/2011	1:05:55 PM	PH3 valve closed
11/29/2011	1:05:55 PM	SiCl4 pre valve closed
11/29/2011	1:05:55 PM	SiCl4 post valve closed
11/29/2011	1:05:55 PM	Bypass valve closed
11/29/2011	1:05:55 PM	Bubbler valve closed
11/29/2011	1:05:55 PM	Helium valve opened
11/29/2011	1:05:55 PM	Main Vac valve opened
11/29/2011	1:05:55 PM	Helium MFC set to  20.000000
11/29/2011	1:05:55 PM	H2 MFC set to  0.000000
11/29/2011	1:05:55 PM	BCl3 MFC set to  0.000000
11/29/2011	1:05:55 PM	PHl3 MFC set to  0.000000
11/29/2011	1:05:55 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:05:55 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:05:55 PM	Tube furnace set to 150
11/29/2011	1:06:25 PM	Helium valve closed
11/29/2011	1:06:25 PM	H2 valve closed
11/29/2011	1:06:25 PM	BCl3 valve closed
11/29/2011	1:06:25 PM	PH3 valve closed
11/29/2011	1:06:25 PM	SiCl4 pre valve closed
11/29/2011	1:06:25 PM	SiCl4 post valve closed
11/29/2011	1:06:25 PM	Bypass valve closed
11/29/2011	1:06:25 PM	Bubbler valve closed
11/29/2011	1:06:25 PM	Main Vac valve opened
11/29/2011	1:06:25 PM	Helium MFC set to  0.000000
11/29/2011	1:06:25 PM	H2 MFC set to  0.000000
11/29/2011	1:06:25 PM	BCl3 MFC set to  0.000000
11/29/2011	1:06:25 PM	PHl3 MFC set to  0.000000
11/29/2011	1:06:25 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:06:25 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:06:25 PM	Tube furnace set to 150
11/29/2011	1:06:55 PM	H2 valve closed
11/29/2011	1:06:55 PM	BCl3 valve closed
11/29/2011	1:06:55 PM	PH3 valve closed
11/29/2011	1:06:55 PM	SiCl4 pre valve closed
11/29/2011	1:06:55 PM	SiCl4 post valve closed
11/29/2011	1:06:55 PM	Bypass valve closed
11/29/2011	1:06:55 PM	Bubbler valve closed
11/29/2011	1:06:55 PM	Helium valve opened
11/29/2011	1:06:55 PM	Main Vac valve opened
11/29/2011	1:06:55 PM	Helium MFC set to  20.000000
11/29/2011	1:06:55 PM	H2 MFC set to  0.000000
11/29/2011	1:06:55 PM	BCl3 MFC set to  0.000000
11/29/2011	1:06:55 PM	PHl3 MFC set to  0.000000
11/29/2011	1:06:55 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:06:55 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:06:55 PM	Tube furnace set to 150
11/29/2011	1:07:25 PM	Helium valve closed
11/29/2011	1:07:25 PM	H2 valve closed
11/29/2011	1:07:25 PM	BCl3 valve closed
11/29/2011	1:07:25 PM	PH3 valve closed
11/29/2011	1:07:25 PM	SiCl4 pre valve closed
11/29/2011	1:07:25 PM	SiCl4 post valve closed
11/29/2011	1:07:25 PM	Bypass valve closed
11/29/2011	1:07:25 PM	Bubbler valve closed
11/29/2011	1:07:25 PM	Main Vac valve opened
11/29/2011	1:07:25 PM	Helium MFC set to  0.000000
11/29/2011	1:07:25 PM	H2 MFC set to  0.000000
11/29/2011	1:07:25 PM	BCl3 MFC set to  0.000000
11/29/2011	1:07:25 PM	PHl3 MFC set to  0.000000
11/29/2011	1:07:25 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:07:25 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:07:25 PM	Tube furnace set to 150
11/29/2011	1:07:26 PM	Run finished at 1:07 PM
11/29/2011	1:08:05 PM	Recipe started at 1:08 PM
11/29/2011	1:08:05 PM	Helium valve closed
11/29/2011	1:08:05 PM	H2 valve closed
11/29/2011	1:08:05 PM	BCl3 valve closed
11/29/2011	1:08:05 PM	PH3 valve closed
11/29/2011	1:08:05 PM	SiCl4 pre valve closed
11/29/2011	1:08:05 PM	SiCl4 post valve closed
11/29/2011	1:08:05 PM	Bypass valve closed
11/29/2011	1:08:05 PM	Bubbler valve closed
11/29/2011	1:08:05 PM	Main Vac valve opened
11/29/2011	1:08:05 PM	Helium MFC set to  0.000000
11/29/2011	1:08:05 PM	H2 MFC set to  0.000000
11/29/2011	1:08:05 PM	BCl3 MFC set to  0.000000
11/29/2011	1:08:05 PM	PHl3 MFC set to  0.000000
11/29/2011	1:08:05 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:08:05 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:08:05 PM	Tube furnace set to 150
11/29/2011	1:08:29 PM	H2 valve closed
11/29/2011	1:08:29 PM	BCl3 valve closed
11/29/2011	1:08:29 PM	PH3 valve closed
11/29/2011	1:08:29 PM	SiCl4 pre valve closed
11/29/2011	1:08:29 PM	SiCl4 post valve closed
11/29/2011	1:08:29 PM	Bypass valve closed
11/29/2011	1:08:29 PM	Bubbler valve closed
11/29/2011	1:08:29 PM	Helium valve opened
11/29/2011	1:08:29 PM	Main Vac valve opened
11/29/2011	1:08:29 PM	Helium MFC set to  20.000000
11/29/2011	1:08:29 PM	H2 MFC set to  0.000000
11/29/2011	1:08:29 PM	BCl3 MFC set to  0.000000
11/29/2011	1:08:29 PM	PHl3 MFC set to  0.000000
11/29/2011	1:08:29 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:08:29 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:08:29 PM	Tube furnace set to 150
11/29/2011	1:08:59 PM	Helium valve closed
11/29/2011	1:08:59 PM	H2 valve closed
11/29/2011	1:08:59 PM	BCl3 valve closed
11/29/2011	1:08:59 PM	PH3 valve closed
11/29/2011	1:08:59 PM	SiCl4 pre valve closed
11/29/2011	1:08:59 PM	SiCl4 post valve closed
11/29/2011	1:08:59 PM	Bypass valve closed
11/29/2011	1:08:59 PM	Bubbler valve closed
11/29/2011	1:08:59 PM	Main Vac valve opened
11/29/2011	1:08:59 PM	Helium MFC set to  0.000000
11/29/2011	1:08:59 PM	H2 MFC set to  0.000000
11/29/2011	1:08:59 PM	BCl3 MFC set to  0.000000
11/29/2011	1:08:59 PM	PHl3 MFC set to  0.000000
11/29/2011	1:08:59 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:08:59 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:08:59 PM	Tube furnace set to 150
11/29/2011	1:09:29 PM	H2 valve closed
11/29/2011	1:09:29 PM	BCl3 valve closed
11/29/2011	1:09:29 PM	PH3 valve closed
11/29/2011	1:09:29 PM	SiCl4 pre valve closed
11/29/2011	1:09:29 PM	SiCl4 post valve closed
11/29/2011	1:09:29 PM	Bypass valve closed
11/29/2011	1:09:29 PM	Bubbler valve closed
11/29/2011	1:09:29 PM	Helium valve opened
11/29/2011	1:09:29 PM	Main Vac valve opened
11/29/2011	1:09:29 PM	Helium MFC set to  20.000000
11/29/2011	1:09:29 PM	H2 MFC set to  0.000000
11/29/2011	1:09:29 PM	BCl3 MFC set to  0.000000
11/29/2011	1:09:29 PM	PHl3 MFC set to  0.000000
11/29/2011	1:09:29 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:09:29 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:09:29 PM	Tube furnace set to 150
11/29/2011	1:09:59 PM	Helium valve closed
11/29/2011	1:09:59 PM	H2 valve closed
11/29/2011	1:09:59 PM	BCl3 valve closed
11/29/2011	1:09:59 PM	PH3 valve closed
11/29/2011	1:09:59 PM	SiCl4 pre valve closed
11/29/2011	1:09:59 PM	SiCl4 post valve closed
11/29/2011	1:09:59 PM	Bypass valve closed
11/29/2011	1:09:59 PM	Bubbler valve closed
11/29/2011	1:09:59 PM	Main Vac valve opened
11/29/2011	1:09:59 PM	Helium MFC set to  0.000000
11/29/2011	1:09:59 PM	H2 MFC set to  0.000000
11/29/2011	1:09:59 PM	BCl3 MFC set to  0.000000
11/29/2011	1:09:59 PM	PHl3 MFC set to  0.000000
11/29/2011	1:09:59 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:09:59 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:09:59 PM	Tube furnace set to 150
11/29/2011	1:10:29 PM	H2 valve closed
11/29/2011	1:10:29 PM	BCl3 valve closed
11/29/2011	1:10:29 PM	PH3 valve closed
11/29/2011	1:10:29 PM	SiCl4 pre valve closed
11/29/2011	1:10:29 PM	SiCl4 post valve closed
11/29/2011	1:10:29 PM	Bypass valve closed
11/29/2011	1:10:29 PM	Bubbler valve closed
11/29/2011	1:10:29 PM	Helium valve opened
11/29/2011	1:10:29 PM	Main Vac valve opened
11/29/2011	1:10:29 PM	Helium MFC set to  20.000000
11/29/2011	1:10:29 PM	H2 MFC set to  0.000000
11/29/2011	1:10:29 PM	BCl3 MFC set to  0.000000
11/29/2011	1:10:29 PM	PHl3 MFC set to  0.000000
11/29/2011	1:10:29 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:10:29 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:10:30 PM	Tube furnace set to 150
11/29/2011	1:11:00 PM	Helium valve closed
11/29/2011	1:11:00 PM	H2 valve closed
11/29/2011	1:11:00 PM	BCl3 valve closed
11/29/2011	1:11:00 PM	PH3 valve closed
11/29/2011	1:11:00 PM	SiCl4 pre valve closed
11/29/2011	1:11:00 PM	SiCl4 post valve closed
11/29/2011	1:11:00 PM	Bypass valve closed
11/29/2011	1:11:00 PM	Bubbler valve closed
11/29/2011	1:11:00 PM	Main Vac valve opened
11/29/2011	1:11:00 PM	Helium MFC set to  0.000000
11/29/2011	1:11:00 PM	H2 MFC set to  0.000000
11/29/2011	1:11:00 PM	BCl3 MFC set to  0.000000
11/29/2011	1:11:00 PM	PHl3 MFC set to  0.000000
11/29/2011	1:11:00 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:11:00 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:11:00 PM	Tube furnace set to 150
11/29/2011	1:11:30 PM	H2 valve closed
11/29/2011	1:11:30 PM	BCl3 valve closed
11/29/2011	1:11:30 PM	PH3 valve closed
11/29/2011	1:11:30 PM	SiCl4 pre valve closed
11/29/2011	1:11:30 PM	SiCl4 post valve closed
11/29/2011	1:11:30 PM	Bypass valve closed
11/29/2011	1:11:30 PM	Bubbler valve closed
11/29/2011	1:11:30 PM	Helium valve opened
11/29/2011	1:11:30 PM	Main Vac valve opened
11/29/2011	1:11:30 PM	Helium MFC set to  20.000000
11/29/2011	1:11:30 PM	H2 MFC set to  0.000000
11/29/2011	1:11:30 PM	BCl3 MFC set to  0.000000
11/29/2011	1:11:30 PM	PHl3 MFC set to  0.000000
11/29/2011	1:11:30 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:11:30 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:11:30 PM	Tube furnace set to 150
11/29/2011	1:12:00 PM	Helium valve closed
11/29/2011	1:12:00 PM	H2 valve closed
11/29/2011	1:12:00 PM	BCl3 valve closed
11/29/2011	1:12:00 PM	PH3 valve closed
11/29/2011	1:12:00 PM	SiCl4 pre valve closed
11/29/2011	1:12:00 PM	SiCl4 post valve closed
11/29/2011	1:12:00 PM	Bypass valve closed
11/29/2011	1:12:00 PM	Bubbler valve closed
11/29/2011	1:12:00 PM	Main Vac valve opened
11/29/2011	1:12:00 PM	Helium MFC set to  0.000000
11/29/2011	1:12:00 PM	H2 MFC set to  0.000000
11/29/2011	1:12:00 PM	BCl3 MFC set to  0.000000
11/29/2011	1:12:00 PM	PHl3 MFC set to  0.000000
11/29/2011	1:12:00 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:12:00 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:12:00 PM	Tube furnace set to 150
11/29/2011	1:12:30 PM	H2 valve closed
11/29/2011	1:12:30 PM	BCl3 valve closed
11/29/2011	1:12:30 PM	PH3 valve closed
11/29/2011	1:12:30 PM	SiCl4 pre valve closed
11/29/2011	1:12:30 PM	SiCl4 post valve closed
11/29/2011	1:12:30 PM	Bypass valve closed
11/29/2011	1:12:30 PM	Bubbler valve closed
11/29/2011	1:12:30 PM	Helium valve opened
11/29/2011	1:12:30 PM	Main Vac valve opened
11/29/2011	1:12:30 PM	Helium MFC set to  20.000000
11/29/2011	1:12:30 PM	H2 MFC set to  0.000000
11/29/2011	1:12:30 PM	BCl3 MFC set to  0.000000
11/29/2011	1:12:30 PM	PHl3 MFC set to  0.000000
11/29/2011	1:12:30 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:12:30 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:12:30 PM	Tube furnace set to 150
11/29/2011	1:13:00 PM	Helium valve closed
11/29/2011	1:13:00 PM	H2 valve closed
11/29/2011	1:13:00 PM	BCl3 valve closed
11/29/2011	1:13:00 PM	PH3 valve closed
11/29/2011	1:13:00 PM	SiCl4 pre valve closed
11/29/2011	1:13:00 PM	SiCl4 post valve closed
11/29/2011	1:13:00 PM	Bypass valve closed
11/29/2011	1:13:00 PM	Bubbler valve closed
11/29/2011	1:13:00 PM	Main Vac valve opened
11/29/2011	1:13:00 PM	Helium MFC set to  0.000000
11/29/2011	1:13:00 PM	H2 MFC set to  0.000000
11/29/2011	1:13:00 PM	BCl3 MFC set to  0.000000
11/29/2011	1:13:00 PM	PHl3 MFC set to  0.000000
11/29/2011	1:13:00 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:13:00 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:13:01 PM	Tube furnace set to 150
11/29/2011	1:13:31 PM	H2 valve closed
11/29/2011	1:13:31 PM	BCl3 valve closed
11/29/2011	1:13:31 PM	PH3 valve closed
11/29/2011	1:13:31 PM	SiCl4 pre valve closed
11/29/2011	1:13:31 PM	SiCl4 post valve closed
11/29/2011	1:13:31 PM	Bypass valve closed
11/29/2011	1:13:31 PM	Bubbler valve closed
11/29/2011	1:13:31 PM	Helium valve opened
11/29/2011	1:13:31 PM	Main Vac valve opened
11/29/2011	1:13:31 PM	Helium MFC set to  20.000000
11/29/2011	1:13:31 PM	H2 MFC set to  0.000000
11/29/2011	1:13:31 PM	BCl3 MFC set to  0.000000
11/29/2011	1:13:31 PM	PHl3 MFC set to  0.000000
11/29/2011	1:13:31 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:13:31 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:13:31 PM	Tube furnace set to 150
11/29/2011	1:14:01 PM	Helium valve closed
11/29/2011	1:14:01 PM	H2 valve closed
11/29/2011	1:14:01 PM	BCl3 valve closed
11/29/2011	1:14:01 PM	PH3 valve closed
11/29/2011	1:14:01 PM	SiCl4 pre valve closed
11/29/2011	1:14:01 PM	SiCl4 post valve closed
11/29/2011	1:14:01 PM	Bypass valve closed
11/29/2011	1:14:01 PM	Bubbler valve closed
11/29/2011	1:14:01 PM	Main Vac valve opened
11/29/2011	1:14:01 PM	Helium MFC set to  0.000000
11/29/2011	1:14:01 PM	H2 MFC set to  0.000000
11/29/2011	1:14:01 PM	BCl3 MFC set to  0.000000
11/29/2011	1:14:01 PM	PHl3 MFC set to  0.000000
11/29/2011	1:14:01 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:14:01 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:14:01 PM	Tube furnace set to 150
11/29/2011	1:14:31 PM	H2 valve closed
11/29/2011	1:14:31 PM	BCl3 valve closed
11/29/2011	1:14:31 PM	PH3 valve closed
11/29/2011	1:14:31 PM	SiCl4 pre valve closed
11/29/2011	1:14:31 PM	SiCl4 post valve closed
11/29/2011	1:14:31 PM	Bypass valve closed
11/29/2011	1:14:31 PM	Bubbler valve closed
11/29/2011	1:14:31 PM	Helium valve opened
11/29/2011	1:14:31 PM	Main Vac valve opened
11/29/2011	1:14:31 PM	Helium MFC set to  20.000000
11/29/2011	1:14:31 PM	H2 MFC set to  0.000000
11/29/2011	1:14:31 PM	BCl3 MFC set to  0.000000
11/29/2011	1:14:31 PM	PHl3 MFC set to  0.000000
11/29/2011	1:14:31 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:14:31 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:14:31 PM	Tube furnace set to 150
11/29/2011	1:15:01 PM	Helium valve closed
11/29/2011	1:15:01 PM	H2 valve closed
11/29/2011	1:15:01 PM	BCl3 valve closed
11/29/2011	1:15:01 PM	PH3 valve closed
11/29/2011	1:15:01 PM	SiCl4 pre valve closed
11/29/2011	1:15:01 PM	SiCl4 post valve closed
11/29/2011	1:15:01 PM	Bypass valve closed
11/29/2011	1:15:01 PM	Bubbler valve closed
11/29/2011	1:15:01 PM	Main Vac valve opened
11/29/2011	1:15:01 PM	Helium MFC set to  0.000000
11/29/2011	1:15:01 PM	H2 MFC set to  0.000000
11/29/2011	1:15:01 PM	BCl3 MFC set to  0.000000
11/29/2011	1:15:01 PM	PHl3 MFC set to  0.000000
11/29/2011	1:15:01 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:15:01 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:15:02 PM	Tube furnace set to 150
11/29/2011	1:15:32 PM	H2 valve closed
11/29/2011	1:15:32 PM	BCl3 valve closed
11/29/2011	1:15:32 PM	PH3 valve closed
11/29/2011	1:15:32 PM	SiCl4 pre valve closed
11/29/2011	1:15:32 PM	SiCl4 post valve closed
11/29/2011	1:15:32 PM	Bypass valve closed
11/29/2011	1:15:32 PM	Bubbler valve closed
11/29/2011	1:15:32 PM	Helium valve opened
11/29/2011	1:15:32 PM	Main Vac valve opened
11/29/2011	1:15:32 PM	Helium MFC set to  20.000000
11/29/2011	1:15:32 PM	H2 MFC set to  0.000000
11/29/2011	1:15:32 PM	BCl3 MFC set to  0.000000
11/29/2011	1:15:32 PM	PHl3 MFC set to  0.000000
11/29/2011	1:15:32 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:15:32 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:15:32 PM	Tube furnace set to 150
11/29/2011	1:16:02 PM	Helium valve closed
11/29/2011	1:16:02 PM	H2 valve closed
11/29/2011	1:16:02 PM	BCl3 valve closed
11/29/2011	1:16:02 PM	PH3 valve closed
11/29/2011	1:16:02 PM	SiCl4 pre valve closed
11/29/2011	1:16:02 PM	SiCl4 post valve closed
11/29/2011	1:16:02 PM	Bypass valve closed
11/29/2011	1:16:02 PM	Bubbler valve closed
11/29/2011	1:16:02 PM	Main Vac valve opened
11/29/2011	1:16:02 PM	Helium MFC set to  0.000000
11/29/2011	1:16:02 PM	H2 MFC set to  0.000000
11/29/2011	1:16:02 PM	BCl3 MFC set to  0.000000
11/29/2011	1:16:02 PM	PHl3 MFC set to  0.000000
11/29/2011	1:16:02 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:16:02 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:16:02 PM	Tube furnace set to 150
11/29/2011	1:16:32 PM	H2 valve closed
11/29/2011	1:16:32 PM	BCl3 valve closed
11/29/2011	1:16:32 PM	PH3 valve closed
11/29/2011	1:16:32 PM	SiCl4 pre valve closed
11/29/2011	1:16:32 PM	SiCl4 post valve closed
11/29/2011	1:16:32 PM	Bypass valve closed
11/29/2011	1:16:32 PM	Bubbler valve closed
11/29/2011	1:16:32 PM	Helium valve opened
11/29/2011	1:16:32 PM	Main Vac valve opened
11/29/2011	1:16:32 PM	Helium MFC set to  20.000000
11/29/2011	1:16:32 PM	H2 MFC set to  0.000000
11/29/2011	1:16:32 PM	BCl3 MFC set to  0.000000
11/29/2011	1:16:32 PM	PHl3 MFC set to  0.000000
11/29/2011	1:16:32 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:16:32 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:16:32 PM	Tube furnace set to 150
11/29/2011	1:17:02 PM	Helium valve closed
11/29/2011	1:17:02 PM	H2 valve closed
11/29/2011	1:17:02 PM	BCl3 valve closed
11/29/2011	1:17:02 PM	PH3 valve closed
11/29/2011	1:17:02 PM	SiCl4 pre valve closed
11/29/2011	1:17:02 PM	SiCl4 post valve closed
11/29/2011	1:17:02 PM	Bypass valve closed
11/29/2011	1:17:02 PM	Bubbler valve closed
11/29/2011	1:17:02 PM	Main Vac valve opened
11/29/2011	1:17:02 PM	Helium MFC set to  0.000000
11/29/2011	1:17:02 PM	H2 MFC set to  0.000000
11/29/2011	1:17:02 PM	BCl3 MFC set to  0.000000
11/29/2011	1:17:02 PM	PHl3 MFC set to  0.000000
11/29/2011	1:17:02 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:17:02 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:17:02 PM	Tube furnace set to 150
11/29/2011	1:17:32 PM	H2 valve closed
11/29/2011	1:17:32 PM	BCl3 valve closed
11/29/2011	1:17:32 PM	PH3 valve closed
11/29/2011	1:17:32 PM	SiCl4 pre valve closed
11/29/2011	1:17:32 PM	SiCl4 post valve closed
11/29/2011	1:17:32 PM	Bypass valve closed
11/29/2011	1:17:32 PM	Bubbler valve closed
11/29/2011	1:17:32 PM	Helium valve opened
11/29/2011	1:17:32 PM	Main Vac valve opened
11/29/2011	1:17:32 PM	Helium MFC set to  20.000000
11/29/2011	1:17:32 PM	H2 MFC set to  0.000000
11/29/2011	1:17:32 PM	BCl3 MFC set to  0.000000
11/29/2011	1:17:32 PM	PHl3 MFC set to  0.000000
11/29/2011	1:17:32 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:17:32 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:17:33 PM	Tube furnace set to 150
11/29/2011	1:18:03 PM	Helium valve closed
11/29/2011	1:18:03 PM	H2 valve closed
11/29/2011	1:18:03 PM	BCl3 valve closed
11/29/2011	1:18:03 PM	PH3 valve closed
11/29/2011	1:18:03 PM	SiCl4 pre valve closed
11/29/2011	1:18:03 PM	SiCl4 post valve closed
11/29/2011	1:18:03 PM	Bypass valve closed
11/29/2011	1:18:03 PM	Bubbler valve closed
11/29/2011	1:18:03 PM	Main Vac valve opened
11/29/2011	1:18:03 PM	Helium MFC set to  0.000000
11/29/2011	1:18:03 PM	H2 MFC set to  0.000000
11/29/2011	1:18:03 PM	BCl3 MFC set to  0.000000
11/29/2011	1:18:03 PM	PHl3 MFC set to  0.000000
11/29/2011	1:18:03 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:18:03 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:18:03 PM	Tube furnace set to 150
11/29/2011	1:18:04 PM	Run finished at 1:18 PM
11/29/2011	1:19:46 PM	Recipe started at 1:19 PM
11/29/2011	1:19:46 PM	Helium valve closed
11/29/2011	1:19:46 PM	H2 valve closed
11/29/2011	1:19:46 PM	BCl3 valve closed
11/29/2011	1:19:46 PM	PH3 valve closed
11/29/2011	1:19:46 PM	SiCl4 pre valve closed
11/29/2011	1:19:46 PM	SiCl4 post valve closed
11/29/2011	1:19:46 PM	Bypass valve closed
11/29/2011	1:19:46 PM	Bubbler valve closed
11/29/2011	1:19:46 PM	Main Vac valve opened
11/29/2011	1:19:46 PM	Helium MFC set to  0.000000
11/29/2011	1:19:46 PM	H2 MFC set to  0.000000
11/29/2011	1:19:46 PM	BCl3 MFC set to  0.000000
11/29/2011	1:19:46 PM	PHl3 MFC set to  0.000000
11/29/2011	1:19:46 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:19:46 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:19:46 PM	Tube furnace set to 150
11/29/2011	1:19:48 PM	H2 valve closed
11/29/2011	1:19:48 PM	BCl3 valve closed
11/29/2011	1:19:48 PM	PH3 valve closed
11/29/2011	1:19:48 PM	SiCl4 pre valve closed
11/29/2011	1:19:48 PM	SiCl4 post valve closed
11/29/2011	1:19:48 PM	Bypass valve closed
11/29/2011	1:19:48 PM	Bubbler valve closed
11/29/2011	1:19:48 PM	Helium valve opened
11/29/2011	1:19:48 PM	Main Vac valve opened
11/29/2011	1:19:48 PM	Helium MFC set to  20.000000
11/29/2011	1:19:48 PM	H2 MFC set to  0.000000
11/29/2011	1:19:48 PM	BCl3 MFC set to  0.000000
11/29/2011	1:19:48 PM	PHl3 MFC set to  0.000000
11/29/2011	1:19:48 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:19:48 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:19:48 PM	Tube furnace set to 150
11/29/2011	1:20:18 PM	Helium valve closed
11/29/2011	1:20:18 PM	H2 valve closed
11/29/2011	1:20:18 PM	BCl3 valve closed
11/29/2011	1:20:18 PM	PH3 valve closed
11/29/2011	1:20:18 PM	SiCl4 pre valve closed
11/29/2011	1:20:18 PM	SiCl4 post valve closed
11/29/2011	1:20:18 PM	Bypass valve closed
11/29/2011	1:20:18 PM	Bubbler valve closed
11/29/2011	1:20:18 PM	Main Vac valve opened
11/29/2011	1:20:18 PM	Helium MFC set to  0.000000
11/29/2011	1:20:18 PM	H2 MFC set to  0.000000
11/29/2011	1:20:18 PM	BCl3 MFC set to  0.000000
11/29/2011	1:20:18 PM	PHl3 MFC set to  0.000000
11/29/2011	1:20:18 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:20:18 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:20:18 PM	Tube furnace set to 150
11/29/2011	1:20:48 PM	H2 valve closed
11/29/2011	1:20:48 PM	BCl3 valve closed
11/29/2011	1:20:48 PM	PH3 valve closed
11/29/2011	1:20:48 PM	SiCl4 pre valve closed
11/29/2011	1:20:48 PM	SiCl4 post valve closed
11/29/2011	1:20:48 PM	Bypass valve closed
11/29/2011	1:20:48 PM	Bubbler valve closed
11/29/2011	1:20:48 PM	Helium valve opened
11/29/2011	1:20:48 PM	Main Vac valve opened
11/29/2011	1:20:48 PM	Helium MFC set to  20.000000
11/29/2011	1:20:48 PM	H2 MFC set to  0.000000
11/29/2011	1:20:48 PM	BCl3 MFC set to  0.000000
11/29/2011	1:20:48 PM	PHl3 MFC set to  0.000000
11/29/2011	1:20:48 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:20:48 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:20:48 PM	Tube furnace set to 150
11/29/2011	1:21:18 PM	Helium valve closed
11/29/2011	1:21:18 PM	H2 valve closed
11/29/2011	1:21:18 PM	BCl3 valve closed
11/29/2011	1:21:18 PM	PH3 valve closed
11/29/2011	1:21:18 PM	SiCl4 pre valve closed
11/29/2011	1:21:18 PM	SiCl4 post valve closed
11/29/2011	1:21:18 PM	Bypass valve closed
11/29/2011	1:21:18 PM	Bubbler valve closed
11/29/2011	1:21:18 PM	Main Vac valve opened
11/29/2011	1:21:18 PM	Helium MFC set to  0.000000
11/29/2011	1:21:18 PM	H2 MFC set to  0.000000
11/29/2011	1:21:18 PM	BCl3 MFC set to  0.000000
11/29/2011	1:21:18 PM	PHl3 MFC set to  0.000000
11/29/2011	1:21:18 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:21:18 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:21:18 PM	Tube furnace set to 150
11/29/2011	1:21:49 PM	H2 valve closed
11/29/2011	1:21:49 PM	BCl3 valve closed
11/29/2011	1:21:49 PM	PH3 valve closed
11/29/2011	1:21:49 PM	SiCl4 pre valve closed
11/29/2011	1:21:49 PM	SiCl4 post valve closed
11/29/2011	1:21:49 PM	Bypass valve closed
11/29/2011	1:21:49 PM	Bubbler valve closed
11/29/2011	1:21:49 PM	Helium valve opened
11/29/2011	1:21:49 PM	Main Vac valve opened
11/29/2011	1:21:49 PM	Helium MFC set to  20.000000
11/29/2011	1:21:49 PM	H2 MFC set to  0.000000
11/29/2011	1:21:49 PM	BCl3 MFC set to  0.000000
11/29/2011	1:21:49 PM	PHl3 MFC set to  0.000000
11/29/2011	1:21:49 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:21:49 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:21:49 PM	Tube furnace set to 150
11/29/2011	1:22:19 PM	Helium valve closed
11/29/2011	1:22:19 PM	H2 valve closed
11/29/2011	1:22:19 PM	BCl3 valve closed
11/29/2011	1:22:19 PM	PH3 valve closed
11/29/2011	1:22:19 PM	SiCl4 pre valve closed
11/29/2011	1:22:19 PM	SiCl4 post valve closed
11/29/2011	1:22:19 PM	Bypass valve closed
11/29/2011	1:22:19 PM	Bubbler valve closed
11/29/2011	1:22:19 PM	Main Vac valve opened
11/29/2011	1:22:19 PM	Helium MFC set to  0.000000
11/29/2011	1:22:19 PM	H2 MFC set to  0.000000
11/29/2011	1:22:19 PM	BCl3 MFC set to  0.000000
11/29/2011	1:22:19 PM	PHl3 MFC set to  0.000000
11/29/2011	1:22:19 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:22:19 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:22:19 PM	Tube furnace set to 150
11/29/2011	1:22:49 PM	H2 valve closed
11/29/2011	1:22:49 PM	BCl3 valve closed
11/29/2011	1:22:49 PM	PH3 valve closed
11/29/2011	1:22:49 PM	SiCl4 pre valve closed
11/29/2011	1:22:49 PM	SiCl4 post valve closed
11/29/2011	1:22:49 PM	Bypass valve closed
11/29/2011	1:22:49 PM	Bubbler valve closed
11/29/2011	1:22:49 PM	Helium valve opened
11/29/2011	1:22:49 PM	Main Vac valve opened
11/29/2011	1:22:49 PM	Helium MFC set to  20.000000
11/29/2011	1:22:49 PM	H2 MFC set to  0.000000
11/29/2011	1:22:49 PM	BCl3 MFC set to  0.000000
11/29/2011	1:22:49 PM	PHl3 MFC set to  0.000000
11/29/2011	1:22:49 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:22:49 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:22:49 PM	Tube furnace set to 150
11/29/2011	1:23:19 PM	Helium valve closed
11/29/2011	1:23:19 PM	H2 valve closed
11/29/2011	1:23:19 PM	BCl3 valve closed
11/29/2011	1:23:19 PM	PH3 valve closed
11/29/2011	1:23:19 PM	SiCl4 pre valve closed
11/29/2011	1:23:19 PM	SiCl4 post valve closed
11/29/2011	1:23:19 PM	Bypass valve closed
11/29/2011	1:23:19 PM	Bubbler valve closed
11/29/2011	1:23:19 PM	Main Vac valve opened
11/29/2011	1:23:19 PM	Helium MFC set to  0.000000
11/29/2011	1:23:19 PM	H2 MFC set to  0.000000
11/29/2011	1:23:19 PM	BCl3 MFC set to  0.000000
11/29/2011	1:23:19 PM	PHl3 MFC set to  0.000000
11/29/2011	1:23:19 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:23:19 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:23:19 PM	Tube furnace set to 150
11/29/2011	1:23:49 PM	H2 valve closed
11/29/2011	1:23:49 PM	BCl3 valve closed
11/29/2011	1:23:49 PM	PH3 valve closed
11/29/2011	1:23:49 PM	SiCl4 pre valve closed
11/29/2011	1:23:49 PM	SiCl4 post valve closed
11/29/2011	1:23:49 PM	Bypass valve closed
11/29/2011	1:23:49 PM	Bubbler valve closed
11/29/2011	1:23:49 PM	Helium valve opened
11/29/2011	1:23:49 PM	Main Vac valve opened
11/29/2011	1:23:49 PM	Helium MFC set to  20.000000
11/29/2011	1:23:49 PM	H2 MFC set to  0.000000
11/29/2011	1:23:49 PM	BCl3 MFC set to  0.000000
11/29/2011	1:23:49 PM	PHl3 MFC set to  0.000000
11/29/2011	1:23:49 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:23:49 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:23:50 PM	Tube furnace set to 150
11/29/2011	1:24:20 PM	Helium valve closed
11/29/2011	1:24:20 PM	H2 valve closed
11/29/2011	1:24:20 PM	BCl3 valve closed
11/29/2011	1:24:20 PM	PH3 valve closed
11/29/2011	1:24:20 PM	SiCl4 pre valve closed
11/29/2011	1:24:20 PM	SiCl4 post valve closed
11/29/2011	1:24:20 PM	Bypass valve closed
11/29/2011	1:24:20 PM	Bubbler valve closed
11/29/2011	1:24:20 PM	Main Vac valve opened
11/29/2011	1:24:20 PM	Helium MFC set to  0.000000
11/29/2011	1:24:20 PM	H2 MFC set to  0.000000
11/29/2011	1:24:20 PM	BCl3 MFC set to  0.000000
11/29/2011	1:24:20 PM	PHl3 MFC set to  0.000000
11/29/2011	1:24:20 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:24:20 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:24:20 PM	Tube furnace set to 150
11/29/2011	1:24:50 PM	H2 valve closed
11/29/2011	1:24:50 PM	BCl3 valve closed
11/29/2011	1:24:50 PM	PH3 valve closed
11/29/2011	1:24:50 PM	SiCl4 pre valve closed
11/29/2011	1:24:50 PM	SiCl4 post valve closed
11/29/2011	1:24:50 PM	Bypass valve closed
11/29/2011	1:24:50 PM	Bubbler valve closed
11/29/2011	1:24:50 PM	Helium valve opened
11/29/2011	1:24:50 PM	Main Vac valve opened
11/29/2011	1:24:50 PM	Helium MFC set to  20.000000
11/29/2011	1:24:50 PM	H2 MFC set to  0.000000
11/29/2011	1:24:50 PM	BCl3 MFC set to  0.000000
11/29/2011	1:24:50 PM	PHl3 MFC set to  0.000000
11/29/2011	1:24:50 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:24:50 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:24:50 PM	Tube furnace set to 150
11/29/2011	1:25:20 PM	Helium valve closed
11/29/2011	1:25:20 PM	H2 valve closed
11/29/2011	1:25:20 PM	BCl3 valve closed
11/29/2011	1:25:20 PM	PH3 valve closed
11/29/2011	1:25:20 PM	SiCl4 pre valve closed
11/29/2011	1:25:20 PM	SiCl4 post valve closed
11/29/2011	1:25:20 PM	Bypass valve closed
11/29/2011	1:25:20 PM	Bubbler valve closed
11/29/2011	1:25:20 PM	Main Vac valve opened
11/29/2011	1:25:20 PM	Helium MFC set to  0.000000
11/29/2011	1:25:20 PM	H2 MFC set to  0.000000
11/29/2011	1:25:20 PM	BCl3 MFC set to  0.000000
11/29/2011	1:25:20 PM	PHl3 MFC set to  0.000000
11/29/2011	1:25:20 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:25:20 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:25:20 PM	Tube furnace set to 150
11/29/2011	1:25:50 PM	H2 valve closed
11/29/2011	1:25:50 PM	BCl3 valve closed
11/29/2011	1:25:50 PM	PH3 valve closed
11/29/2011	1:25:50 PM	SiCl4 pre valve closed
11/29/2011	1:25:50 PM	SiCl4 post valve closed
11/29/2011	1:25:50 PM	Bypass valve closed
11/29/2011	1:25:50 PM	Bubbler valve closed
11/29/2011	1:25:50 PM	Helium valve opened
11/29/2011	1:25:50 PM	Main Vac valve opened
11/29/2011	1:25:50 PM	Helium MFC set to  20.000000
11/29/2011	1:25:50 PM	H2 MFC set to  0.000000
11/29/2011	1:25:50 PM	BCl3 MFC set to  0.000000
11/29/2011	1:25:50 PM	PHl3 MFC set to  0.000000
11/29/2011	1:25:50 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:25:50 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:25:50 PM	Tube furnace set to 150
11/29/2011	1:26:20 PM	Helium valve closed
11/29/2011	1:26:20 PM	H2 valve closed
11/29/2011	1:26:20 PM	BCl3 valve closed
11/29/2011	1:26:20 PM	PH3 valve closed
11/29/2011	1:26:20 PM	SiCl4 pre valve closed
11/29/2011	1:26:20 PM	SiCl4 post valve closed
11/29/2011	1:26:20 PM	Bypass valve closed
11/29/2011	1:26:20 PM	Bubbler valve closed
11/29/2011	1:26:20 PM	Main Vac valve opened
11/29/2011	1:26:20 PM	Helium MFC set to  0.000000
11/29/2011	1:26:20 PM	H2 MFC set to  0.000000
11/29/2011	1:26:20 PM	BCl3 MFC set to  0.000000
11/29/2011	1:26:20 PM	PHl3 MFC set to  0.000000
11/29/2011	1:26:20 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:26:20 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:26:21 PM	Tube furnace set to 150
11/29/2011	1:26:51 PM	H2 valve closed
11/29/2011	1:26:51 PM	BCl3 valve closed
11/29/2011	1:26:51 PM	PH3 valve closed
11/29/2011	1:26:51 PM	SiCl4 pre valve closed
11/29/2011	1:26:51 PM	SiCl4 post valve closed
11/29/2011	1:26:51 PM	Bypass valve closed
11/29/2011	1:26:51 PM	Bubbler valve closed
11/29/2011	1:26:51 PM	Helium valve opened
11/29/2011	1:26:51 PM	Main Vac valve opened
11/29/2011	1:26:51 PM	Helium MFC set to  20.000000
11/29/2011	1:26:51 PM	H2 MFC set to  0.000000
11/29/2011	1:26:51 PM	BCl3 MFC set to  0.000000
11/29/2011	1:26:51 PM	PHl3 MFC set to  0.000000
11/29/2011	1:26:51 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:26:51 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:26:51 PM	Tube furnace set to 150
11/29/2011	1:27:21 PM	Helium valve closed
11/29/2011	1:27:21 PM	H2 valve closed
11/29/2011	1:27:21 PM	BCl3 valve closed
11/29/2011	1:27:21 PM	PH3 valve closed
11/29/2011	1:27:21 PM	SiCl4 pre valve closed
11/29/2011	1:27:21 PM	SiCl4 post valve closed
11/29/2011	1:27:21 PM	Bypass valve closed
11/29/2011	1:27:21 PM	Bubbler valve closed
11/29/2011	1:27:21 PM	Main Vac valve opened
11/29/2011	1:27:21 PM	Helium MFC set to  0.000000
11/29/2011	1:27:21 PM	H2 MFC set to  0.000000
11/29/2011	1:27:21 PM	BCl3 MFC set to  0.000000
11/29/2011	1:27:21 PM	PHl3 MFC set to  0.000000
11/29/2011	1:27:21 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:27:21 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:27:21 PM	Tube furnace set to 150
11/29/2011	1:27:51 PM	H2 valve closed
11/29/2011	1:27:51 PM	BCl3 valve closed
11/29/2011	1:27:51 PM	PH3 valve closed
11/29/2011	1:27:51 PM	SiCl4 pre valve closed
11/29/2011	1:27:51 PM	SiCl4 post valve closed
11/29/2011	1:27:51 PM	Bypass valve closed
11/29/2011	1:27:51 PM	Bubbler valve closed
11/29/2011	1:27:51 PM	Helium valve opened
11/29/2011	1:27:51 PM	Main Vac valve opened
11/29/2011	1:27:51 PM	Helium MFC set to  20.000000
11/29/2011	1:27:51 PM	H2 MFC set to  0.000000
11/29/2011	1:27:51 PM	BCl3 MFC set to  0.000000
11/29/2011	1:27:51 PM	PHl3 MFC set to  0.000000
11/29/2011	1:27:51 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:27:51 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:27:51 PM	Tube furnace set to 150
11/29/2011	1:28:21 PM	Helium valve closed
11/29/2011	1:28:21 PM	H2 valve closed
11/29/2011	1:28:21 PM	BCl3 valve closed
11/29/2011	1:28:21 PM	PH3 valve closed
11/29/2011	1:28:21 PM	SiCl4 pre valve closed
11/29/2011	1:28:21 PM	SiCl4 post valve closed
11/29/2011	1:28:21 PM	Bypass valve closed
11/29/2011	1:28:21 PM	Bubbler valve closed
11/29/2011	1:28:21 PM	Main Vac valve opened
11/29/2011	1:28:21 PM	Helium MFC set to  0.000000
11/29/2011	1:28:21 PM	H2 MFC set to  0.000000
11/29/2011	1:28:21 PM	BCl3 MFC set to  0.000000
11/29/2011	1:28:21 PM	PHl3 MFC set to  0.000000
11/29/2011	1:28:21 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:28:21 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:28:21 PM	Tube furnace set to 150
11/29/2011	1:28:51 PM	H2 valve closed
11/29/2011	1:28:51 PM	BCl3 valve closed
11/29/2011	1:28:51 PM	PH3 valve closed
11/29/2011	1:28:51 PM	SiCl4 pre valve closed
11/29/2011	1:28:51 PM	SiCl4 post valve closed
11/29/2011	1:28:51 PM	Bypass valve closed
11/29/2011	1:28:51 PM	Bubbler valve closed
11/29/2011	1:28:52 PM	Helium valve opened
11/29/2011	1:28:52 PM	Main Vac valve opened
11/29/2011	1:28:52 PM	Helium MFC set to  20.000000
11/29/2011	1:28:52 PM	H2 MFC set to  0.000000
11/29/2011	1:28:52 PM	BCl3 MFC set to  0.000000
11/29/2011	1:28:52 PM	PHl3 MFC set to  0.000000
11/29/2011	1:28:52 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:28:52 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:28:52 PM	Tube furnace set to 150
11/29/2011	1:29:22 PM	Helium valve closed
11/29/2011	1:29:22 PM	H2 valve closed
11/29/2011	1:29:22 PM	BCl3 valve closed
11/29/2011	1:29:22 PM	PH3 valve closed
11/29/2011	1:29:22 PM	SiCl4 pre valve closed
11/29/2011	1:29:22 PM	SiCl4 post valve closed
11/29/2011	1:29:22 PM	Bypass valve closed
11/29/2011	1:29:22 PM	Bubbler valve closed
11/29/2011	1:29:22 PM	Main Vac valve opened
11/29/2011	1:29:22 PM	Helium MFC set to  0.000000
11/29/2011	1:29:22 PM	H2 MFC set to  0.000000
11/29/2011	1:29:22 PM	BCl3 MFC set to  0.000000
11/29/2011	1:29:22 PM	PHl3 MFC set to  0.000000
11/29/2011	1:29:22 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:29:22 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:29:22 PM	Tube furnace set to 150
11/29/2011	1:29:23 PM	Run finished at 1:29 PM
11/29/2011	1:30:52 PM	Main Vac valve closed
11/29/2011	1:31:13 PM	Main Vac valve opened
11/29/2011	1:31:52 PM	Recipe started at 1:31 PM
11/29/2011	1:31:52 PM	Helium valve closed
11/29/2011	1:31:52 PM	H2 valve closed
11/29/2011	1:31:52 PM	BCl3 valve closed
11/29/2011	1:31:52 PM	PH3 valve closed
11/29/2011	1:31:52 PM	SiCl4 pre valve closed
11/29/2011	1:31:52 PM	SiCl4 post valve closed
11/29/2011	1:31:52 PM	Main Vac valve closed
11/29/2011	1:31:52 PM	Bypass valve closed
11/29/2011	1:31:52 PM	Bubbler valve closed
11/29/2011	1:31:52 PM	Helium MFC set to  0.000000
11/29/2011	1:31:52 PM	H2 MFC set to  0.000000
11/29/2011	1:31:52 PM	BCl3 MFC set to  0.000000
11/29/2011	1:31:52 PM	PHl3 MFC set to  0.000000
11/29/2011	1:31:52 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:31:52 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:31:52 PM	Tube furnace set to 0
11/29/2011	1:31:55 PM	Helium valve closed
11/29/2011	1:31:55 PM	BCl3 valve closed
11/29/2011	1:31:55 PM	PH3 valve closed
11/29/2011	1:31:55 PM	SiCl4 pre valve closed
11/29/2011	1:31:55 PM	SiCl4 post valve closed
11/29/2011	1:31:55 PM	Main Vac valve closed
11/29/2011	1:31:55 PM	Bypass valve closed
11/29/2011	1:31:55 PM	Bubbler valve closed
11/29/2011	1:31:55 PM	H2 valve opened
11/29/2011	1:31:55 PM	Helium MFC set to  0.000000
11/29/2011	1:31:55 PM	H2 MFC set to  500.000000
11/29/2011	1:31:55 PM	BCl3 MFC set to  0.000000
11/29/2011	1:31:55 PM	PHl3 MFC set to  0.000000
11/29/2011	1:31:55 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:31:55 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:31:55 PM	Tube furnace set to 0
11/29/2011	1:32:58 PM	Helium valve closed
11/29/2011	1:32:58 PM	BCl3 valve closed
11/29/2011	1:32:58 PM	PH3 valve closed
11/29/2011	1:32:58 PM	SiCl4 pre valve closed
11/29/2011	1:32:58 PM	SiCl4 post valve closed
11/29/2011	1:32:58 PM	Main Vac valve closed
11/29/2011	1:32:58 PM	Bypass valve closed
11/29/2011	1:32:58 PM	H2 valve opened
11/29/2011	1:32:58 PM	Bubbler valve opened
11/29/2011	1:32:58 PM	Helium MFC set to  0.000000
11/29/2011	1:32:58 PM	H2 MFC set to  500.000000
11/29/2011	1:32:58 PM	BCl3 MFC set to  0.000000
11/29/2011	1:32:58 PM	PHl3 MFC set to  0.000000
11/29/2011	1:32:58 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:32:58 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:32:58 PM	Tube furnace set to 0
11/29/2011	1:32:59 PM	Helium valve closed
11/29/2011	1:32:59 PM	BCl3 valve closed
11/29/2011	1:32:59 PM	PH3 valve closed
11/29/2011	1:32:59 PM	SiCl4 pre valve closed
11/29/2011	1:32:59 PM	SiCl4 post valve closed
11/29/2011	1:32:59 PM	Main Vac valve closed
11/29/2011	1:32:59 PM	Bypass valve closed
11/29/2011	1:32:59 PM	H2 valve opened
11/29/2011	1:32:59 PM	Bubbler valve opened
11/29/2011	1:32:59 PM	Helium MFC set to  0.000000
11/29/2011	1:32:59 PM	H2 MFC set to  500.000000
11/29/2011	1:32:59 PM	BCl3 MFC set to  0.000000
11/29/2011	1:32:59 PM	PHl3 MFC set to  0.000000
11/29/2011	1:32:59 PM	SiCl4 MFC set to  0.000000
11/29/2011	1:32:59 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:33:00 PM	Tube furnace set to 1000
11/29/2011	1:57:59 PM	Helium valve closed
11/29/2011	1:57:59 PM	PH3 valve closed
11/29/2011	1:57:59 PM	Main Vac valve closed
11/29/2011	1:57:59 PM	Bypass valve closed
11/29/2011	1:57:59 PM	H2 valve opened
11/29/2011	1:57:59 PM	BCl3 valve opened
11/29/2011	1:57:59 PM	SiCl4 pre valve opened
11/29/2011	1:58:00 PM	SiCl4 post valve opened
11/29/2011	1:58:00 PM	Bubbler valve opened
11/29/2011	1:58:00 PM	Helium MFC set to  0.000000
11/29/2011	1:58:00 PM	H2 MFC set to  500.000000
11/29/2011	1:58:00 PM	BCl3 MFC set to  3.000000
11/29/2011	1:58:00 PM	PHl3 MFC set to  0.000000
11/29/2011	1:58:00 PM	SiCl4 MFC set to  25.000000
11/29/2011	1:58:00 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	1:58:00 PM	Tube furnace set to 1000
11/29/2011	2:28:00 PM	Helium valve closed
11/29/2011	2:28:00 PM	BCl3 valve closed
11/29/2011	2:28:00 PM	PH3 valve closed
11/29/2011	2:28:00 PM	SiCl4 pre valve closed
11/29/2011	2:28:00 PM	SiCl4 post valve closed
11/29/2011	2:28:00 PM	Main Vac valve closed
11/29/2011	2:28:00 PM	Bypass valve closed
11/29/2011	2:28:00 PM	H2 valve opened
11/29/2011	2:28:00 PM	Bubbler valve opened
11/29/2011	2:28:00 PM	Helium MFC set to  0.000000
11/29/2011	2:28:00 PM	H2 MFC set to  500.000000
11/29/2011	2:28:00 PM	BCl3 MFC set to  0.000000
11/29/2011	2:28:00 PM	PHl3 MFC set to  0.000000
11/29/2011	2:28:00 PM	SiCl4 MFC set to  0.000000
11/29/2011	2:28:00 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	2:28:00 PM	Tube furnace set to 750
11/29/2011	2:38:00 PM	H2 valve closed
11/29/2011	2:38:00 PM	BCl3 valve closed
11/29/2011	2:38:00 PM	PH3 valve closed
11/29/2011	2:38:00 PM	SiCl4 pre valve closed
11/29/2011	2:38:00 PM	SiCl4 post valve closed
11/29/2011	2:38:00 PM	Main Vac valve closed
11/29/2011	2:38:00 PM	Bypass valve closed
11/29/2011	2:38:00 PM	Helium valve opened
11/29/2011	2:38:00 PM	Bubbler valve opened
11/29/2011	2:38:00 PM	Helium MFC set to  500.000000
11/29/2011	2:38:00 PM	H2 MFC set to  0.000000
11/29/2011	2:38:00 PM	BCl3 MFC set to  0.000000
11/29/2011	2:38:00 PM	PHl3 MFC set to  0.000000
11/29/2011	2:38:00 PM	SiCl4 MFC set to  0.000000
11/29/2011	2:38:00 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	2:38:00 PM	Tube furnace set to 0
11/29/2011	2:44:45 PM	Helium valve closed
11/29/2011	2:44:46 PM	H2 valve closed
11/29/2011	2:44:46 PM	BCl3 valve closed
11/29/2011	2:44:46 PM	PH3 valve closed
11/29/2011	2:44:46 PM	SiCl4 pre valve closed
11/29/2011	2:44:46 PM	SiCl4 post valve closed
11/29/2011	2:44:46 PM	Main Vac valve closed
11/29/2011	2:44:46 PM	Bypass valve closed
11/29/2011	2:44:46 PM	Bubbler valve closed
11/29/2011	2:44:46 PM	Helium MFC set to  0.000000
11/29/2011	2:44:46 PM	H2 MFC set to  0.000000
11/29/2011	2:44:46 PM	BCl3 MFC set to  0.000000
11/29/2011	2:44:46 PM	PHl3 MFC set to  0.000000
11/29/2011	2:44:46 PM	SiCl4 MFC set to  0.000000
11/29/2011	2:44:46 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	2:44:46 PM	Tube furnace set to 0
11/29/2011	2:44:47 PM	Run finished at 2:44 PM
11/29/2011	2:44:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2011	2:44:56 PM	Recipe started at 2:44 PM
11/29/2011	2:44:56 PM	Helium valve closed
11/29/2011	2:44:56 PM	H2 valve closed
11/29/2011	2:44:56 PM	BCl3 valve closed
11/29/2011	2:44:56 PM	PH3 valve closed
11/29/2011	2:44:56 PM	SiCl4 pre valve closed
11/29/2011	2:44:56 PM	SiCl4 post valve closed
11/29/2011	2:44:56 PM	Main Vac valve closed
11/29/2011	2:44:56 PM	Bypass valve closed
11/29/2011	2:44:56 PM	Bubbler valve closed
11/29/2011	2:44:56 PM	Helium MFC set to  0.000000
11/29/2011	2:44:56 PM	H2 MFC set to  0.000000
11/29/2011	2:44:56 PM	BCl3 MFC set to  0.000000
11/29/2011	2:44:56 PM	PHl3 MFC set to  0.000000
11/29/2011	2:44:56 PM	SiCl4 MFC set to  0.000000
11/29/2011	2:44:56 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	2:44:56 PM	Tube furnace set to 0
11/29/2011	2:44:59 PM	H2 valve closed
11/29/2011	2:44:59 PM	BCl3 valve closed
11/29/2011	2:44:59 PM	PH3 valve closed
11/29/2011	2:44:59 PM	SiCl4 pre valve closed
11/29/2011	2:44:59 PM	SiCl4 post valve closed
11/29/2011	2:44:59 PM	Main Vac valve closed
11/29/2011	2:44:59 PM	Bypass valve closed
11/29/2011	2:44:59 PM	Bubbler valve closed
11/29/2011	2:44:59 PM	Helium valve opened
11/29/2011	2:44:59 PM	Helium MFC set to  500.000000
11/29/2011	2:44:59 PM	H2 MFC set to  0.000000
11/29/2011	2:44:59 PM	BCl3 MFC set to  0.000000
11/29/2011	2:44:59 PM	PHl3 MFC set to  0.000000
11/29/2011	2:44:59 PM	SiCl4 MFC set to  0.000000
11/29/2011	2:44:59 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	2:44:59 PM	Tube furnace set to 0
11/29/2011	2:45:00 PM	Helium valve closed
11/29/2011	2:45:00 PM	H2 valve closed
11/29/2011	2:45:00 PM	BCl3 valve closed
11/29/2011	2:45:00 PM	PH3 valve closed
11/29/2011	2:45:00 PM	SiCl4 pre valve closed
11/29/2011	2:45:00 PM	SiCl4 post valve closed
11/29/2011	2:45:00 PM	Main Vac valve closed
11/29/2011	2:45:00 PM	Bypass valve closed
11/29/2011	2:45:00 PM	Bubbler valve closed
11/29/2011	2:45:00 PM	Helium MFC set to  0.000000
11/29/2011	2:45:00 PM	H2 MFC set to  0.000000
11/29/2011	2:45:00 PM	BCl3 MFC set to  0.000000
11/29/2011	2:45:00 PM	PHl3 MFC set to  0.000000
11/29/2011	2:45:00 PM	SiCl4 MFC set to  0.000000
11/29/2011	2:45:00 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	2:45:00 PM	Tube furnace set to 0
11/29/2011	2:45:01 PM	Run finished at 2:45 PM
11/29/2011	2:45:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/29/2011	2:49:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/29/2011	2:49:59 PM	Recipe started at 2:49 PM
11/29/2011	2:49:59 PM	Helium valve closed
11/29/2011	2:49:59 PM	H2 valve closed
11/29/2011	2:49:59 PM	BCl3 valve closed
11/29/2011	2:49:59 PM	PH3 valve closed
11/29/2011	2:49:59 PM	SiCl4 pre valve closed
11/29/2011	2:49:59 PM	SiCl4 post valve closed
11/29/2011	2:49:59 PM	Main Vac valve closed
11/29/2011	2:49:59 PM	Bubbler valve closed
11/29/2011	2:49:59 PM	Bypass valve opened
11/29/2011	2:49:59 PM	Helium MFC set to  0.000000
11/29/2011	2:49:59 PM	H2 MFC set to  0.000000
11/29/2011	2:49:59 PM	BCl3 MFC set to  0.000000
11/29/2011	2:49:59 PM	PHl3 MFC set to  0.000000
11/29/2011	2:49:59 PM	SiCl4 MFC set to  0.000000
11/29/2011	2:49:59 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	2:50:00 PM	Tube furnace set to 0
11/29/2011	2:51:47 PM	Helium valve closed
11/29/2011	2:51:47 PM	H2 valve closed
11/29/2011	2:51:47 PM	BCl3 valve closed
11/29/2011	2:51:47 PM	PH3 valve closed
11/29/2011	2:51:47 PM	SiCl4 pre valve closed
11/29/2011	2:51:47 PM	SiCl4 post valve closed
11/29/2011	2:51:47 PM	Main Vac valve closed
11/29/2011	2:51:47 PM	Bubbler valve closed
11/29/2011	2:51:47 PM	Bypass valve opened
11/29/2011	2:51:47 PM	Helium MFC set to  0.000000
11/29/2011	2:51:47 PM	H2 MFC set to  0.000000
11/29/2011	2:51:47 PM	BCl3 MFC set to  0.000000
11/29/2011	2:51:47 PM	PHl3 MFC set to  0.000000
11/29/2011	2:51:47 PM	SiCl4 MFC set to  0.000000
11/29/2011	2:51:47 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	2:51:47 PM	Tube furnace set to 0
11/29/2011	2:52:47 PM	Helium valve closed
11/29/2011	2:52:47 PM	H2 valve closed
11/29/2011	2:52:47 PM	BCl3 valve closed
11/29/2011	2:52:47 PM	PH3 valve closed
11/29/2011	2:52:47 PM	SiCl4 pre valve closed
11/29/2011	2:52:47 PM	SiCl4 post valve closed
11/29/2011	2:52:47 PM	Bypass valve closed
11/29/2011	2:52:47 PM	Bubbler valve closed
11/29/2011	2:52:47 PM	Main Vac valve opened
11/29/2011	2:52:47 PM	Helium MFC set to  0.000000
11/29/2011	2:52:47 PM	H2 MFC set to  0.000000
11/29/2011	2:52:47 PM	BCl3 MFC set to  0.000000
11/29/2011	2:52:47 PM	PHl3 MFC set to  0.000000
11/29/2011	2:52:47 PM	SiCl4 MFC set to  0.000000
11/29/2011	2:52:47 PM	Bypass solenoid MFC set to  0.000000
11/29/2011	2:52:47 PM	Tube furnace set to 0
11/29/2011	2:52:48 PM	Run finished at 2:52 PM
11/29/2011	2:52:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
